JPH048938B2 - - Google Patents

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Publication number
JPH048938B2
JPH048938B2 JP61229858A JP22985886A JPH048938B2 JP H048938 B2 JPH048938 B2 JP H048938B2 JP 61229858 A JP61229858 A JP 61229858A JP 22985886 A JP22985886 A JP 22985886A JP H048938 B2 JPH048938 B2 JP H048938B2
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JP
Japan
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value
current
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dimension
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Application number
JP61229858A
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English (en)
Japanese (ja)
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JPS6386432A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61229858A priority Critical patent/JPS6386432A/ja
Publication of JPS6386432A publication Critical patent/JPS6386432A/ja
Publication of JPH048938B2 publication Critical patent/JPH048938B2/ja
Granted legal-status Critical Current

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  • Electron Beam Exposure (AREA)
JP61229858A 1986-09-30 1986-09-30 電子ビ−ム描画方法 Granted JPS6386432A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61229858A JPS6386432A (ja) 1986-09-30 1986-09-30 電子ビ−ム描画方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61229858A JPS6386432A (ja) 1986-09-30 1986-09-30 電子ビ−ム描画方法

Publications (2)

Publication Number Publication Date
JPS6386432A JPS6386432A (ja) 1988-04-16
JPH048938B2 true JPH048938B2 (enExample) 1992-02-18

Family

ID=16898794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61229858A Granted JPS6386432A (ja) 1986-09-30 1986-09-30 電子ビ−ム描画方法

Country Status (1)

Country Link
JP (1) JPS6386432A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6998219B2 (en) 2001-06-27 2006-02-14 University Of South Florida Maskless photolithography for etching and deposition
US6764796B2 (en) 2001-06-27 2004-07-20 University Of South Florida Maskless photolithography using plasma displays
US6544698B1 (en) 2001-06-27 2003-04-08 University Of South Florida Maskless 2-D and 3-D pattern generation photolithography
US7095484B1 (en) 2001-06-27 2006-08-22 University Of South Florida Method and apparatus for maskless photolithography

Also Published As

Publication number Publication date
JPS6386432A (ja) 1988-04-16

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