JPH0482841U - - Google Patents

Info

Publication number
JPH0482841U
JPH0482841U JP12421290U JP12421290U JPH0482841U JP H0482841 U JPH0482841 U JP H0482841U JP 12421290 U JP12421290 U JP 12421290U JP 12421290 U JP12421290 U JP 12421290U JP H0482841 U JPH0482841 U JP H0482841U
Authority
JP
Japan
Prior art keywords
dry etching
wafer carrier
transfer device
transfer
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12421290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12421290U priority Critical patent/JPH0482841U/ja
Publication of JPH0482841U publication Critical patent/JPH0482841U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP12421290U 1990-11-28 1990-11-28 Pending JPH0482841U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12421290U JPH0482841U (OSRAM) 1990-11-28 1990-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12421290U JPH0482841U (OSRAM) 1990-11-28 1990-11-28

Publications (1)

Publication Number Publication Date
JPH0482841U true JPH0482841U (OSRAM) 1992-07-20

Family

ID=31871872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12421290U Pending JPH0482841U (OSRAM) 1990-11-28 1990-11-28

Country Status (1)

Country Link
JP (1) JPH0482841U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0574739A (ja) * 1991-09-13 1993-03-26 Hitachi Ltd 真空処理装置およびその運転方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0574739A (ja) * 1991-09-13 1993-03-26 Hitachi Ltd 真空処理装置およびその運転方法

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