JPH0479152B2 - - Google Patents

Info

Publication number
JPH0479152B2
JPH0479152B2 JP57092754A JP9275482A JPH0479152B2 JP H0479152 B2 JPH0479152 B2 JP H0479152B2 JP 57092754 A JP57092754 A JP 57092754A JP 9275482 A JP9275482 A JP 9275482A JP H0479152 B2 JPH0479152 B2 JP H0479152B2
Authority
JP
Japan
Prior art keywords
tunnel junction
superconductor
superconductor electrode
electrode
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57092754A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58209184A (ja
Inventor
Hisanao Tsuge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57092754A priority Critical patent/JPS58209184A/ja
Priority to US06/499,553 priority patent/US4548834A/en
Priority to DE8383105381T priority patent/DE3370901D1/de
Priority to EP83105381A priority patent/EP0095773B1/en
Publication of JPS58209184A publication Critical patent/JPS58209184A/ja
Publication of JPH0479152B2 publication Critical patent/JPH0479152B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP57092754A 1982-05-31 1982-05-31 ジヨセフソン接合素子の製造方法 Granted JPS58209184A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP57092754A JPS58209184A (ja) 1982-05-31 1982-05-31 ジヨセフソン接合素子の製造方法
US06/499,553 US4548834A (en) 1982-05-31 1983-05-31 Method of producing a Josephson tunnel barrier
DE8383105381T DE3370901D1 (en) 1982-05-31 1983-05-31 Method of producing josephson tunnel barrier
EP83105381A EP0095773B1 (en) 1982-05-31 1983-05-31 Method of producing josephson tunnel barrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57092754A JPS58209184A (ja) 1982-05-31 1982-05-31 ジヨセフソン接合素子の製造方法

Publications (2)

Publication Number Publication Date
JPS58209184A JPS58209184A (ja) 1983-12-06
JPH0479152B2 true JPH0479152B2 (enExample) 1992-12-15

Family

ID=14063200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57092754A Granted JPS58209184A (ja) 1982-05-31 1982-05-31 ジヨセフソン接合素子の製造方法

Country Status (1)

Country Link
JP (1) JPS58209184A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5688384A (en) * 1979-12-20 1981-07-17 Hitachi Ltd Manufacture of josephson junction element

Also Published As

Publication number Publication date
JPS58209184A (ja) 1983-12-06

Similar Documents

Publication Publication Date Title
KR0170949B1 (ko) 메탈층 형성 방법
US4434224A (en) Method of pattern formation
EP0095773B1 (en) Method of producing josephson tunnel barrier
US5032491A (en) Method of forming a fine pattern
JPH0479152B2 (enExample)
JPS58209183A (ja) ジヨセフソン接合素子の製造方法
JPS61144083A (ja) ジヨセフソン接合素子の形成方法
JPS5979585A (ja) ジヨセフソン接合素子とその製造方法
JPS60208873A (ja) ジヨセフソン接合素子の製造方法
JPH0511432B2 (enExample)
JPS58209176A (ja) ジヨセフソン接合素子の製造方法
JPS60208875A (ja) ジヨセフソン接合素子の製造方法
JPS6147679A (ja) ジヨセフソン接合素子の作製方法
JPS60208874A (ja) ジヨセフソン接合素子の製造方法
JPS6224677A (ja) 超伝導回路用接地面の形成方法
JPH07142776A (ja) パターンの形成方法
JPH0481876B2 (enExample)
JPH01168080A (ja) ジョセフソン接合素子の作製方法
JPS6143488A (ja) 超伝導コンタクトの製造方法
JPS58209179A (ja) ジヨセフソン接合素子の製造方法
JPS6167975A (ja) ジヨセフソン接合素子の製造方法
JPS58209182A (ja) ジヨセフソン接合素子の製造方法
JPH0521616A (ja) 半導体の製造方法
JPH0145218B2 (enExample)
JPS58209181A (ja) ジヨセフソン接合素子の製造方法