JPH0480790B2 - - Google Patents
Info
- Publication number
- JPH0480790B2 JPH0480790B2 JP61271493A JP27149386A JPH0480790B2 JP H0480790 B2 JPH0480790 B2 JP H0480790B2 JP 61271493 A JP61271493 A JP 61271493A JP 27149386 A JP27149386 A JP 27149386A JP H0480790 B2 JPH0480790 B2 JP H0480790B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- cerium oxide
- abrasive material
- abrasive
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 32
- 239000003082 abrasive agent Substances 0.000 claims description 15
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 15
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 150000002822 niobium compounds Chemical class 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 6
- 238000007517 polishing process Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 230000004931 aggregating effect Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61271493A JPS63127868A (ja) | 1986-11-14 | 1986-11-14 | 研磨材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61271493A JPS63127868A (ja) | 1986-11-14 | 1986-11-14 | 研磨材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63127868A JPS63127868A (ja) | 1988-05-31 |
| JPH0480790B2 true JPH0480790B2 (enrdf_load_stackoverflow) | 1992-12-21 |
Family
ID=17500820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61271493A Granted JPS63127868A (ja) | 1986-11-14 | 1986-11-14 | 研磨材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127868A (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5913711A (ja) * | 1982-07-13 | 1984-01-24 | Sankin Kogyo Kk | 歯磨用組成物 |
-
1986
- 1986-11-14 JP JP61271493A patent/JPS63127868A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63127868A (ja) | 1988-05-31 |
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