JPH0479996B2 - - Google Patents

Info

Publication number
JPH0479996B2
JPH0479996B2 JP58237669A JP23766983A JPH0479996B2 JP H0479996 B2 JPH0479996 B2 JP H0479996B2 JP 58237669 A JP58237669 A JP 58237669A JP 23766983 A JP23766983 A JP 23766983A JP H0479996 B2 JPH0479996 B2 JP H0479996B2
Authority
JP
Japan
Prior art keywords
crystal
rays
single crystal
ray
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58237669A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60131900A (ja
Inventor
Masami Tatsumi
Shinichi Sawada
Ryusuke Nakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP58237669A priority Critical patent/JPS60131900A/ja
Priority to US06/679,895 priority patent/US4634490A/en
Priority to EP84115476A priority patent/EP0146132B1/en
Priority to DE8484115476T priority patent/DE3477023D1/de
Publication of JPS60131900A publication Critical patent/JPS60131900A/ja
Publication of JPH0479996B2 publication Critical patent/JPH0479996B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • C30B15/22Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP58237669A 1983-12-16 1983-12-16 単結晶の製造方法 Granted JPS60131900A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58237669A JPS60131900A (ja) 1983-12-16 1983-12-16 単結晶の製造方法
US06/679,895 US4634490A (en) 1983-12-16 1984-12-10 Method of monitoring single crystal during growth
EP84115476A EP0146132B1 (en) 1983-12-16 1984-12-14 Method of monitoring single crystal during growth
DE8484115476T DE3477023D1 (en) 1983-12-16 1984-12-14 Method of monitoring single crystal during growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58237669A JPS60131900A (ja) 1983-12-16 1983-12-16 単結晶の製造方法

Publications (2)

Publication Number Publication Date
JPS60131900A JPS60131900A (ja) 1985-07-13
JPH0479996B2 true JPH0479996B2 (oth) 1992-12-17

Family

ID=17018746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58237669A Granted JPS60131900A (ja) 1983-12-16 1983-12-16 単結晶の製造方法

Country Status (4)

Country Link
US (1) US4634490A (oth)
EP (1) EP0146132B1 (oth)
JP (1) JPS60131900A (oth)
DE (1) DE3477023D1 (oth)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011062217A1 (ja) 2009-11-20 2011-05-26 戸田工業株式会社 磁性酸化鉄微粒子粉末、磁性粒子含有水分散体およびその製造方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8607482D0 (en) * 1986-03-26 1986-04-30 Howe S Orientation of crystals
JPH0318747A (ja) * 1989-06-16 1991-01-28 Nippon Philips Kk 格子定数比測定方法及び測定装置
US5456205A (en) * 1993-06-01 1995-10-10 Midwest Research Institute System for monitoring the growth of crystalline films on stationary substrates
US5589690A (en) * 1995-03-21 1996-12-31 National Institute Of Standards And Technology Apparatus and method for monitoring casting process
DE19548845B4 (de) * 1995-12-27 2008-04-10 Crystal Growing Systems Gmbh Vorrichtung und Verfahren zum Ziehen von Einkristallen nach dem Czochralski-Verfahren
US5724401A (en) * 1996-01-24 1998-03-03 The Penn State Research Foundation Large angle solid state position sensitive x-ray detector system
US6055293A (en) * 1998-06-30 2000-04-25 Seh America, Inc. Method for identifying desired features in a crystal
JP4071476B2 (ja) 2001-03-21 2008-04-02 株式会社東芝 半導体ウェーハ及び半導体ウェーハの製造方法
JP4799465B2 (ja) * 2001-03-21 2011-10-26 株式会社東芝 半導体ウェーハ、半導体装置の製造装置、半導体装置の製造方法、及び半導体ウェーハの製造方法
US6836532B2 (en) * 2001-06-29 2004-12-28 Bruker Axs, Inc. Diffraction system for biological crystal screening
US6760403B2 (en) 2001-10-25 2004-07-06 Seh America, Inc. Method and apparatus for orienting a crystalline body during radiation diffractometry
JP4020313B2 (ja) * 2003-03-28 2007-12-12 ステラケミファ株式会社 フッ化物中の不純物及び色中心分析方法及び単結晶育成用材料の製造方法
DE10317677A1 (de) * 2003-04-17 2004-11-18 Bruker Axs Gmbh Primärstrahlfänger
US7027557B2 (en) * 2004-05-13 2006-04-11 Jorge Llacer Method for assisted beam selection in radiation therapy planning
JP2013540685A (ja) * 2010-10-01 2013-11-07 エバーグリーン ソーラー, インコーポレイテッド シートウエハ欠陥軽減
EP4153533B1 (en) * 2020-05-22 2025-02-05 Fraunhofer USA, Inc. Systems and methods for synthesizing a diamond using machine learning

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3105901A (en) * 1959-03-30 1963-10-01 Philips Corp X-ray diffraction device with 360 rotatable specimen holder
NL6512921A (oth) * 1965-10-06 1967-04-07
JPS59174598A (ja) * 1983-03-18 1984-10-03 Hitachi Cable Ltd 3−5族化合物半導体単結晶の製造法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011062217A1 (ja) 2009-11-20 2011-05-26 戸田工業株式会社 磁性酸化鉄微粒子粉末、磁性粒子含有水分散体およびその製造方法

Also Published As

Publication number Publication date
EP0146132A2 (en) 1985-06-26
DE3477023D1 (en) 1989-04-13
US4634490A (en) 1987-01-06
EP0146132A3 (en) 1986-06-11
EP0146132B1 (en) 1989-03-08
JPS60131900A (ja) 1985-07-13

Similar Documents

Publication Publication Date Title
JPH0479996B2 (oth)
Patel X‐ray anomalous transmission and topography of oxygen precipitation in silicon
DE102004025150B4 (de) Lagebestimmung eines Halbleitersubstrats auf einer Rotationsvorrichtung
JP2002005745A (ja) 温度測定装置、および温度測定方法
CN107250038A (zh) 多晶硅棒及其制造方法和fz硅单晶
Moriya Observation of micro-defects in as-grown and heat treated Si crystals by infrared laser scattering tomography
US5238525A (en) Analysis of Rheed data from rotating substrates
JP3433634B2 (ja) 半導体単結晶中の結晶欠陥観察用試料作製方法および結晶欠陥観察方法
JP4246561B2 (ja) 単結晶直径の制御方法
JPH112614A (ja) 単結晶軸方位x線測定方法及び装置
JPS59232989A (ja) 化合物半導体単結晶の製造装置
JP2000035409A (ja) X線装置及びx線測定方法
JPS61151089A (ja) 単結晶の製造方法
JPH03112885A (ja) 単結晶引き上げ時の結晶ダイの検知方法
JP3213720B2 (ja) 結晶成長装置及びこれを使用した結晶成長方法
JP2723734B2 (ja) コリメーター用単結晶
JPH04301800A (ja) X線回折顕微装置
JP2908498B2 (ja) 単結晶インゴットの結晶方位測定装置
JPH095251A (ja) 欠陥検査装置
JPH09246337A (ja) 結晶欠陥検出方法及び結晶欠陥検出装置
JPS61158888A (ja) 単結晶の製造方法
JPS6077192A (ja) 単結晶の欠陥検出装置
JPS62241897A (ja) 単結晶育成方法
DD257362A3 (de) Anordnung zur ermittlung von den kristallisationsprozess charakterisierenden daten und/oder messgroessen
CN107268079A (zh) 多晶硅、fz单晶硅以及它们的制造方法