JPS6262253A - Through hole inspector - Google Patents

Through hole inspector

Info

Publication number
JPS6262253A
JPS6262253A JP20202185A JP20202185A JPS6262253A JP S6262253 A JPS6262253 A JP S6262253A JP 20202185 A JP20202185 A JP 20202185A JP 20202185 A JP20202185 A JP 20202185A JP S6262253 A JPS6262253 A JP S6262253A
Authority
JP
Japan
Prior art keywords
hole
image sensor
holes
detector
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20202185A
Other languages
Japanese (ja)
Inventor
Kikuo Mita
三田 喜久夫
Moritoshi Ando
護俊 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP20202185A priority Critical patent/JPS6262253A/en
Publication of JPS6262253A publication Critical patent/JPS6262253A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95692Patterns showing hole parts, e.g. honeycomb filtering structures

Abstract

PURPOSE:To enable a high-speed inspection of through-holes moving continuously, by combining a detector for detecting positions of through-holes formed in a light transmitting substrate and an image sensor for picking up images of the through-holes to control the timing of picking up images of through-holes on the basis of information from the detector. CONSTITUTION:A circuit board 11 in which several trains 13a-13c of through holes 13 are formed passes under a detector 14 and then under an image sensor 15. The detector 14 detects the through-holes 13 under it and inputs the resulting information into a control circuit 20. The control circuit 20 calculates the time at which the through-hole 13 arrives under the image sensor 15 from the moving speed or movement of a table 27 moving at a fixed speed and makes the image sensor 15 ready for picking up images at the time. Utilizing light form a light source 16, the element 15 picks up images to check the through-holes 13 for defects.

Description

【発明の詳細な説明】 〔概要〕 透光性回路基板に形成したスルーホールの欠陥検査装置
において、 スルーホールの位置を検知する検知器と、該スルーホー
ルを撮像する撮像素子とを併設し、該検知器からの情報
に基づき該撮像のタイミングを制御したことにより、 連続に移動するスルーホールの検査を実現せしめた。
[Detailed Description of the Invention] [Summary] A defect inspection device for through holes formed in a translucent circuit board is equipped with a detector that detects the position of the through hole and an image sensor that takes an image of the through hole, By controlling the timing of the imaging based on information from the detector, we were able to inspect continuously moving through-holes.

〔産業上の利用分野〕[Industrial application field]

本発明は透光性を有する回路基板に形成したスルーホー
ルの内壁に発生する欠陥を検査する装置の改良に関する
The present invention relates to an improvement in an apparatus for inspecting defects occurring on the inner wall of a through hole formed in a light-transmitting circuit board.

両面印刷配線板や多層印刷配線板の導体パターン、およ
び該導体パターンを眉間接続するスルーホールの形成さ
れた回路基板において、スルーホールはめっき形成した
内壁に切れ目やピンホール □等の欠陥の生じることが
ある。
In conductor patterns of double-sided printed wiring boards and multilayer printed wiring boards, and circuit boards with through holes that connect the conductor patterns between the eyebrows, through holes can cause defects such as cuts and pinholes on the plated inner wall. There is.

かかる欠陥は前記接続を阻害し回路基板の信頼性を低下
させるため、回路基板に回路素子を搭載する前に検査す
る必要があり、各種検査装置が開発されているが、小径
のスルーホール内を検査する難しさがある。そこで、回
路基板に使用する絶縁材料の透光性を利用し該難しさを
解決した装置として、本出願人が昭和57年12月28
日付けで出願した特願昭57−228672のスルーホ
ール検査法に基づくものは、検査に高速性が付与され、
自動化を可能ならしめた等の優れた利点がある。
Since such defects impede the connection and reduce the reliability of the circuit board, it is necessary to inspect them before mounting circuit elements on the circuit board. Various inspection devices have been developed, but these There are difficulties in testing. Therefore, on December 28, 1982, the applicant proposed a device that solved this difficulty by utilizing the translucency of the insulating material used for circuit boards.
The method based on the through-hole inspection method of Japanese Patent Application No. 57-228672, filed on
It has excellent advantages such as making automation possible.

〔従来の技術〕[Conventional technology]

第6図は前記スルーホール検査法の実施例を説明するた
めの図であり、1は透光性基板2にスルーホール4を形
成した回路基板、3はスルーホール4内壁に被着した導
体層、5はスルーホール4の照明側開口を覆うマスク、
7は光学系を構成するレンズ、8は光検知器であって、
マスク5は回路基板1の照明側において回路基板1から
予め決められた距離だけ隔離し位置されている。
FIG. 6 is a diagram for explaining an embodiment of the through-hole inspection method, in which 1 is a circuit board in which through-holes 4 are formed on a transparent substrate 2, and 3 is a conductor layer adhered to the inner wall of the through-hole 4. , 5 is a mask that covers the illumination side opening of the through hole 4;
7 is a lens constituting the optical system, 8 is a photodetector,
The mask 5 is located on the illumination side of the circuit board 1 and separated from the circuit board 1 by a predetermined distance.

かから構成される装置は、マスク5に遮蔽される前にス
ルーホール4の位置を検出したのち、回路基板1を移動
しマスク5に遮蔽されたスルーホール4を含む領域を照
明光6が照明する。そこで、もし導体層3に欠陥9があ
れば、基板2内に入射し分散した光が、欠陥9からスル
ーホール4内に漏れるため、スルーホール4の前記検出
位置にスルーホール4内の漏洩光を、レンズ7を介し光
検知器8により検知することで、欠陥9の有無を知るこ
とができる。
The device configured as above detects the position of the through hole 4 before it is shielded by the mask 5, and then moves the circuit board 1 so that the illumination light 6 illuminates the area including the through hole 4 that is shielded by the mask 5. do. Therefore, if there is a defect 9 in the conductor layer 3, the light that enters the substrate 2 and is dispersed leaks from the defect 9 into the through hole 4, so that the leaked light in the through hole 4 reaches the detection position of the through hole 4. By detecting this with the photodetector 8 through the lens 7, the presence or absence of the defect 9 can be known.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

前記従来のスルーホール検査装置において、光検知器8
はCOD等の一次元センサを使用し、複数個のスルーホ
ール4を順次検査するため回路基板1が移動するように
構成されている。しかし、COD等の一次元撮像素子を
利用すると連続移動しながら検査できる反面、十分な感
度が得られず、低照度で撮像可能な高感度TVカメラを
利用すれば、回路基板1の連続送りができない(像ブレ
が生じる)という問題点があり、その対策が要望されて
いた。
In the conventional through-hole inspection device, the photodetector 8
The circuit board 1 is configured to move in order to sequentially inspect a plurality of through holes 4 using a one-dimensional sensor such as COD. However, while using a one-dimensional imaging device such as COD allows inspection while continuously moving, it does not have sufficient sensitivity, and if a high-sensitivity TV camera that can take images in low illuminance is used, it is difficult to continuously move the circuit board 1. There is a problem that it cannot be done (image blur occurs), and a countermeasure has been requested.

〔問題点を解決するための手段〕[Means for solving problems]

第1図は本発明の基本構成になる装置概要を示す図であ
る。
FIG. 1 is a diagram showing an outline of a device that is the basic configuration of the present invention.

第1図において、11は透光性基板12に複数個のスル
ーホール13を形成した回路基板、14はスルーホール
を検知する検知器、15はスルーホール14を撮像する
撮像素子、16はは撮像素子15に対向する光源、17
はスルーホール14の照明側開口を覆うマスク、18は
撮像光の投射手段、19は回路基板11を移動させる手
段、20は撮像素子15等の制御回路、21は撮像の検
査回路である。
In FIG. 1, 11 is a circuit board in which a plurality of through holes 13 are formed on a transparent substrate 12, 14 is a detector for detecting the through holes, 15 is an image pickup element for taking images of the through holes 14, and 16 is an image pickup device. a light source 17 facing the element 15;
18 is a projection means for imaging light; 19 is a means for moving the circuit board 11; 20 is a control circuit for the image sensor 15 and the like; and 21 is an imaging inspection circuit.

上記問題点は第1図に示すように、 透光性を有する回路基板11に形成したスルーホール1
3の内壁の導電層欠陥を検査する装置であり、回路基板
11の一方の面に対向し配設した光源16と、 回路基板11の他方の面に対向配設しスルーホール13
を検知する検知器14およびスルーホール13を撮像す
る撮像素子15と、 撮像素子15にスルーホール13の撮像光を短時間だけ
投射させる手段18と、 光源16と検知器14と撮像素子15または回路基板1
1の一方を回路基板11の面と平行方向へ移動させる手
段19と、 検知器14の検知情報により撮像素子15および撮像光
投射手段18を動作させる制御回路2oとを具えてなる
ことを特徴とし、 さらには、撮像光投射手段18が、回路基板11と撮像
素子15との間に配設したシャッタであること、撮像光
投射手段18が、光源16の瞬間点灯であること、 移動手段19が、撮像素子15および撮像光投射手段1
8の動作に同期し、速度制御されるように構成してなる
ことを特徴とする、スルーホール検査装置により解決さ
れる。
As shown in FIG.
This is an apparatus for inspecting conductive layer defects on the inner wall of circuit board 11, and includes a light source 16 disposed opposite to one surface of circuit board 11, and a through hole 13 disposed opposite to the other surface of circuit board 11.
a detector 14 for detecting the through hole 13; a means 18 for projecting the imaging light of the through hole 13 onto the image sensor 15 for a short time; a light source 16, the detector 14, and the image sensor 15 or the circuit. Board 1
1 in a direction parallel to the surface of the circuit board 11; and a control circuit 2o that operates the image pickup device 15 and the imaging light projection means 18 based on the detection information of the detector 14. Further, the imaging light projection means 18 is a shutter disposed between the circuit board 11 and the imaging element 15, the imaging light projection means 18 is instantaneous lighting of the light source 16, and the moving means 19 is , image sensor 15 and imaging light projection means 1
The present invention is solved by a through-hole inspection device characterized in that it is configured to be speed-controlled in synchronization with the operation of No. 8.

〔作用〕[Effect]

前後方向に複数個(図は4個)のスルーホール13が整
列し、その複数列(図は3列) 13a、13b、13
Cが左右方向に形成された回路基板11は、検知器14
の下方を通過したのち、撮像素子15の下方を通過する
ように移動する。
A plurality of through holes 13 (four in the figure) are arranged in the front-rear direction, and the plurality of through holes 13 (three in the figure) 13a, 13b, 13
The circuit board 11 on which C is formed in the left and right direction is the detector 14
After passing under the image sensor 15, the image pickup device 15 moves to pass under the image sensor 15.

そして検知器14は、例えばスルーホール列13aがそ
の下方を通過したことを検知し、その検知情報が入力さ
れた制御回路20は、該検知情報に基づきスルーホール
列13aが撮像素子15の下方に位置したとき、撮像素
子15および撮像光の投射手段18を動作させる。
Then, the detector 14 detects, for example, that the through-hole row 13a has passed below it, and the control circuit 20, to which the detection information is input, detects that the through-hole row 13a has passed below the image sensor 15 based on the detection information. When positioned, the imaging device 15 and imaging light projection means 18 are operated.

すると、光源17からの照明光が瞬間的に照射されたス
ルーホール列13aは撮像素子18に撮像され、その映
像から欠陥スルーホール13の有無、即ち欠陥により内
部が明るく撮像されたスルーホール13の有無を検査回
路21が判定する。
Then, the through-hole rows 13a that are momentarily irradiated with the illumination light from the light source 17 are imaged by the imaging device 18, and from the image, it is possible to determine whether or not there are defective through-holes 13, that is, through-holes 13 whose interiors are brightly imaged due to defects. The inspection circuit 21 determines the presence or absence.

従って、本発明では撮像素子18にTVカメラ等の二次
元素子を使用可能となり、回路基板11の移動中に該撮
像が可能となる。
Therefore, in the present invention, a secondary element such as a TV camera can be used as the image sensor 18, and the image can be taken while the circuit board 11 is moving.

〔実施例〕〔Example〕

以下に、図面を用いて本発明の実施例になるスルーホー
ル検査装置を説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A through-hole inspection apparatus according to an embodiment of the present invention will be described below with reference to the drawings.

第2図は本発明の第1の実施例になるスルーホール検査
装置の概要を示す図、第3図は前記装置で撮像された映
像例、第4図は本発明の第2の実施例になるスルーホー
ル検査装置の概要を示す図、第5図は本発明の第3の実
施例になるスルーホール検査装置の概要を示す図である
FIG. 2 is a diagram showing an outline of a through-hole inspection device according to a first embodiment of the present invention, FIG. 3 is an example of an image taken by the device, and FIG. 4 is a diagram showing an outline of a through-hole inspection device according to a second embodiment of the present invention. FIG. 5 is a diagram schematically showing a through-hole inspection apparatus according to a third embodiment of the present invention.

第1図と共通部分に同一符号を使用した第2図において
、21は撮像素子(TVカメラ)15の撮像信号からス
ルーホール欠陥の判定を行う検査回路、22は検出器1
4に対向する光源、23.24は光学系を構成するレン
ズ系、25は第1図の手段18に相当し例えば液晶パネ
ル等を利用し電子駆動されるシャッタ、26は回転エン
コーダ、27は回転エンコーダ26にて移動する移動テ
ーブルであり、回転エンコーダ26と回路基板11を搭
載する移動テーブル27とが、第1図の移動手段19に
相当する。
In FIG. 2, in which the same reference numerals are used for parts common to those in FIG.
4, a light source facing 4; 23 and 24 a lens system constituting an optical system; 25, a shutter which corresponds to the means 18 in FIG. 1 and is electronically driven using, for example, a liquid crystal panel; 26, a rotary encoder; This is a moving table that is moved by an encoder 26, and the moving table 27 on which the rotary encoder 26 and the circuit board 11 are mounted corresponds to the moving means 19 in FIG.

このように構成された装置において、回路基板11を搭
載し固定したテーブル27が、図の左方から右方へ連続
的に移動するとき、スルーホール列13a、 13b、
 13cは検知器14の下方を通過したのち、撮像素子
15の下方を通過するようになる。
In the device configured in this way, when the table 27 on which the circuit board 11 is mounted and fixed moves continuously from the left to the right in the figure, the through hole rows 13a, 13b,
13c passes below the detector 14 and then passes below the image sensor 15.

そこで、検知器14はその下方を通過したスルーホール
13を検知しその情報を制御回路20に入力する。する
と!1lff1回路20は、一定速度で移動するテーブ
ル27の移動速度または移動量から、検知器14の下方
を通過したスルーホール13が撮像素子15の下方に位
置したときシャッタ25を瞬間的に開閉させると共に、
撮像素子15を撮像状態にする。
Therefore, the detector 14 detects the through hole 13 passing under it and inputs the information to the control circuit 20. Then! The 1lff1 circuit 20 instantaneously opens and closes the shutter 25 when the through hole 13 that has passed below the detector 14 is located below the image sensor 15 based on the moving speed or amount of movement of the table 27 that moves at a constant speed. ,
The image sensor 15 is brought into an imaging state.

その結果、撮像素子15はその下方に位置しマスク17
が照明側開口を覆うスルーホール13を含む領域の映像
を、常時点灯する光源16の投射光を利用して撮像し、
もしスルーホール13の内壁の導体層に欠陥があれば、
基板12内に入射し分散した光が該欠陥からスルーホー
ル13内に漏洩するため、その漏洩光はレンズ24およ
び撮像素子15を介し検査回路21により検知されるこ
とで、スルーホール欠陥の有無を知ることができる。
As a result, the image sensor 15 is located below the mask 17.
captures an image of the area including the through hole 13 that covers the illumination side opening using the projection light of the light source 16 that is always on;
If there is a defect in the conductor layer on the inner wall of the through hole 13,
Since the light that enters the substrate 12 and is dispersed leaks from the defect into the through hole 13, the leaked light is detected by the inspection circuit 21 via the lens 24 and the image sensor 15, thereby determining whether or not there is a through hole defect. You can know.

第3図は、同一列に設けた4個のスルーホール13を同
時に撮像素子15で撮像した一例であり、無欠陥のスル
ーホール13は円形の輪郭内が暗視野であるのに対し、
欠陥のあるスルーホール13′は内部が明るい円形輪郭
となって観察されるようになる。
FIG. 3 is an example in which images of four through holes 13 provided in the same row are simultaneously captured by the image sensor 15. In contrast to the defect-free through holes 13, the dark field is inside the circular outline.
The defective through hole 13' becomes visible as a bright circular outline inside.

第2図と共通部分に同一符号を使用した第4図において
、28は光源16を瞬間的に点灯させるストロボ装置で
あり、制御回路20からの信号で光源16を点灯させる
ストロボ装置28は、第1図の手段18に相当し、第2
図のシャッタ25を動作させるのと同じタイミングで動
作される。
In FIG. 4, where the same reference numerals are used for parts common to those in FIG. 2, 28 is a strobe device that momentarily lights up the light source 16. This corresponds to the means 18 in Figure 1, and the second
It is operated at the same timing as the shutter 25 shown in the figure is operated.

従って、第4図の装置は第2図の装置と同様に操作し、
検査回路21にてスルーホール13の欠陥を検知できる
Therefore, the device of FIG. 4 operates similarly to the device of FIG.
A defect in the through hole 13 can be detected by the inspection circuit 21.

第2図と共通部分に同一符号を使用した第5図において
、制御回路20は撮像素子15とシャッタ25およびエ
ンコーダ26を制御し、スルーホール13の欠陥を検査
回路21で検知する。
In FIG. 5, in which the same reference numerals are used for parts common to those in FIG.

そこで、撮像素子15とシャッタ25は、検知器14が
スルーホール13を検知したのち一定時間だけ経過し動
作するようにしてあり、エンコーダ26は該一定時間だ
け経過したとき、検知されたスルーホール13が撮像素
子15と対向する撮像位置に位置するように、制御回路
20にて回転数が制御されるようになっている。
Therefore, the image sensor 15 and the shutter 25 are configured to operate after a certain period of time has elapsed after the detector 14 detects the through hole 13, and the encoder 26 operates when the through hole 13 is detected. The rotation speed is controlled by the control circuit 20 so that the image sensor 15 is positioned at an imaging position facing the image sensor 15.

従って、第5図の装置は検査途中の早送りが可能であり
、例えばスルーホール列の間隔が大きく開いた回路基板
の検査に対し有効となる。
Therefore, the apparatus shown in FIG. 5 is capable of rapid forwarding during inspection, and is effective, for example, for inspecting circuit boards with widely spaced through-hole rows.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、−次元センサより
も高感度な二次元センサを撮像素子に使用し、連続的に
移動する透光性回路基板のスルーホールの内壁導体層を
検査可能となり、該検査の高速化を実現し得た効果が顕
著である。
As explained above, according to the present invention, a two-dimensional sensor with higher sensitivity than a -dimensional sensor is used as an image sensor, and it becomes possible to inspect the inner wall conductor layer of a through-hole in a continuously moving translucent circuit board. , the effect of speeding up the inspection is remarkable.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の基本構成になる装置概要を示す図、 第2図は本発明の第1の実施例になるスルーホール検査
装置の概要を示す図、 第3図は前記装置で撮像された映像例、第4図は本発明
の第2の実施例になるスルーホール検査装置の概要を示
す図、 第5図は本発明の第3の実施例になるスルーホール検査
装置の概要を示す図、 第6図は従来のスルーホール検査方法を説明するための
図、 である。 図中において、 11は透光性回路基板、 13はスルーホール、14は検知器、 15は撮像素子、  16は光源、 1日は撮像光を短時間投射させる手段、19は回路基板
11等の移動手段、 20は制御回路、  25はシャッタ、28はストロボ
装置、 を示す。 2θ 本発明の基本構成 某1図
Fig. 1 is a diagram showing an outline of a device which is the basic configuration of the present invention, Fig. 2 is a diagram showing an outline of a through-hole inspection device which is a first embodiment of the invention, and Fig. 3 is a diagram showing an outline of a through-hole inspection device which is a first embodiment of the invention. 4 shows an overview of a through-hole inspection device according to a second embodiment of the present invention, and FIG. 5 shows an overview of a through-hole inspection device according to a third embodiment of the present invention. FIG. 6 is a diagram for explaining a conventional through-hole inspection method. In the figure, 11 is a translucent circuit board, 13 is a through hole, 14 is a detector, 15 is an image sensor, 16 is a light source, 1 is a means for projecting imaging light for a short time, and 19 is a circuit board 11 etc. A moving means, 20 a control circuit, 25 a shutter, and 28 a strobe device are shown. 2θ A certain diagram of the basic configuration of the present invention

Claims (4)

【特許請求の範囲】[Claims] (1)透光性を有する回路基板(11)に形成したスル
ーホール(13)の内壁の導電層欠陥を検査する装置で
あり、 該回路基板(11)の一方の面に対向し配設した光源(
16)と、 該回路基板(11)の他方の面に対向配設し該スルーホ
ール(13)を検知する検知器(14)および該スルー
ホール(13)を撮像する撮像素子(15)と、該撮像
素子(15)に該スルーホール(13)の撮像光を短時
間だけ投射させる手段(18)と、 該光源(16)と該検知器(14)と該撮像素子(15
)または該回路基板(11)の一方を該回路基板(11
)の面と平行方向へ移動させる手段(19)と、 該検知器(14)の検知情報により該撮像素子(15)
および該撮像光投射手段(18)を動作させる制御回路
(20)とを具えてなることを特徴とするスルーホール
検査装置。
(1) A device for inspecting defects in the conductive layer on the inner wall of a through hole (13) formed in a light-transmitting circuit board (11), which is disposed opposite to one surface of the circuit board (11). light source(
16), a detector (14) arranged to face the other surface of the circuit board (11) to detect the through hole (13), and an image sensor (15) to image the through hole (13); means (18) for projecting the imaging light of the through hole (13) onto the imaging device (15) for a short time; the light source (16), the detector (14), and the imaging device (15);
) or one of the circuit boards (11).
); and means (19) for moving the image sensor (15) in a direction parallel to the plane of the image sensor (15) based on the detection information of the detector (14).
and a control circuit (20) for operating the imaging light projection means (18).
(2)前記撮像光投射手段(18)が、前記回路基板(
11)と前記撮像素子(15)との間に配設したシャッ
タであることを特徴とする前記特許請求の範囲第1項記
載のスルーホール検査装置。
(2) The imaging light projection means (18) may be arranged so that the circuit board (
11) and the image pickup element (15).
(3)前記撮像光投射手段(18)が、前記光源(16
)の瞬間点灯であることを特徴とする前記特許請求の範
囲第1項記載のスルーホール検査装置。
(3) The imaging light projection means (18) may include the light source (16).
2. The through-hole inspection device according to claim 1, wherein the through-hole inspection device is characterized by instantaneous lighting.
(4)前記移動手段(19)が、前記撮像素子(15)
および前記撮像光投射手段(18)の動作に同期し、速
度制御されるように構成してなることを特徴とする前記
特許請求の範囲第1項記載のスルーホール検査装置。
(4) The moving means (19) includes the image sensor (15)
The through-hole inspection apparatus according to claim 1, characterized in that the through-hole inspection apparatus is configured to be speed-controlled in synchronization with the operation of the imaging light projection means (18).
JP20202185A 1985-09-12 1985-09-12 Through hole inspector Pending JPS6262253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20202185A JPS6262253A (en) 1985-09-12 1985-09-12 Through hole inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20202185A JPS6262253A (en) 1985-09-12 1985-09-12 Through hole inspector

Publications (1)

Publication Number Publication Date
JPS6262253A true JPS6262253A (en) 1987-03-18

Family

ID=16450606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20202185A Pending JPS6262253A (en) 1985-09-12 1985-09-12 Through hole inspector

Country Status (1)

Country Link
JP (1) JPS6262253A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013101019A (en) * 2011-11-08 2013-05-23 Seiko Epson Corp Internal inspection device of hole, inspection method, and program
CN111795954A (en) * 2020-09-09 2020-10-20 苏州鼎纳自动化技术有限公司 Transmittance precision detection mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013101019A (en) * 2011-11-08 2013-05-23 Seiko Epson Corp Internal inspection device of hole, inspection method, and program
CN111795954A (en) * 2020-09-09 2020-10-20 苏州鼎纳自动化技术有限公司 Transmittance precision detection mechanism

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