JPH0478524B2 - - Google Patents

Info

Publication number
JPH0478524B2
JPH0478524B2 JP60143860A JP14386085A JPH0478524B2 JP H0478524 B2 JPH0478524 B2 JP H0478524B2 JP 60143860 A JP60143860 A JP 60143860A JP 14386085 A JP14386085 A JP 14386085A JP H0478524 B2 JPH0478524 B2 JP H0478524B2
Authority
JP
Japan
Prior art keywords
guide
wafer
height
guide plate
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60143860A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6212509A (ja
Inventor
Toshiaki Yanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP14386085A priority Critical patent/JPS6212509A/ja
Publication of JPS6212509A publication Critical patent/JPS6212509A/ja
Publication of JPH0478524B2 publication Critical patent/JPH0478524B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Framework For Endless Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP14386085A 1985-07-02 1985-07-02 ウェハ搬送装置 Granted JPS6212509A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14386085A JPS6212509A (ja) 1985-07-02 1985-07-02 ウェハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14386085A JPS6212509A (ja) 1985-07-02 1985-07-02 ウェハ搬送装置

Publications (2)

Publication Number Publication Date
JPS6212509A JPS6212509A (ja) 1987-01-21
JPH0478524B2 true JPH0478524B2 (ko) 1992-12-11

Family

ID=15348657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14386085A Granted JPS6212509A (ja) 1985-07-02 1985-07-02 ウェハ搬送装置

Country Status (1)

Country Link
JP (1) JPS6212509A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179166A (ja) * 1988-01-08 1989-07-17 Fuji Xerox Co Ltd 両極性帯電型電子写真感光体
GB0419393D0 (en) * 2004-09-01 2004-10-06 Diageo Plc Adjustable conveyor guide
US8132666B2 (en) 2004-09-01 2012-03-13 Zepf Technologies Uk Limited Adjustable conveyor guide
FR3037329A1 (fr) * 2015-06-10 2016-12-16 Sidel Participations Dispositif pour le transport de corps creux comportant un col, notamment des preformes ou des recipients

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633210B2 (ko) * 1979-03-23 1981-08-01

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS579287Y2 (ko) * 1979-08-24 1982-02-23
JPS57121197U (ko) * 1981-01-21 1982-07-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633210B2 (ko) * 1979-03-23 1981-08-01

Also Published As

Publication number Publication date
JPS6212509A (ja) 1987-01-21

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