JPH0476798B2 - - Google Patents
Info
- Publication number
- JPH0476798B2 JPH0476798B2 JP5321788A JP5321788A JPH0476798B2 JP H0476798 B2 JPH0476798 B2 JP H0476798B2 JP 5321788 A JP5321788 A JP 5321788A JP 5321788 A JP5321788 A JP 5321788A JP H0476798 B2 JPH0476798 B2 JP H0476798B2
- Authority
- JP
- Japan
- Prior art keywords
- rail
- scale
- movement
- head
- counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011295 pitch Substances 0.000 description 28
- 238000001514 detection method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5321788A JPS63260498A (ja) | 1988-03-07 | 1988-03-07 | レールタイプ自在平行定規装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5321788A JPS63260498A (ja) | 1988-03-07 | 1988-03-07 | レールタイプ自在平行定規装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63260498A JPS63260498A (ja) | 1988-10-27 |
| JPH0476798B2 true JPH0476798B2 (enEXAMPLES) | 1992-12-04 |
Family
ID=12936666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5321788A Granted JPS63260498A (ja) | 1988-03-07 | 1988-03-07 | レールタイプ自在平行定規装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63260498A (enEXAMPLES) |
-
1988
- 1988-03-07 JP JP5321788A patent/JPS63260498A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63260498A (ja) | 1988-10-27 |
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