JPH0480880B2 - - Google Patents
Info
- Publication number
- JPH0480880B2 JPH0480880B2 JP59095392A JP9539284A JPH0480880B2 JP H0480880 B2 JPH0480880 B2 JP H0480880B2 JP 59095392 A JP59095392 A JP 59095392A JP 9539284 A JP9539284 A JP 9539284A JP H0480880 B2 JPH0480880 B2 JP H0480880B2
- Authority
- JP
- Japan
- Prior art keywords
- annealing
- substrate
- compound semiconductor
- heating
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 26
- 238000000137 annealing Methods 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9539284A JPS60239400A (ja) | 1984-05-11 | 1984-05-11 | 化合物半導体のアニ−ル法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9539284A JPS60239400A (ja) | 1984-05-11 | 1984-05-11 | 化合物半導体のアニ−ル法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60239400A JPS60239400A (ja) | 1985-11-28 |
| JPH0480880B2 true JPH0480880B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-12-21 |
Family
ID=14136372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9539284A Granted JPS60239400A (ja) | 1984-05-11 | 1984-05-11 | 化合物半導体のアニ−ル法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60239400A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62128525A (ja) * | 1985-11-29 | 1987-06-10 | Matsushita Electric Ind Co Ltd | 化合物半導体基板のアニ−ル方法 |
| US5011794A (en) * | 1989-05-01 | 1991-04-30 | At&T Bell Laboratories | Procedure for rapid thermal annealing of implanted semiconductors |
| JP2005197464A (ja) | 2004-01-07 | 2005-07-21 | Rohm Co Ltd | 半導体装置の製造方法 |
| US20090289355A1 (en) * | 2005-10-28 | 2009-11-26 | National Institute Of Advanced Industrial Science And Technology | Semiconductor manufacturing apparatus and semiconductor device |
| JP5080043B2 (ja) * | 2006-08-31 | 2012-11-21 | 新電元工業株式会社 | 半導体装置の製造方法、半導体装置の製造用治具、および半導体装置の製造装置 |
| JP5573533B2 (ja) * | 2010-09-17 | 2014-08-20 | トヨタ自動車株式会社 | 基板の熱処理方法および熱処理装置 |
-
1984
- 1984-05-11 JP JP9539284A patent/JPS60239400A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60239400A (ja) | 1985-11-28 |