JP2503201B2 - Through-hole inspection device - Google Patents

Through-hole inspection device

Info

Publication number
JP2503201B2
JP2503201B2 JP26923584A JP26923584A JP2503201B2 JP 2503201 B2 JP2503201 B2 JP 2503201B2 JP 26923584 A JP26923584 A JP 26923584A JP 26923584 A JP26923584 A JP 26923584A JP 2503201 B2 JP2503201 B2 JP 2503201B2
Authority
JP
Japan
Prior art keywords
hole
light
printed board
unit
address
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26923584A
Other languages
Japanese (ja)
Other versions
JPS61147132A (en
Inventor
護俊 安藤
喜久夫 三田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP26923584A priority Critical patent/JP2503201B2/en
Publication of JPS61147132A publication Critical patent/JPS61147132A/en
Application granted granted Critical
Publication of JP2503201B2 publication Critical patent/JP2503201B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95692Patterns showing hole parts, e.g. honeycomb filtering structures

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は,電子機器に用いられる両面プリント板,多
層プリント板に係り,特にこのようなプリント板に設け
られたスルーホールの検査装置に関するものである。
Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a double-sided printed board and a multilayer printed board used in electronic equipment, and more particularly to a through-hole inspection device provided in such a printed board. is there.

〔従来技術〕[Prior art]

両面プリント板や,多層プリント板には,それら基板
に形成されている表裏のプリント配線間や,各層プリン
ト配線間の電気的接続のために,スルーホールが電気的
或いは化学的メッキ法により形成されている。通常スル
ーホールのメッキ層が常に良好な状態であるとは限ら
ず,製造工程上切れ目,ピンホール等の不良が生じる場
合が多い。これらの不良は接続目的を阻害し,プリント
板の信頼性を損なうので,このような不良を予め検査す
る必要がある。
Through-holes are formed on the double-sided printed boards and the multilayer printed boards by electrical or chemical plating to electrically connect the printed wirings on the front and back sides formed on those boards and between the printed wirings on each layer. ing. Usually, the plated layer of the through hole is not always in good condition, and defects such as breaks and pinholes often occur in the manufacturing process. Since these defects impair the purpose of connection and impair the reliability of the printed board, it is necessary to inspect such defects in advance.

従来,このようなスルーホールの欠陥を検査する方法
としてスルーホールが設けられたプリント板上にローラ
マスクを設けマスクを移動しながらプリント板に光を照
射し,スルーホールを透過した光を2つのCCD(電荷結
合素子)等の受光素子を用いて検知し,両検知データを
比較して欠陥箇所を検出するいわゆるスルーホール漏光
検知法が使用されている。
Conventionally, as a method of inspecting such a defect of a through hole, a roller mask is provided on a printed board provided with a through hole, the printed board is irradiated with light while moving the mask, and the light transmitted through the through hole is divided into two. A so-called through-hole light leakage detection method is used, in which a light receiving element such as a CCD (charge-coupled device) is used for detection, and both detection data are compared to detect a defective portion.

〔発明が解決しようとする問題〕[Problems to be solved by the invention]

上述のようなスルーホール検査装置においては,受光
素子を2つ用意する必要があり,検査装置が複雑になる
欠点を有している。
In the above-described through-hole inspection device, it is necessary to prepare two light receiving elements, which has a drawback that the inspection device becomes complicated.

本発明は,上述の欠点に鑑み,単一の受光素子を用い
て簡単な構成でスルーホールの欠陥を検出することを可
能にしたスルーホール検査装置を提供することを目的と
するものである。
The present invention has been made in view of the above-mentioned drawbacks, and an object thereof is to provide a through-hole inspection apparatus capable of detecting a defect in a through-hole with a simple configuration using a single light-receiving element.

〔問題点を解決するための手段〕[Means for solving problems]

上記目的は本発明によれば,プリント板に設けられた
スルーホールの漏光パターンを検知して該スルーホール
の欠陥を検出するスルーホール検査装置において,前記
プリント板の1面に位置し前記プリント板に入射する光
を遮断するマスク手段と,前記プリント板の他面に位置
し,前記プリント板からの透過光の一部を減衰するフィ
ルタ手段と,該フィルタ手段を通過した光を撮像する1
つの撮像手段と,該撮像手段と前記フィルタ手段間に位
置し前記フィルタ手段を通過した光を前記撮像手段に結
像する結像手段と,前記撮像手段で撮像した信号から前
記スルーホールの欠陥検出制御を行う制御手段とを有す
ることを特徴とするスルーホール検査装置を提供するこ
とで達成される。
According to the present invention, there is provided a through-hole inspection device for detecting a light leakage pattern of a through-hole provided in a printed board to detect a defect in the through-hole, the printed board being located on one surface of the printed board. A mask means for blocking light incident on the filter board; a filter means located on the other surface of the printed board for attenuating a part of the transmitted light from the printed board; and an image of the light passing through the filter means 1
Image pickup means, an image pickup means located between the image pickup means and the filter means for forming an image of light passing through the filter means on the image pickup means, and defect detection of the through hole from a signal picked up by the image pickup means It is achieved by providing a through-hole inspection apparatus characterized by having a control means for performing control.

〔作用〕[Action]

上記手段によれば,スルーホールから漏光が発生した
際,撮像手段を介して漏光を検出でき,さらに同一の撮
像手段でスルーホールの位置も検出でき,複数の撮像手
段を有さなくてもスルーホールの欠陥を検出できるとい
う作用を有する。
According to the above means, when light leakage occurs from the through hole, the light leakage can be detected via the image pickup means, and the position of the through hole can be detected by the same image pickup means. It has the function of being able to detect defects in holes.

〔発明の実施例〕Example of Invention

以下,本発明の実施例を添付図面に従って詳述する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

本実施例では,単一の受光素子としてテレビカメラ
(以下TVカメラで示す)を用いたもので,第1図に本実
施例の概略斜視図を示す。同図において,両面にパター
ン配線が施され多数のスルーホールを有する両面プリン
ト板(以下プリント板で示す)1の上面にはフィルタ2
が設けられ,下面にはローラマスク3が設けられてい
る。プリント板1は図示しないX−Yステージにより互
いに直交するX軸,Y軸上を移動可能に構成され,フィル
タ2は光強度を調整する為,光を透過する領域2aと光を
減衰して透過する領域2b,2cの3領域により構成され,
ローラマスク3は支点3aを中心に回転可能に構成されて
いる。
In this embodiment, a television camera (hereinafter referred to as a TV camera) is used as a single light receiving element, and FIG. 1 shows a schematic perspective view of this embodiment. In the figure, a filter 2 is provided on the upper surface of a double-sided printed board (hereinafter referred to as a printed board) 1 having pattern wiring on both sides and a large number of through holes.
Is provided, and the roller mask 3 is provided on the lower surface. The printed board 1 is configured to be movable on X-axis and Y-axis which are orthogonal to each other by an XY stage (not shown), and the filter 2 adjusts the light intensity, so that the light-transmitting region 2a and the light are attenuated and transmitted. It is composed of three areas, 2b and 2c,
The roller mask 3 is configured to be rotatable around the fulcrum 3a.

プリント板1の下方に設けられた図示しない光源から
の光4は,ローラマスク3により遮蔽されている部分以
外のプリント板1の下面に照射され,プリント板1のス
ルーホールを通過した光はフィルタ2を介してレンズ5
に入射する。例えばスルーホール1aから出射した光は光
路6を介してレンズ5の焦点距離上に設けられたTVカメ
ラ7に入射する。TVカメラ7に入射した光は電気信号に
変換され,図示しない部分に設けられた制御回路に出力
される。
Light 4 from a light source (not shown) provided below the printed board 1 is applied to the lower surface of the printed board 1 other than the portion shielded by the roller mask 3, and the light passing through the through holes of the printed board 1 is filtered. Lens 5 through 2
Incident on. For example, the light emitted from the through hole 1a enters the TV camera 7 provided on the focal length of the lens 5 via the optical path 6. The light incident on the TV camera 7 is converted into an electric signal and output to a control circuit provided in a portion not shown.

第2図はその制御回路のブロック図であり,TVカメラ
7からの電気信号である画像信号は穴位置アドレス部8
に入力し,穴位置アドレス部8でプリント板1に設けら
れた多数のスルーホール中心位置(アドレス)が検出さ
れる。穴位置アドレス部8からの検出信号はアドレス加
算部9に入力し,アドレス加算部9において,予め各ス
ルーホール位置のピッチが入力されている穴ピッチアド
レス部10からのデータと加算され,アドレス加算部9で
加算されたアドレス信号は比較部11に入力する。
FIG. 2 is a block diagram of the control circuit, in which the image signal which is an electric signal from the TV camera 7 is the hole position address part 8
, And the hole position address section 8 detects a large number of through hole center positions (addresses) provided in the printed board 1. The detection signal from the hole position address unit 8 is input to the address addition unit 9, and the address addition unit 9 adds the data from the hole pitch address unit 10 in which the pitch of each through hole position is input in advance, and adds the address. The address signal added by the unit 9 is input to the comparison unit 11.

一方,TVカメラ7からの他の画像信号,例えばフィル
タ2aのみを通過した光の画像信号は漏光アドレス部12に
入力し,漏光アドレス部12ではTVカメラ7で漏光パター
ンを検出した該漏光パターンの中心位置のアドレス信号
を比較部11に出力する。比較部11では入力した両アドレ
ス信号を比較し,両アドレス信号が一致していた時,欠
陥信号を出力して一致したアドレス(位置)に存在する
スルーホールに欠陥があることを検出する。
On the other hand, another image signal from the TV camera 7, for example, an image signal of light that has passed through only the filter 2a is input to the light leak address unit 12, and the light leak address unit 12 detects the light leak pattern of the light leak pattern by the TV camera 7. The address signal of the center position is output to the comparison unit 11. The comparing unit 11 compares the two input address signals, and when both the address signals match, outputs a defect signal to detect that there is a defect in the through hole existing at the matched address (position).

以上のような構成のスルーホール検査装置において,
その動作説明を第3図(a),(b)を用いて行う。
In the through-hole inspection device configured as above,
The operation will be described with reference to FIGS. 3 (a) and 3 (b).

第3図(a)は,TVカメラ7で撮像されたフィルタ2
上面の画像を示すものである。同図(a)において,X
軸,Y軸は前述のX−Yステージの移動方向であるX方
向,Y方向と同一方向を示す軸であり,画像14にはフィル
タ2の領域2bに5つのスルーホール1b〜1fが存在し,フ
ィルタ2の領域2aに4つのスルーホール1g〜1jが存在し
ている。
FIG. 3A shows the filter 2 imaged by the TV camera 7.
It is an image of the upper surface. In the figure (a), X
The axes Y and Y are the same as the X and Y directions, which are the moving directions of the XY stage, and the image 14 has five through holes 1b to 1f in the region 2b of the filter 2. , Four through holes 1g to 1j are present in the area 2a of the filter 2.

また,スルーホール1b〜1fはY軸上の座標が同一であ
るA列上に1列に配置されており,スルーホール1g〜1j
も同じくY軸上の座標が同一であるB列上に1列に配置
され,この時スルーホール1g〜1jからはプリント板1の
下面に設けられたローラマスク3により漏光は発生して
いない。
Further, the through holes 1b to 1f are arranged in a row on the row A having the same coordinates on the Y axis, and the through holes 1g to 1j are arranged.
Are also arranged in one row on the B row having the same coordinates on the Y axis, and at this time, no light leakage occurs from the through holes 1g to 1j by the roller mask 3 provided on the lower surface of the printed board 1.

TVカメラ7は画像14を撮像した画像信号を穴位置アド
レス部8に出力してスルーホール1b〜1fの穴中心位置例
えば(xb,yb),(xc,yc),・・・(xf,yf)の検出
を行う。
TV camera 7 hole center position, for example through holes 1b~1f outputs an image signal captured in the hole position address unit 8 images 14 (x b, y b) , (x c, y c), ··· (X f , y f ) is detected.

次にX−Yステージを図示しない駆動機構により移動
し,プリント板1を矢印15方向(第1図,第3図に示
す)に移動する。この移動中,領域2aの画像をTVカメラ
7により常に確認し,この画像信号を漏光アドレス部12
に出力している。A列に配列されたスルーホール1b〜1f
が距離pだけ移動した時の画像16を第3図(b)に示
す。この移動距離pはA列とB列のY軸の長さに一致し
ている距離であり,予め前述の穴ピッチアドレス部10に
入力されているデータに等しい。従って,領域2aの画像
を漏光アドレス部12に入力し,この時例えばスルーホー
ル1cに漏光がある時はこの漏光のアドレスが比較部11に
出力される。このスルーホール1cの漏光は光源の光がロ
ーラマスク3により遮光されているにもかかわらず漏れ
た光であり,スルーホール1cに切れ目又はピンホール等
の欠陥があることを示すものである。
Next, the XY stage is moved by a drive mechanism (not shown), and the printed board 1 is moved in the direction of arrow 15 (shown in FIGS. 1 and 3). During this movement, the image of the area 2a is constantly confirmed by the TV camera 7, and this image signal is detected by the leak address section 12
Is output to. Through holes 1b to 1f arranged in row A
FIG. 3 (b) shows an image 16 when is moved by a distance p. This moving distance p is a distance that matches the length of the Y-axis of the rows A and B, and is equal to the data previously input to the hole pitch address section 10. Therefore, the image of the area 2a is input to the light leakage address unit 12, and at this time, for example, when there is light leakage in the through hole 1c, the address of this light leakage is output to the comparison unit 11. The leaked light from the through hole 1c is the light leaked even though the light from the light source is blocked by the roller mask 3, and indicates that the through hole 1c has a defect such as a cut or a pinhole.

一方,比較部11には前述の画像14で読取ったスルーホ
ール1cのアドレス信号にスルーホール間のピッチpのデ
ータが加えられたアドレス信号が入力しており,比較部
11で両アドレス信号は一致し,スルーホール1cの欠陥が
検出される。この時漏光アドレス部12から欠陥であるス
ルーホール1cのアドレス(座標位置)を外部に表示する
ことも出来る。
On the other hand, an address signal obtained by adding the data of the pitch p between the through holes to the address signal of the through hole 1c read in the image 14 is input to the comparing unit 11.
At 11, both address signals match and a defect in the through hole 1c is detected. At this time, the address (coordinate position) of the defective through hole 1c can be displayed from the light leakage address section 12 to the outside.

また,A列のスルーホール1b〜1fが移動中にプリント板
1の例えばパターン配線の施されていない部分からの漏
光もある。この漏光を含む画像信号も漏光アドレス部12
に入力し,漏光アドレス部12からこの部分のアドレス信
号も比較部11に入力するが,スルーホールが存在しない
アドレスであるためアドレス加算部9から入力するアド
レス信号とが一致せずスルーホール存在位置以外の漏光
では欠陥検出信号は出力されない。
In addition, there is light leakage from a portion of the printed board 1 where no pattern wiring is provided while the through holes 1b to 1f in the row A are moving. The image signal including this light leakage is also the light leakage address section 12
The address signal of this portion is also input to the comparison unit 11 from the light leakage address unit 12, but since the address does not have a through hole, the address signal input from the address addition unit 9 does not match and the position where the through hole exists. The defect detection signal is not output for light leaks other than.

次に,さらにX−Yステージを駆動して1ピッチ分プ
リント板1を矢印15方向に移動し,同様の検出動作を繰
り返し,順次スルーホールの欠陥を検出し,プリント板
1の全てのスルーホールに対して欠陥検査を行うことが
出来る。
Next, the XY stage is further driven to move the printed board 1 by one pitch in the direction of the arrow 15 and the same detection operation is repeated to detect defects in the through holes in sequence, and all through holes of the printed board 1 are detected. A defect inspection can be performed on the.

以上のように本実施例によれば,プリント板1の下面
にローラマスク3を設け,上面に光の透過領域2aと減衰
透過領域2b,2cに区分されたフィルタ2を設けることに
より,プリント板1のスルーホールを透過した光を1台
のTVカメラ7で撮像することが出来,TVカメラ7は2次
元的な受光素子であり従来のスルーホール検査装置のよ
うに2つの受光素子を設ける必要がない。
As described above, according to this embodiment, the roller mask 3 is provided on the lower surface of the printed board 1, and the filter 2 divided into the light transmission area 2a and the attenuation transmission areas 2b and 2c is provided on the upper surface of the printed board. The light transmitted through one through hole can be picked up by one TV camera 7. The TV camera 7 is a two-dimensional light receiving element, and it is necessary to provide two light receiving elements like the conventional through hole inspection device. There is no.

本発明は以上のような実施例に限るわけではなく,例
えば第4図に示すように,フィルタ17をTVカメラ7の下
に設け,領域2aからの漏光だけをそのまま検出するよう
にしても良い。
The present invention is not limited to the above embodiment, and for example, as shown in FIG. 4, a filter 17 may be provided below the TV camera 7 and only the light leak from the area 2a may be detected as it is. .

また本発明に用いる受光素子はTVカメラ7に限らず,2
次元的な受光素子であれば同様に用いることが出来る。
またプリント板1に設けられたスルーホールが任意の位
置に設けられている時には,予めスルーホールの穴位置
等を検出し,この検出データを穴位置アドレス部8等に
入力する手段を設けて構成しても良い。
The light receiving element used in the present invention is not limited to the TV camera 7,
Any other dimensional light receiving element can be used.
Further, when the through hole provided on the printed board 1 is provided at an arbitrary position, means for detecting the hole position or the like of the through hole in advance and inputting the detection data to the hole position address section 8 or the like is provided. You may.

〔発明の効果〕〔The invention's effect〕

以上詳細に説明したように本発明によれば,プリント
板に設けられたスルーホールの金属メッキの切れ目,ピ
ンホール等の不良を検査する際,1台の受光素子によって
行うことができスルーホールの検査装置を簡素化するこ
とが出来る。
As described in detail above, according to the present invention, when a defect such as a cut of metal plating or a pinhole of a through hole provided in a printed board is inspected, it can be performed by one light receiving element. The inspection device can be simplified.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明のスルーホール検査装置の概略斜視図, 第2図はスルーホール検査装置の回路ブロック図, 第3図(a),(b)はTV画像の構成図, 第4図は本発明の他の実施例の概略斜視図の一部を示す
構成図である。 1……プリント板,2,17……フィルタ,2a〜2c……領域,3
……ローラマスク,7……TVカメラ,8……穴位置アドレス
部,9……アドレス加算部,10……穴ピッチアドレス部,11
……比較部,12……漏光アドレス部,14,16……画像.
FIG. 1 is a schematic perspective view of a through-hole inspection device according to the present invention, FIG. 2 is a circuit block diagram of the through-hole inspection device, FIGS. 3 (a) and 3 (b) are configuration diagrams of TV images, and FIG. It is a block diagram which shows a part of schematic perspective view of other Example of this invention. 1 ... Printed board, 2, 17 ... Filter, 2a-2c ... Area, 3
...... Roller mask, 7 …… TV camera, 8 …… Hole position address part, 9 …… Address addition part, 10 …… Hole pitch address part, 11
…… Comparison section, 12 …… Leakage address section, 14,16 …… Image.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】プリント板に設けられたスルーホールの漏
光パターンを検知して該スルーホールの欠陥を検出する
スルーホール検査装置において,前記プリント板の1面
に位置し前記プリント板に入射する光を遮断するマスク
手段と,前記プリント板の他面に位置し前記プリント板
からの透過光の一部を減衰するフィルタ手段と,該フィ
ルタ手段を通過した光を撮像する1つの撮像手段と,該
撮像手段と前記フィルタ手段間に位置し前記フィルタ手
段を通過した光を前記撮像手段に結像する結像手段と,
前記撮像手段で撮像した信号から前記スルーホールの欠
陥検出制御を行う制御手段とを有することを特徴とする
スルーホール検査装置。
1. A through-hole inspection apparatus for detecting a light leakage pattern of a through-hole provided on a printed board to detect a defect in the through-hole, wherein light incident on the printed board is located on one surface of the printed board. A masking means for blocking light, a filter means located on the other surface of the printed board for attenuating a part of transmitted light from the printed board, an image pickup means for picking up the light passing through the filter means, An image forming unit which is located between the image pickup unit and the filter unit and forms an image of the light passing through the filter unit on the image pickup unit;
A through hole inspection apparatus, comprising: a control unit that performs defect detection control of the through hole based on a signal captured by the image capturing unit.
【請求項2】前記スルーホール位置及び前記漏光パター
ンの中心位置を検出する検出手段を有することを特徴と
した特許請求の範囲第1項記載のスルーホール検査装
置。
2. The through-hole inspection device according to claim 1, further comprising a detection unit that detects the position of the through-hole and the center position of the light leakage pattern.
JP26923584A 1984-12-20 1984-12-20 Through-hole inspection device Expired - Lifetime JP2503201B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26923584A JP2503201B2 (en) 1984-12-20 1984-12-20 Through-hole inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26923584A JP2503201B2 (en) 1984-12-20 1984-12-20 Through-hole inspection device

Publications (2)

Publication Number Publication Date
JPS61147132A JPS61147132A (en) 1986-07-04
JP2503201B2 true JP2503201B2 (en) 1996-06-05

Family

ID=17469542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26923584A Expired - Lifetime JP2503201B2 (en) 1984-12-20 1984-12-20 Through-hole inspection device

Country Status (1)

Country Link
JP (1) JP2503201B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348707A (en) * 1989-07-18 1991-03-01 Fujitsu Ltd Automatic hole extracting device for printed board

Also Published As

Publication number Publication date
JPS61147132A (en) 1986-07-04

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