JPS59125695A - Through hole inspecting device for printed board - Google Patents

Through hole inspecting device for printed board

Info

Publication number
JPS59125695A
JPS59125695A JP22867682A JP22867682A JPS59125695A JP S59125695 A JPS59125695 A JP S59125695A JP 22867682 A JP22867682 A JP 22867682A JP 22867682 A JP22867682 A JP 22867682A JP S59125695 A JPS59125695 A JP S59125695A
Authority
JP
Japan
Prior art keywords
light
printed board
hole
ball
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22867682A
Other languages
Japanese (ja)
Other versions
JPH049252B2 (en
Inventor
護俊 安藤
三田 喜久夫
柿木 義一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22867682A priority Critical patent/JPS59125695A/en
Priority to US06/554,543 priority patent/US4560273A/en
Priority to DE8383307291T priority patent/DE3377527D1/en
Priority to EP83307291A priority patent/EP0111404B1/en
Publication of JPS59125695A publication Critical patent/JPS59125695A/en
Publication of JPH049252B2 publication Critical patent/JPH049252B2/ja
Granted legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 fi1発明の技術分野 本発明はプリント板の基板材内に光を入射拡散させ、ス
ルーボール欠陥部からスルーボール内に漏れる拡散光を
検知することで欠陥検出を行うプリント板のスルーホー
ル検査装置に関するものである。
Detailed Description of the Invention FI1 Technical Field of the Invention The present invention relates to a printed circuit board in which defects are detected by diffusing light into the substrate material of a printed board and detecting the diffused light leaking into the through ball from a through ball defective part. This invention relates to a plate through-hole inspection device.

(2)技術の背景 両面プリント板の表裏導体間の接続、あるいは多層プリ
ント板の眉間導体の接続には、スルーボールメ・ツキ法
が広く用いられている。かがるスルーボールメッキ法は
、導体を積層した絶縁基板に予め孔あけ加工し、この透
孔内壁面に化学的あるいは電気的にメッキ層を生成する
ことで導体間を電気的に接続するものであるが、該メッ
キ層はミクロン単位の厚さであるとともに、透孔内壁面
の凹凸が激しく、かつ小径であるため、スルーボールの
生成メッキ層にピンボール、切れ口等の欠陥が生じる場
合が往々あり、そしてメッキ層の欠陥部が大きいと、導
体間の電気的導通の不良につながり、プリント板の信頼
性の上で大きな問題となる。従って、このようなスルー
ボールの欠陥を容易にかつ確実に検査できることが望ま
れている。
(2) Background of the technology The through-ball mating method is widely used to connect the front and back conductors of a double-sided printed board or to connect the glabella conductors of a multilayer printed board. The through-ball plating method involves drilling holes in an insulating substrate laminated with conductors in advance, and creating a plating layer chemically or electrically on the inner wall of the holes to electrically connect the conductors. However, because the plating layer is micron-level thick, the inner wall surface of the through hole is extremely uneven, and the diameter is small, defects such as pinballs and cuts may occur in the plating layer that forms through balls. This often occurs, and if the defects in the plating layer are large, this leads to poor electrical continuity between the conductors, which poses a major problem in terms of the reliability of the printed circuit board. Therefore, it is desired to be able to easily and reliably inspect such through ball defects.

(3)従来技術と問題点 従来、プリント板のスルーボール検査方式としては、プ
リント板の片面から光源により照明し、これにより基板
側内に入射拡散された光がスルーポール欠陥部を通して
スルーホール内の透過した光を、プリント板の反対面に
設けた光検知器により検知することで欠陥の有無を検査
するようにしていた。
(3) Conventional technology and problems Conventionally, the through-ball inspection method for printed circuit boards involves illuminating one side of the printed board with a light source, which allows the light that is incident on the board side to be diffused into the through-hole through the through-pole defect. The presence or absence of defects was inspected by detecting the transmitted light with a photodetector installed on the opposite side of the printed board.

しかし、このような従来方式では、基板材が厚く、これ
に伴いスルーホールの径が細くかつ長くなったり、ある
いは多層プリント板のように基板内部に面積の広い配線
バクーンがあると、プリント板の片面照明のみでは、光
源と反対側の表面近(にある欠陥を検出することか困難
となり、このため、一度検査したプリント板を裏返して
再度検査する必要があった。
However, with this conventional method, if the board material is thick and the diameter of the through hole becomes thinner and longer, or if there is a large wiring back area inside the board like a multilayer printed board, the printed board will be damaged. With only single-sided illumination, it is difficult to detect defects near the surface on the opposite side of the light source, so it is necessary to turn over the printed board once inspected and inspect it again.

(4)発明の目的 本発明は上記従来の問題を解決したもので、プリント板
基板材の厚さ方向における入射拡散光の光量分布をほぼ
均等化し、内層導体パターンの有無及び基板材の厚さに
関係なくスルーポール欠陥の有無を確実%検知できるよ
うにしたプリンl−板のスルーポール検査装置を提供す
ることを目的とする。
(4) Purpose of the Invention The present invention solves the above-mentioned conventional problems, and makes the light intensity distribution of the incident diffused light almost uniform in the thickness direction of the printed circuit board material, and the presence/absence of the inner layer conductor pattern and the thickness of the board material. It is an object of the present invention to provide a through-pole inspection device for printed l-boards that can reliably detect the presence or absence of through-pole defects regardless of the conditions.

(5)発明の構成 上記目的を達成するために本発明のプリント板のスルー
ホール検査装置は、欠陥検出用照明光源をプリント板の
両面に対向してそれぞれ設け、この両照明光源からの光
をプリント板の基板刊内部に両面から同時に入射させる
とともに、上記照明光源からスルーポールに向けられる
直接光を遮蔽する遮光手段を設げたものである。
(5) Structure of the Invention In order to achieve the above object, the printed board through-hole inspection device of the present invention has defect detection illumination light sources provided on both sides of the printed board facing each other, and the light from both of the illumination light sources. A light shielding means is provided to allow the light to enter the inside of the printed circuit board from both sides at the same time, and to shield direct light directed from the illumination light source to the through pole.

(6)発明の実施例 以下、本発明の実施例を図面に基づいて説明する。(6) Examples of the invention Embodiments of the present invention will be described below based on the drawings.

第1図は本発明にかかるプリント板のスルーポール検査
装置の第1実施例を示すもので、1は検査されるプリン
1〜板であり、このプリント板1を構成する基板材2は
、例えばガラス繊維にエボギシ樹脂を含浸させた光透過
性の物質から成り、そして基板材2に穿設した透孔2a
の内壁にノブキ層3を生成することで表84体(ランド
部)4及び内層導体パターン5を電気的に接続するスル
ーホール6が形成されている。
FIG. 1 shows a first embodiment of a through-pole inspection apparatus for printed boards according to the present invention, and 1 is a printed board 1 to a board to be inspected, and a substrate material 2 constituting this printed board 1 is, for example, A through hole 2a is made of a light-transmitting material made of glass fiber impregnated with Evogishi resin, and is bored in the substrate material 2.
A through hole 6 is formed to electrically connect the surface 84 body (land portion) 4 and the inner layer conductor pattern 5 by forming a knob layer 3 on the inner wall.

ごのようにしたプリン1F2.1の上下両面側には、そ
れぞれ基板材20両面を部分照明する欠陥検出用照明光
源7及び8が表裏導体4の周囲に沿うようにして複数個
ずつ配置され、この各光源7及び8には基板材2内部を
透過し易い赤色のものか利用される。また、」二記光源
7及び8で囲まれる中心部分には、外周面を鏡にした台
形筒状のプリズム9,10が軸線を一致させて配置され
、この各プリズム9はそれぞれの光源7及び8からの光
がスルーボール6に入射するのを防止するためのもので
あり、そして上記下部プリズムlOの下面側にはスルー
ホール検出用の光源12が配置され、この光源12から
の光12aは下部プリズム10、スルーボール6及び上
部プリズム9を順次透過するようになっている。上記光
源12には光源7゜8と異なる波長の光、例えば緑色の
光が使用される。
A plurality of defect detection illumination light sources 7 and 8 for partially illuminating both sides of the substrate material 20 are arranged along the periphery of the front and back conductors 4 on both upper and lower sides of the pudding 1F2.1, which is shaped like this. For each of the light sources 7 and 8, a red light that easily transmits through the inside of the substrate material 2 is used. Further, in the central part surrounded by the light sources 7 and 8, trapezoidal cylinder-shaped prisms 9 and 10 whose outer peripheral surfaces are mirrors are arranged with their axes aligned, and each prism 9 is connected to the light sources 7 and 8, respectively. A light source 12 for through hole detection is arranged on the lower surface side of the lower prism 1O, and light 12a from this light source 12 is used to prevent the light from entering the through ball 6. The light passes through the lower prism 10, the through ball 6, and the upper prism 9 in order. The light source 12 uses light of a different wavelength from that of the light source 7.8, for example, green light.

また、上記上部プリズム9の光出射側には色分離フィル
タ13が45°の角度に傾げて配置され、この色分離フ
ィルタ13は赤色の光を透過し、緑色の光を反射するも
ので、色分離フィルタ13の透過光軸上には欠陥検知用
の光検知器14が配置され、さらに色分離フィルタ13
の反射光軸」二るこはスルーホール検知用の光検知器1
5が配置されているとともに、各光検知器14.15の
出力側には、これから入射光の有無に応じて送出される
信号をrl、、J、rOJに2値化する2値化回路16
.17がそれぞれ接続され、ごの2値化回路16.17
の2値信号はアンド回路18に入力され、アンド回路1
8の論理条件が成立したとき、欠陥信号Sを送出するよ
うになっている。
Further, a color separation filter 13 is arranged at an angle of 45 degrees on the light output side of the upper prism 9, and this color separation filter 13 transmits red light and reflects green light. A photodetector 14 for defect detection is arranged on the transmission optical axis of the separation filter 13, and a color separation filter 13
``Niruko is a photodetector 1 for through-hole detection''
At the same time, on the output side of each photodetector 14 and 15, a binarization circuit 16 is arranged to binarize the signal sent out depending on the presence or absence of incident light into rl, , J, and rOJ.
.. 17 are connected respectively, and each binarization circuit 16.17
The binary signal of is input to the AND circuit 18, and the AND circuit 1
When the logical condition No. 8 is satisfied, a defect signal S is sent out.

次に上記のように構成された本実施例の93作について
説明する。
Next, the 93 works of this embodiment configured as described above will be explained.

プリント板1のスルーホール6の1つが検査位置に割出
された状態において、光源7及び8がら赤色の光7a、
8aがプリント板1の両面に向は照射されると、該光7
a、8aば基板材2内に入射し拡散される。ここで、基
板材2の上面から入射された光7aは基板材2内部に拡
散されるが、この光7aによる基板材2内の厚さ方向の
光量分布は、第2図の実線■に示す如く基板材2の上面
側が最も大きく、下面側に行くにしたがい直線的に減少
する特性を示し、また、同様にして光8aによる基板v
J2内の厚さ方向の光量分布は、第2図の破線Hに示す
如く基板材2の下面側が最も大きく、上面側に行くにし
たがい直線的に減少する特性を示す。したがって、基板
月2を光源7,8により上下両面から照明した場合は実
線I及び破線■の特性が合成された1点鎖線■に示す光
量分布特性となり、スルーボール6の欠陥検出に必要十
分な光量を確保できる。
When one of the through holes 6 of the printed board 1 is indexed to the inspection position, the light sources 7 and 8 emit red light 7a,
When the light 8a is irradiated onto both sides of the printed board 1, the light 7
The beams a and 8a enter the substrate material 2 and are diffused. Here, the light 7a incident from the upper surface of the substrate material 2 is diffused into the inside of the substrate material 2, and the light amount distribution in the thickness direction within the substrate material 2 due to this light 7a is shown by the solid line ■ in FIG. As shown in FIG.
The light quantity distribution in the thickness direction within J2 exhibits a characteristic that it is largest on the lower surface side of the substrate material 2 and decreases linearly toward the upper surface side, as shown by the broken line H in FIG. Therefore, when the board 2 is illuminated from both the upper and lower sides by the light sources 7 and 8, the characteristics of the solid line I and the dashed line ■ are combined to give the light intensity distribution characteristic shown by the dashed line ■, which is necessary and sufficient for detecting defects in the through ball 6. The amount of light can be secured.

ここで、スルーホール6の内壁にビンポール等の欠陥部
3aがあると、基板材2内で拡散した光の一部が欠陥部
3aを通してスルーホール内に漏れ、この光19は上部
プリズム9及び色分離フィルタ13を透過して光検知器
14により検知されるとともに電気信号に変換され、さ
らに2値化回路1Gにより2値イbされてアント′回路
18の一方の入力端に加えられる。
Here, if there is a defective part 3a such as a vinyl pole on the inner wall of the through hole 6, a part of the light diffused within the substrate material 2 leaks into the through hole through the defective part 3a, and this light 19 is transmitted to the upper prism 9 and the color. The signal passes through the separation filter 13, is detected by the photodetector 14, and is converted into an electrical signal, which is then converted into a binary signal by the binarization circuit 1G and applied to one input terminal of the ant' circuit 18.

一方、光#i12からの緑色の光は、スルーボール6が
検査位置に割出されていれは、下部プリズム10を透過
した後、スルーホールG内に通過し、さらに上部プリズ
ム9を透過した後、色分離フィルタ13により光検知器
15方向に反射され、該光検知器15で検知される。こ
れにより割出位置にスルーボール6があることを検知す
ると同時に、スルーボールの位置をも検知し、そして光
検知器15により電気信号に変換された後、2値化回路
17により2値化され、アンド回路18の他方の入力端
に加えられる。アンド回路18の2人力が共に11」に
なると、検査位置に割出されたスルーボール6に欠陥部
3aがあると判定して欠陥信号Sを送出する。
On the other hand, when the through ball 6 is indexed to the inspection position, the green light from the light #i12 passes through the lower prism 10, passes through the through hole G, and then passes through the upper prism 9. , is reflected by the color separation filter 13 toward the photodetector 15 and detected by the photodetector 15. As a result, the presence of the through ball 6 at the index position is detected, and at the same time, the position of the through ball is also detected, and after being converted into an electrical signal by the photodetector 15, it is binarized by the binarization circuit 17. , is applied to the other input terminal of the AND circuit 18. When the two manpowers of the AND circuit 18 both reach 11'', it is determined that there is a defective portion 3a in the through ball 6 indexed to the inspection position, and a defect signal S is sent out.

従って、上記のような構成の本実施例にあっては、プリ
ンl−Fj、1の上下両面から照明するようにしたので
、内層導体パターンがあっても、又欠陥部3aがスルー
ホール内“壁のいずれの部分にあっても、該欠陥部3a
を確実に検知することができ、従来のように一度検査し
たプリン1〜板を裏返して再度検査ずろ必要がなく、一
度の検査で欠陥検出が可能となる。
Therefore, in this embodiment having the above-mentioned configuration, since the illumination is made from both the upper and lower surfaces of the pudding l-Fj,1, even if there is an inner layer conductor pattern, the defective part 3a is not in the through hole. No matter which part of the wall there is, the defective part 3a
It is possible to reliably detect defects, and there is no need to turn over the pudding 1 to board that has been inspected once and shift the inspection again as in the conventional method, and it is possible to detect defects with a single inspection.

第3図は本発明の第2の実施例を示すものである。本実
施例においては、スフレ−ホール6を有するプリント阪
1はガラス板からなるX−Yステージ20にに載置され
、このプリント板1の上部Gこ配置した欠陥検出用の光
源7から出た光(赤色)はレンズ21により平行光線に
して上面からスルーボールル6の部分を部分照明するよ
うになってし)るとともに、レンズ21とプリント板1
間には光源7からの光がスルーホール6内に入射を阻止
するマスク22が配置さている。また、X−Yステージ
20の下面側に設置した欠陥検出用光源8から出た光は
レンズ23により平行光線に変換され、この平行光線は
ミラー24によりプリン1〜板1の下面に曲り上記光源
7からの照射光と対向して照射されるようになっている
とともに、ミラー24による照射光方向の途中には、ス
ルーホール6内への平行光線の入射を阻止し、かつスル
ーホール6の欠陥部3aから漏れる光19を反射させる
ミラー25に配置され、さらにミラ〜25により反射さ
れた光はミラー26及びレンズ27を通して欠陥検出用
光検知器28に結像されるようになっている。
FIG. 3 shows a second embodiment of the invention. In this embodiment, a printed board 1 having soufflé holes 6 is placed on an X-Y stage 20 made of a glass plate, and a light source 7 for detecting defects is emitted from a light source 7 placed on the upper part of the printed board 1. The light (red) is converted into parallel light by the lens 21 and partially illuminates the through ball 6 from the top surface, and the lens 21 and the printed board 1
A mask 22 that prevents light from the light source 7 from entering the through hole 6 is placed between them. Further, the light emitted from the defect detection light source 8 installed on the lower surface side of the X-Y stage 20 is converted into a parallel light beam by a lens 23, and this parallel light beam is bent by a mirror 24 toward the lower surface of the pudding 1 to the plate 1, and the light source The mirror 24 is designed to face the irradiation light from the through hole 6 and to prevent parallel light from entering the through hole 6, and to avoid defects in the through hole 6. The mirror 25 is arranged to reflect light 19 leaking from the portion 3a, and the light reflected by the mirror 25 is imaged on a defect detection photodetector 28 through a mirror 26 and a lens 27.

このように構成された本実施例によれば、上記第1図の
実施例と同様な効果が得られるほか、プリント板1とそ
の照明用光源手段との間隔をあ4Jることかでき、これ
に伴いガラス板からなるX−Yステージ20を介在でき
、プリン1−扱1の支持が容易Gこなる。
According to this embodiment configured in this way, the same effects as the embodiment shown in FIG. Accordingly, an XY stage 20 made of a glass plate can be interposed, and the pudding 1 can be easily supported.

また、第4図は本発明の第3図に対応するプリント坂照
明手段の変形例を示すもので、プリント1及1のX−Y
ステージ20を兼ねたガラス板の一部に切断面をガラス
板(X−Yステージ20)の平面に対し斜めにしたガラ
ス20aを接合し、その接合面には反射膜29,30を
介在せしめ、この両反射1ff29. 30(こよりス
ルーホール6の欠陥部32、から漏れた光19を図示し
ない欠陥検出用検知器に導(反射系として機能させると
ともに〜上記一方の反射膜29をプリント板照明光31
がスルーボールG内に入射するのを阻止するマスクとし
て縄;能させるようにしたものである。
Further, FIG. 4 shows a modification of the print slope illumination means corresponding to FIG. 3 of the present invention, in which
A glass 20a whose cut surface is oblique to the plane of the glass plate (X-Y stage 20) is bonded to a part of the glass plate that also serves as the stage 20, and reflective films 29 and 30 are interposed on the bonded surface, This both reflections 1ff29. 30 (This guides the light 19 leaking from the defective portion 32 of the through-hole 6 to a defect detection detector (not shown) (functions as a reflection system) and also directs the one reflective film 29 to the printed board illumination light 31
The rope acts as a mask to prevent the through ball G from entering the through ball G.

この実施例においては、第3図に示ずミラー25.26
を少なくとも省略できる。
In this embodiment, mirrors 25, 26, not shown in FIG.
can at least be omitted.

(7)発明の効果 以」二、詳述した通り、本発明によれば、プリント板両
面から照明するようにしたので、プリント板基板材の厚
さ方向におυノる入射拡散光の光量分布をほぼ均等化で
き、このため、内層導体パターンの有無及び基板材の厚
さに関係なくスルーボールの欠陥の有無を一度の検査で
確実に検知できるとともに、プリント板のスルーホール
検査能率も向上できる効果がある。
(7) Effects of the Invention As detailed in section 2, according to the present invention, since the printed board is illuminated from both sides, the amount of incident diffused light increases by υ in the thickness direction of the printed board substrate material. The distribution can be made almost uniform, which makes it possible to reliably detect the presence or absence of through-ball defects in a single inspection regardless of the presence or absence of an inner layer conductor pattern and the thickness of the board material, and also improves the efficiency of through-hole inspection of printed circuit boards. There is an effect that can be done.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明にかかるプリント板のスルーポール検査
装置の第1実施例を示す構成図、第2図は本発明におけ
るプリン1−板基板材の厚さ方向の光量分布特性図、第
3図は本発明の第2の実施例を示すスルーヘール検査装
置の構成図、第4図は第3図に対応するプリント坂照明
手段の変形例を示す説明図である。 符−号の説明 1はプリント板、2は基板(、(,3ばメッキ層、3a
は欠陥iJi、6はスルーボール、7.8は欠陥検出用
の照明光源、14.15は光検知器である。 特 許 出 願 人   富士通株式会社監−叫峡1 第1ぽ 第2図
FIG. 1 is a configuration diagram showing a first embodiment of a through-pole inspection device for printed boards according to the present invention, FIG. FIG. 4 is a block diagram of a through hale inspection device showing a second embodiment of the present invention, and FIG. 4 is an explanatory diagram showing a modification of the print slope illumination means corresponding to FIG. 3. Explanation of symbols 1 is a printed board, 2 is a board (, (, 3 is a plating layer, 3a is a
is a defect iJi, 6 is a through ball, 7.8 is an illumination light source for defect detection, and 14.15 is a photodetector. Patent applicant Supervised by Fujitsu Limited - Koikyo 1, Figure 1, Figure 2

Claims (1)

【特許請求の範囲】[Claims] プリント板の基板材に光を入射拡散し、スルーホールの
欠陥部から漏れる拡散光を検知することで欠陥検出を行
うスルーホール検査装置において、上記プリント板の両
面に対向して欠陥検出用照明光源をそれぞれ設け、この
側照明光源からの光をプリン1−板の基板材内部に両面
から同時に入射させるとともに、上記照明光源からスル
ーボールに向けられる直接光を遮蔽する遮光手段を設け
たことを特徴とするプリント板のスルーボール検査装置
In a through-hole inspection device that detects defects by diffusing light incident on the substrate material of a printed board and detecting the diffused light leaking from the defective part of the through-hole, an illumination light source for defect detection is provided opposite both sides of the printed board. are provided respectively, and the light from this side illumination light source is simultaneously incident into the inside of the substrate material of the pudding board from both sides, and a light shielding means is provided for blocking direct light directed toward the through ball from the illumination light source. Through-ball inspection equipment for printed boards.
JP22867682A 1982-11-30 1982-12-28 Through hole inspecting device for printed board Granted JPS59125695A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP22867682A JPS59125695A (en) 1982-12-28 1982-12-28 Through hole inspecting device for printed board
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22867682A JPS59125695A (en) 1982-12-28 1982-12-28 Through hole inspecting device for printed board

Publications (2)

Publication Number Publication Date
JPS59125695A true JPS59125695A (en) 1984-07-20
JPH049252B2 JPH049252B2 (en) 1992-02-19

Family

ID=16880061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22867682A Granted JPS59125695A (en) 1982-11-30 1982-12-28 Through hole inspecting device for printed board

Country Status (1)

Country Link
JP (1) JPS59125695A (en)

Also Published As

Publication number Publication date
JPH049252B2 (en) 1992-02-19

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