JPH0480989B2 - - Google Patents

Info

Publication number
JPH0480989B2
JPH0480989B2 JP22196884A JP22196884A JPH0480989B2 JP H0480989 B2 JPH0480989 B2 JP H0480989B2 JP 22196884 A JP22196884 A JP 22196884A JP 22196884 A JP22196884 A JP 22196884A JP H0480989 B2 JPH0480989 B2 JP H0480989B2
Authority
JP
Japan
Prior art keywords
boron
cvd
film
layer
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP22196884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61104077A (ja
Inventor
Kosaku Momotake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Columbia Co Ltd
Original Assignee
Nippon Columbia Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Columbia Co Ltd filed Critical Nippon Columbia Co Ltd
Priority to JP22196884A priority Critical patent/JPS61104077A/ja
Publication of JPS61104077A publication Critical patent/JPS61104077A/ja
Publication of JPH0480989B2 publication Critical patent/JPH0480989B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/28—Deposition of only one other non-metal element
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP22196884A 1984-10-24 1984-10-24 ホウ素皮膜の形成方法 Granted JPS61104077A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22196884A JPS61104077A (ja) 1984-10-24 1984-10-24 ホウ素皮膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22196884A JPS61104077A (ja) 1984-10-24 1984-10-24 ホウ素皮膜の形成方法

Publications (2)

Publication Number Publication Date
JPS61104077A JPS61104077A (ja) 1986-05-22
JPH0480989B2 true JPH0480989B2 (en:Method) 1992-12-21

Family

ID=16774985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22196884A Granted JPS61104077A (ja) 1984-10-24 1984-10-24 ホウ素皮膜の形成方法

Country Status (1)

Country Link
JP (1) JPS61104077A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5076601B2 (ja) * 2006-06-02 2012-11-21 株式会社豊田中央研究所 導電性耐食材料の製造方法
CN108220922B (zh) 2016-12-15 2020-12-29 东京毅力科创株式会社 成膜方法、硼膜以及成膜装置

Also Published As

Publication number Publication date
JPS61104077A (ja) 1986-05-22

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