JPH0480321B2 - - Google Patents
Info
- Publication number
- JPH0480321B2 JPH0480321B2 JP58176027A JP17602783A JPH0480321B2 JP H0480321 B2 JPH0480321 B2 JP H0480321B2 JP 58176027 A JP58176027 A JP 58176027A JP 17602783 A JP17602783 A JP 17602783A JP H0480321 B2 JPH0480321 B2 JP H0480321B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped
- angular velocity
- portions
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58176027A JPS6067815A (ja) | 1983-09-23 | 1983-09-23 | 角速度センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58176027A JPS6067815A (ja) | 1983-09-23 | 1983-09-23 | 角速度センサ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3172825A Division JPH0695022B2 (ja) | 1991-07-12 | 1991-07-12 | 角速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6067815A JPS6067815A (ja) | 1985-04-18 |
JPH0480321B2 true JPH0480321B2 (enrdf_load_stackoverflow) | 1992-12-18 |
Family
ID=16006441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58176027A Granted JPS6067815A (ja) | 1983-09-23 | 1983-09-23 | 角速度センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6067815A (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62229023A (ja) * | 1986-03-31 | 1987-10-07 | Matsushita Electric Ind Co Ltd | 角速度センサ |
JP2671020B2 (ja) * | 1988-07-29 | 1997-10-29 | 日本電気ホームエレクトロニクス株式会社 | 振動ジャイロ |
EP0460581B1 (en) * | 1990-06-04 | 1995-04-26 | Nippondenso Co., Ltd. | Signal processing circuit for yaw-rate sensor |
DE69331116T2 (de) * | 1993-02-03 | 2002-03-14 | Matsushita Electric Industrial Co., Ltd. | Drehratensensor und Verfahren zu dessen Herstellung |
US5447066A (en) * | 1993-09-01 | 1995-09-05 | Matsushita Electric Industrial Co. Ltd. | Angular velocity sensor having a tuning fork construction and its method of manufacture |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2544646A (en) * | 1948-06-16 | 1951-03-13 | Sperry Corp | Angular velocity measuring instrument |
JPS6049215A (ja) * | 1983-08-30 | 1985-03-18 | Jeco Co Ltd | 角速度センサ |
-
1983
- 1983-09-23 JP JP58176027A patent/JPS6067815A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6067815A (ja) | 1985-04-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6119518A (en) | Angular velocity sensor | |
JPH08220130A (ja) | 圧電加速度センサ | |
JPH0480321B2 (enrdf_load_stackoverflow) | ||
JP2003114127A (ja) | 振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置 | |
JPH09170926A (ja) | 角速度センサ | |
JPH03214013A (ja) | 角速度センサ | |
JPH0695022B2 (ja) | 角速度センサ | |
JP3277794B2 (ja) | 加速度センサ | |
JPS62188975A (ja) | 圧電体角速度センサ− | |
JP5144004B2 (ja) | 慣性センサ素子 | |
JPH0914967A (ja) | 振動型ジャイロスコープ | |
JPS60216210A (ja) | 角速度センサ− | |
JP2689799B2 (ja) | 加速度センサ | |
JP3899637B2 (ja) | 角速度センサの製造方法 | |
JP3777780B2 (ja) | 角速度検出用振動子の製造方法 | |
JPS60213813A (ja) | 角速度センサ | |
JP3244923B2 (ja) | 角速度センサ | |
JPH09105633A (ja) | 角速度センサ | |
JPS6246266A (ja) | 振動センサ | |
JP3244924B2 (ja) | 角速度センサ | |
JP3097411B2 (ja) | 加速度センサ | |
JP2003214855A (ja) | 角速度センサ | |
JP2589541B2 (ja) | 配列型超音波探触子 | |
JPS61180107A (ja) | 角速度センサ素子の製造方法 | |
JPH0758196B2 (ja) | 角速度センサの製造方法 |