JPH01227006A - Inspecting apparatus for mounting of component parts - Google Patents

Inspecting apparatus for mounting of component parts

Info

Publication number
JPH01227006A
JPH01227006A JP5327488A JP5327488A JPH01227006A JP H01227006 A JPH01227006 A JP H01227006A JP 5327488 A JP5327488 A JP 5327488A JP 5327488 A JP5327488 A JP 5327488A JP H01227006 A JPH01227006 A JP H01227006A
Authority
JP
Japan
Prior art keywords
component
substrate
lights
slit
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5327488A
Other languages
Japanese (ja)
Inventor
Kazuyuki Horimoto
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP5327488A priority Critical patent/JPH01227006A/en
Publication of JPH01227006A publication Critical patent/JPH01227006A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To sense an image of a distinct slit pattern of a component parts even when it has a specular surface, by a method wherein slit lights intersecting perpendicularly are applied onto a substrate from above obliquely from two light sources and two image-sensing elements are provided in optical paths of reflected lights.
CONSTITUTION: Slit lights intersecting perpendicularly on a substrate 13 are applied onto a component 11 on the substrate on an X-Y table 13, at an angle αfrom above obliquely from light sources 14 and 15, and two TV cameras 14a and 15a are disposed in optical paths of reflected lights therefrom. In this constitution, the X-Y table 13 is controlled by a control circuit 22 so that the center of the component 11 be positioned at the point of intersection of slit lines intersecting perpendicularly. Then the incident lights from the light sources 14 and 15 are reflected from the component 11 and the substrate 12 and picked up by the TV cameras 14a and 15a. Even when the component part 11 and the substrate 12 have specualr surfaces, an image of a distinct slit pattern is sensed and thus highly-precise inspection of mounting can be performed.
COPYRIGHT: (C)1989,JPO&Japio
JP5327488A 1988-03-07 1988-03-07 Inspecting apparatus for mounting of component parts Pending JPH01227006A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5327488A JPH01227006A (en) 1988-03-07 1988-03-07 Inspecting apparatus for mounting of component parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5327488A JPH01227006A (en) 1988-03-07 1988-03-07 Inspecting apparatus for mounting of component parts

Publications (1)

Publication Number Publication Date
JPH01227006A true JPH01227006A (en) 1989-09-11

Family

ID=12938158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5327488A Pending JPH01227006A (en) 1988-03-07 1988-03-07 Inspecting apparatus for mounting of component parts

Country Status (1)

Country Link
JP (1) JPH01227006A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643509U (en) * 1992-11-13 1994-06-10 信越エンジニアリング株式会社 Light-section microscope
KR100363218B1 (en) * 2000-06-22 2002-11-30 에스엔유 프리시젼 주식회사 Optical measuring system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643509U (en) * 1992-11-13 1994-06-10 信越エンジニアリング株式会社 Light-section microscope
KR100363218B1 (en) * 2000-06-22 2002-11-30 에스엔유 프리시젼 주식회사 Optical measuring system

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