JPH0184946U - - Google Patents

Info

Publication number
JPH0184946U
JPH0184946U JP1987179147U JP17914787U JPH0184946U JP H0184946 U JPH0184946 U JP H0184946U JP 1987179147 U JP1987179147 U JP 1987179147U JP 17914787 U JP17914787 U JP 17914787U JP H0184946 U JPH0184946 U JP H0184946U
Authority
JP
Japan
Prior art keywords
computer
work
station
controls
processing station
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987179147U
Other languages
English (en)
Japanese (ja)
Other versions
JPH067880Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987179147U priority Critical patent/JPH067880Y2/ja
Publication of JPH0184946U publication Critical patent/JPH0184946U/ja
Application granted granted Critical
Publication of JPH067880Y2 publication Critical patent/JPH067880Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Multi-Process Working Machines And Systems (AREA)
JP1987179147U 1987-11-25 1987-11-25 搬送制御装置 Expired - Lifetime JPH067880Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987179147U JPH067880Y2 (ja) 1987-11-25 1987-11-25 搬送制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987179147U JPH067880Y2 (ja) 1987-11-25 1987-11-25 搬送制御装置

Publications (2)

Publication Number Publication Date
JPH0184946U true JPH0184946U (OSRAM) 1989-06-06
JPH067880Y2 JPH067880Y2 (ja) 1994-03-02

Family

ID=31470727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987179147U Expired - Lifetime JPH067880Y2 (ja) 1987-11-25 1987-11-25 搬送制御装置

Country Status (1)

Country Link
JP (1) JPH067880Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116643544A (zh) * 2023-05-31 2023-08-25 西安奕斯伟材料科技股份有限公司 半导体物料搬送的控制方法、装置、设备、介质及产品

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139346U (ja) * 1984-08-08 1986-03-12 豊田工機株式会社 搬送制御における異常処理装置
JPS62241645A (ja) * 1986-04-10 1987-10-22 Hitachi Seiki Co Ltd Ｆｍｓにおける無人台車制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139346U (ja) * 1984-08-08 1986-03-12 豊田工機株式会社 搬送制御における異常処理装置
JPS62241645A (ja) * 1986-04-10 1987-10-22 Hitachi Seiki Co Ltd Ｆｍｓにおける無人台車制御装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116643544A (zh) * 2023-05-31 2023-08-25 西安奕斯伟材料科技股份有限公司 半导体物料搬送的控制方法、装置、设备、介质及产品

Also Published As

Publication number Publication date
JPH067880Y2 (ja) 1994-03-02

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