DE3477023D1 - Method of monitoring single crystal during growth - Google Patents
Method of monitoring single crystal during growthInfo
- Publication number
- DE3477023D1 DE3477023D1 DE8484115476T DE3477023T DE3477023D1 DE 3477023 D1 DE3477023 D1 DE 3477023D1 DE 8484115476 T DE8484115476 T DE 8484115476T DE 3477023 T DE3477023 T DE 3477023T DE 3477023 D1 DE3477023 D1 DE 3477023D1
- Authority
- DE
- Germany
- Prior art keywords
- single crystal
- during growth
- crystal during
- monitoring single
- monitoring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58237669A JPS60131900A (ja) | 1983-12-16 | 1983-12-16 | 単結晶の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3477023D1 true DE3477023D1 (en) | 1989-04-13 |
Family
ID=17018746
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484115476T Expired DE3477023D1 (en) | 1983-12-16 | 1984-12-14 | Method of monitoring single crystal during growth |
Country Status (4)
Country | Link |
---|---|
US (1) | US4634490A (de) |
EP (1) | EP0146132B1 (de) |
JP (1) | JPS60131900A (de) |
DE (1) | DE3477023D1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8607482D0 (en) * | 1986-03-26 | 1986-04-30 | Howe S | Orientation of crystals |
JPH0318747A (ja) * | 1989-06-16 | 1991-01-28 | Nippon Philips Kk | 格子定数比測定方法及び測定装置 |
US5456205A (en) * | 1993-06-01 | 1995-10-10 | Midwest Research Institute | System for monitoring the growth of crystalline films on stationary substrates |
US5589690A (en) * | 1995-03-21 | 1996-12-31 | National Institute Of Standards And Technology | Apparatus and method for monitoring casting process |
DE19548845B4 (de) * | 1995-12-27 | 2008-04-10 | Crystal Growing Systems Gmbh | Vorrichtung und Verfahren zum Ziehen von Einkristallen nach dem Czochralski-Verfahren |
US5724401A (en) * | 1996-01-24 | 1998-03-03 | The Penn State Research Foundation | Large angle solid state position sensitive x-ray detector system |
US6055293A (en) * | 1998-06-30 | 2000-04-25 | Seh America, Inc. | Method for identifying desired features in a crystal |
JP4071476B2 (ja) * | 2001-03-21 | 2008-04-02 | 株式会社東芝 | 半導体ウェーハ及び半導体ウェーハの製造方法 |
JP4799465B2 (ja) * | 2001-03-21 | 2011-10-26 | 株式会社東芝 | 半導体ウェーハ、半導体装置の製造装置、半導体装置の製造方法、及び半導体ウェーハの製造方法 |
US6836532B2 (en) * | 2001-06-29 | 2004-12-28 | Bruker Axs, Inc. | Diffraction system for biological crystal screening |
US6760403B2 (en) | 2001-10-25 | 2004-07-06 | Seh America, Inc. | Method and apparatus for orienting a crystalline body during radiation diffractometry |
JP4020313B2 (ja) * | 2003-03-28 | 2007-12-12 | ステラケミファ株式会社 | フッ化物中の不純物及び色中心分析方法及び単結晶育成用材料の製造方法 |
DE10317677A1 (de) * | 2003-04-17 | 2004-11-18 | Bruker Axs Gmbh | Primärstrahlfänger |
US7027557B2 (en) * | 2004-05-13 | 2006-04-11 | Jorge Llacer | Method for assisted beam selection in radiation therapy planning |
WO2011062217A1 (ja) | 2009-11-20 | 2011-05-26 | 戸田工業株式会社 | 磁性酸化鉄微粒子粉末、磁性粒子含有水分散体およびその製造方法 |
US20120131766A1 (en) * | 2010-10-01 | 2012-05-31 | Max Era, Inc. | Sheet Wafer Defect Mitigation |
JP2023528303A (ja) * | 2020-05-22 | 2023-07-04 | フラウンホーファー ユーエスエイ インコーポレイテッド | 機械学習を用いたダイヤモンドの合成システムおよび方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3105901A (en) * | 1959-03-30 | 1963-10-01 | Philips Corp | X-ray diffraction device with 360 rotatable specimen holder |
NL6512921A (de) * | 1965-10-06 | 1967-04-07 | ||
JPS59174598A (ja) * | 1983-03-18 | 1984-10-03 | Hitachi Cable Ltd | 3−5族化合物半導体単結晶の製造法 |
-
1983
- 1983-12-16 JP JP58237669A patent/JPS60131900A/ja active Granted
-
1984
- 1984-12-10 US US06/679,895 patent/US4634490A/en not_active Expired - Lifetime
- 1984-12-14 EP EP84115476A patent/EP0146132B1/de not_active Expired
- 1984-12-14 DE DE8484115476T patent/DE3477023D1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US4634490A (en) | 1987-01-06 |
EP0146132A3 (en) | 1986-06-11 |
EP0146132A2 (de) | 1985-06-26 |
JPH0479996B2 (de) | 1992-12-17 |
EP0146132B1 (de) | 1989-03-08 |
JPS60131900A (ja) | 1985-07-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2163672B (en) | Single crystal growth apparatus | |
GB8329334D0 (en) | Monitoring process conditions | |
DE3477023D1 (en) | Method of monitoring single crystal during growth | |
DE3474842D1 (en) | An lec method and apparatus for growing single crystal | |
IL73826A0 (en) | Improved method of preparing 2-fluoro-17beta-estradiol | |
DE3263601D1 (en) | Method and apparatus for manufacturing single crystals | |
GR82597B (en) | Method of preparing novel 2-phenyl-imidazol | |
DE3472577D1 (en) | Apparatus for growing single crystals of dissociative compounds | |
PL250043A1 (en) | Method of obtaining new glycopeptidic derivatives | |
DE3473805D1 (en) | Method of growing edible mushrooms | |
IL59154A (en) | Apparatus for and method of monitoring crystal growth | |
GB2084483B (en) | Method of manufacturing single crystals | |
DE3365149D1 (en) | Pulling method of single crystals | |
EP0162467A3 (en) | Method for growing single crystals of dissociative compounds | |
PL250593A1 (en) | Method of obtaining new crystalline cephalexine hydrochloride monohydrate | |
GB2139918B (en) | Crystal growing apparatus | |
DE3466785D1 (en) | Apparatus for the growth of single crystals | |
PL248668A1 (en) | Method of obtaining new derivatives of phenylomytoxybenzene | |
DE3472117D1 (en) | Apparatus for production of a single crystal and monitoring of the production | |
BG50101A1 (en) | Method for preparing of adhesives | |
GB2145638B (en) | Method of producing crystals | |
DE3470993D1 (en) | Process for preparing single crystal | |
GB2124605B (en) | Method of performing solution growth of znse crystals | |
DE3465348D1 (en) | A growth method of an inorganic compound single crystal and a boat used therefor | |
GB2142933B (en) | Method of culture |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |