JPH01227006A - Inspecting apparatus for mounting of component parts - Google Patents

Inspecting apparatus for mounting of component parts

Info

Publication number
JPH01227006A
JPH01227006A JP5327488A JP5327488A JPH01227006A JP H01227006 A JPH01227006 A JP H01227006A JP 5327488 A JP5327488 A JP 5327488A JP 5327488 A JP5327488 A JP 5327488A JP H01227006 A JPH01227006 A JP H01227006A
Authority
JP
Japan
Prior art keywords
component
substrate
slit
image
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5327488A
Other languages
Japanese (ja)
Inventor
Kazuyuki Horimoto
堀本 和志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP5327488A priority Critical patent/JPH01227006A/en
Publication of JPH01227006A publication Critical patent/JPH01227006A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To sense an image of a distinct slit pattern of a component parts even when it has a specular surface, by a method wherein slit lights intersecting perpendicularly are applied onto a substrate from above obliquely from two light sources and two image-sensing elements are provided in optical paths of reflected lights. CONSTITUTION:Slit lights intersecting perpendicularly on a substrate 13 are applied onto a component 11 on the substrate on an X-Y table 13, at an angle alphafrom above obliquely from light sources 14 and 15, and two TV cameras 14a and 15a are disposed in optical paths of reflected lights therefrom. In this constitution, the X-Y table 13 is controlled by a control circuit 22 so that the center of the component 11 be positioned at the point of intersection of slit lines intersecting perpendicularly. Then the incident lights from the light sources 14 and 15 are reflected from the component 11 and the substrate 12 and picked up by the TV cameras 14a and 15a. Even when the component part 11 and the substrate 12 have specualr surfaces, an image of a distinct slit pattern is sensed and thus highly-precise inspection of mounting can be performed.

Description

【発明の詳細な説明】 (イ)産業上の利用分野 この発明は、主にプリント基板へのチップ部品の装着状
態を自動的に検査する部品装着検査装置に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention mainly relates to a component mounting inspection device that automatically inspects the mounting state of chip components on a printed circuit board.

(ロ)従来の技術 従来のこの種の部品装着検査装置においては、第4図に
示すように、部品1を装着した基板2をX、Y方向に移
動可能なx−Yテーブル3の上に載置し、そして、X軸
方向スリット光源4とY軸方向スリット光源5をそれぞ
れ基板2に対して角度αを有するように斜め上方に設置
して、基板2及び部品Iの上で直行するスリット光を、
基板2の垂直上方に設けたR像様6によって撮像し、撮
像した画像から部品1の装着状態を検出するようにして
いる。
(B) Prior Art In this type of conventional component mounting inspection apparatus, as shown in FIG. 4, a board 2 on which a component 1 is mounted is placed on an Then, the X-axis direction slit light source 4 and the Y-axis direction slit light source 5 are respectively installed obliquely upward so as to have an angle α with respect to the substrate 2, and the slits are arranged orthogonally above the substrate 2 and the component I. the light,
An image is taken by an R image 6 provided vertically above the board 2, and the mounting state of the component 1 is detected from the taken image.

(ハ)発明が解決しようとする課題 ところでこのような従来の部品装着検査装置においては
、第5図に示すように、光源4から基板2に角度αを有
してスリット光SLが入射され、部品lの垂直上方に設
けられた撮像機6によって撮像される。従って、そのス
リット光SLが基板2及び部品lの表面で乱反射をすれ
ば、基板2の垂直上部に設置された撮像機6によって第
6図(a)に示すようなスリットパターンSPを有する
画像が得られる。しかしながら、部品1が鏡面状の表面
を有する場合には、スリット光SLはその部品10表面
で反射されて部品1上のスリットパターンSPが第6図
(b)のようになるため、明瞭な画像か得られないとい
う問題点があった。
(C) Problems to be Solved by the Invention In such a conventional component mounting inspection apparatus, as shown in FIG. 5, slit light SL is incident on the substrate 2 from the light source 4 at an angle α, An image is taken by an image pickup device 6 installed vertically above the part 1. Therefore, if the slit light SL is diffusely reflected on the surfaces of the substrate 2 and the component l, an image having a slit pattern SP as shown in FIG. can get. However, when the component 1 has a mirror-like surface, the slit light SL is reflected by the surface of the component 10 and the slit pattern SP on the component 1 becomes as shown in FIG. 6(b), so that a clear image can be obtained. There was a problem that it was not possible to obtain

この発明はこのような事情を考慮してなされたもので、
部品や基板が鏡面状の表面を有する場合でも、明瞭なス
リットパターンが撮像できる部品装着検査装置を提供す
るものである。
This invention was made in consideration of these circumstances,
The present invention provides a component mounting inspection device that can image a clear slit pattern even when the component or board has a mirror-like surface.

(ニ)課題を解決するための手段 この発明は、部品か装着された基板に上方からスリット
光を照射する光源部と、基板及び部品をV&象する!&
象部と、撮像部の画像から部品の装着状態を検出する検
出手段を備えた部品装着検査装置において、基板上で直
交するスリット光を基板の斜め上方から照射する2つの
光源と、基板に対する入射角に等しい角度で逆方向に反
射するスリット光の各光路に設けられた撮像部とを備え
たことを特徴とする部品装着検査装置である。
(d) Means for Solving the Problems The present invention includes a light source unit that irradiates a board on which a component is mounted with slit light from above, and a V& model for the board and the component! &
In a component mounting inspection device that is equipped with a quadrant and a detection means that detects the mounted state of a component from an image captured by an imaging section, two light sources emit orthogonal slit light onto the board from diagonally above the board, and a This is a component mounting inspection device characterized by comprising an imaging section provided in each optical path of slit light that is reflected in the opposite direction at an angle equal to the angle.

(ホ)作用 基板上で直交するスリット光を基板の斜め上方向から照
射するように2つの光源を備え、基板に対する入射角に
等しい角度で逆方向に反射するスリット光の光路に撮像
部をそれぞれ設けたので、スリット光が部品及び基板上
で鏡面反射した場合でも、スリット光は撮像部に十分に
入射するので、良質のスリットパターンを得ることがで
きる。
(E) Two light sources are provided to irradiate orthogonal slit light onto the working board from diagonally above the board, and an imaging unit is placed in the optical path of the slit light that is reflected in the opposite direction at an angle equal to the angle of incidence on the board. Since the slit light is provided, even when the slit light is specularly reflected on the components and the substrate, the slit light is sufficiently incident on the imaging section, so that a high-quality slit pattern can be obtained.

(へ)実施例 以下、図面に示す実施例に基づいて、この発明を詳述す
る。これによって、この発明が限定されるしのではない
(f) Examples The present invention will now be described in detail based on examples shown in the drawings. This does not limit the invention.

第1図はこの発明の構成を示す説明図であり、11は基
板12に装着された部品、13は基板12を載置してX
、Y方向に自在に移動するX−Yテーブル、14は基板
120面上にX軸方向のスリットラインを形成するため
にX−Yテーブル13の斜め上方に角度αを有して設置
されたX軸方向スリット光源、15はプリント基板12
の面上にY軸方向のスリットラインを形成するためにX
−Yテーブル12の斜め上方に角度αを有して設置され
たY軸方向スリット光源、14a、15aはそれぞれ光
源14.15からのスリット光の入射方向と逆方向に角
度αで反射する反射光の光路に設けられたITVカメラ
、16.17はカメラ+4a、15aからの撮像信号を
変換するA/D変換部、18.19はA/D変換部16
.17の出力から部品lの装着状態を検出する検出回路
、20.21はX−Yテーブル13を駆動するX軸方向
駆動回路及びY軸方向駆動回路、22はX−Yテーブル
13の移動量を制御する制御回路である。
FIG. 1 is an explanatory diagram showing the configuration of the present invention, in which 11 is a component mounted on a board 12, and 13 is an X
, an X-Y table that freely moves in the Y direction, and an X-Y table 14 installed obliquely above the X-Y table 13 at an angle α to form a slit line in the Axial slit light source, 15 is printed circuit board 12
To form a slit line in the Y-axis direction on the plane of
- A slit light source in the Y-axis direction installed obliquely above the Y-table 12 at an angle α; reflected light 14a and 15a are reflected at an angle α in a direction opposite to the direction of incidence of the slit light from the light source 14 and 15, respectively; 16.17 is an A/D converter that converts the image signals from cameras +4a and 15a, and 18.19 is an A/D converter 16.
.. A detection circuit detects the mounting state of the component l from the output of 17, 20.21 is an X-axis direction drive circuit and a Y-axis direction drive circuit that drive the X-Y table 13, and 22 is a detection circuit that detects the amount of movement of the X-Y table 13. This is a control circuit that controls the

このような構成において、制御回路22からX軸方向駆
動回路20及びY軸方向駆動回路21が指令を受けてX
−Yテーブル13が移動し、検査する部品11の中心が
基板12の面上に光源14゜15によって形成されたX
軸方向スリットラインとY軸方向スリットラインとの交
点に位置するように設定される。部品11及び基板12
が鏡面状の表面を有する場合には、第2図に示すように
光源14.15から部品l【及び基板12に対して角度
αで入射されるスリット光の反射光路中にカメラ+4a
、15aが設置されているので、その反射光は力、メラ
14a、15aによって第3図に示すように明瞭なスリ
ットパターンSPとして撮像される。また、部品11及
び基板12の表面が鏡面でない場合には、スリット光S
Lは各々の表面で乱反射するが、それによるスリットパ
ターンはカメラ14a、15aによって従来通り明瞭に
撮像されろことは言うまでもない。
In such a configuration, the X-axis direction drive circuit 20 and the Y-axis direction drive circuit 21 receive commands from the control circuit 22 to
- The Y table 13 moves and the center of the component 11 to be inspected is located at the X formed by the light source 14° 15 on the surface of the substrate 12.
It is set to be located at the intersection of the axial slit line and the Y-axis slit line. Parts 11 and board 12
has a mirror-like surface, as shown in FIG.
, 15a are installed, the reflected light is imaged as a clear slit pattern SP by the mirrors 14a and 15a as shown in FIG. Furthermore, if the surfaces of the component 11 and the substrate 12 are not mirror-finished, the slit light S
Although L is diffusely reflected on each surface, it goes without saying that the resulting slit pattern can be clearly imaged by the cameras 14a and 15a as before.

(ト)発明の効果 この発明によれば、検査されろ部品やその部品が設置さ
れる基板か鏡面状の表面を有していても、スリット光の
反射光を効率良く受光して良質のラインパターンを撮像
することができ、高精度の部品装着状態の検査が可能と
なる。
(G) Effects of the Invention According to this invention, even if the component to be inspected or the substrate on which the component is installed has a mirror-like surface, the reflected light of the slit light can be efficiently received and a high-quality line can be maintained. Patterns can be imaged, making it possible to inspect component mounting conditions with high precision.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例の構成を示す構成説明図、
第2図は第1図の作用を示す説明図、第3図は第1図に
示す実施例によって得られる画像例を示す説明図、第4
図は従来例の第1図対応図、第5図は従来例の第2図対
応図、第6図(a) (b)は従来例の第3図対応図で
ある。 11・・・・・・部品、12・・・・・・基板、13・
・・・・・X−Yテーブル、 14.15・・・・・・光源、 14a、15a・・・・・・カメラ。 第 2i51 第 3Wi 第4 図 算 5 陶 第 6 図 (a) (b)
FIG. 1 is a configuration explanatory diagram showing the configuration of an embodiment of the present invention;
FIG. 2 is an explanatory diagram showing the effect of FIG. 1, FIG. 3 is an explanatory diagram showing an example of an image obtained by the embodiment shown in FIG. 1, and FIG.
5 is a diagram corresponding to FIG. 1 of the conventional example, FIG. 5 is a diagram corresponding to FIG. 2 of the conventional example, and FIGS. 6(a) and 6(b) are diagrams corresponding to FIG. 3 of the conventional example. 11... Parts, 12... Board, 13.
...X-Y table, 14.15...Light source, 14a, 15a...Camera. 2i51 3Wi 4 Illustration 5 Ceramics 6 (a) (b)

Claims (1)

【特許請求の範囲】[Claims] 1、部品が装着された基板に上方からスリット光を照射
する光源部と、基板及び部品を撮像する撮像部と、撮像
部の画像から部品の装着状態を検出する検出手段を備え
た部品装着検査装置において、基板上で直交するスリッ
ト光を基板の斜め上方から照射する2つの光源と、基板
に対する入射角に等しい角度で逆方向に反射するスリッ
ト光の各光路に設けられた撮像部とを備えたことを特徴
とする部品装着検査装置。
1. Component mounting inspection equipped with a light source unit that irradiates a board with a component mounted thereon with slit light from above, an imaging unit that captures an image of the board and the component, and a detection means that detects the mounting state of the component from the image taken by the imaging unit. The device includes two light sources that irradiate orthogonal slit light onto the substrate from diagonally above the substrate, and an imaging unit provided in each optical path of the slit light that reflects in the opposite direction at an angle equal to the angle of incidence on the substrate. A parts mounting inspection device characterized by:
JP5327488A 1988-03-07 1988-03-07 Inspecting apparatus for mounting of component parts Pending JPH01227006A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5327488A JPH01227006A (en) 1988-03-07 1988-03-07 Inspecting apparatus for mounting of component parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5327488A JPH01227006A (en) 1988-03-07 1988-03-07 Inspecting apparatus for mounting of component parts

Publications (1)

Publication Number Publication Date
JPH01227006A true JPH01227006A (en) 1989-09-11

Family

ID=12938158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5327488A Pending JPH01227006A (en) 1988-03-07 1988-03-07 Inspecting apparatus for mounting of component parts

Country Status (1)

Country Link
JP (1) JPH01227006A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643509U (en) * 1992-11-13 1994-06-10 信越エンジニアリング株式会社 Light-section microscope
KR100363218B1 (en) * 2000-06-22 2002-11-30 에스엔유 프리시젼 주식회사 Optical measuring system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643509U (en) * 1992-11-13 1994-06-10 信越エンジニアリング株式会社 Light-section microscope
KR100363218B1 (en) * 2000-06-22 2002-11-30 에스엔유 프리시젼 주식회사 Optical measuring system

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