JPH0476219B2 - - Google Patents

Info

Publication number
JPH0476219B2
JPH0476219B2 JP59106798A JP10679884A JPH0476219B2 JP H0476219 B2 JPH0476219 B2 JP H0476219B2 JP 59106798 A JP59106798 A JP 59106798A JP 10679884 A JP10679884 A JP 10679884A JP H0476219 B2 JPH0476219 B2 JP H0476219B2
Authority
JP
Japan
Prior art keywords
region
conductivity type
type semiconductor
semiconductor region
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59106798A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60249370A (ja
Inventor
Hiroshi Yamaguchi
Ikunori Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59106798A priority Critical patent/JPS60249370A/ja
Publication of JPS60249370A publication Critical patent/JPS60249370A/ja
Publication of JPH0476219B2 publication Critical patent/JPH0476219B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/64Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66Vertical DMOS [VDMOS] FETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/60Electrodes characterised by their materials
    • H10D64/62Electrodes ohmically coupled to a semiconductor

Landscapes

  • Bipolar Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP59106798A 1984-05-24 1984-05-24 電導度変調型半導体装置 Granted JPS60249370A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59106798A JPS60249370A (ja) 1984-05-24 1984-05-24 電導度変調型半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59106798A JPS60249370A (ja) 1984-05-24 1984-05-24 電導度変調型半導体装置

Publications (2)

Publication Number Publication Date
JPS60249370A JPS60249370A (ja) 1985-12-10
JPH0476219B2 true JPH0476219B2 (enrdf_load_stackoverflow) 1992-12-03

Family

ID=14442896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59106798A Granted JPS60249370A (ja) 1984-05-24 1984-05-24 電導度変調型半導体装置

Country Status (1)

Country Link
JP (1) JPS60249370A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0332822A1 (de) * 1988-02-22 1989-09-20 Asea Brown Boveri Ag Feldeffektgesteuertes, bipolares Leistungshalbleiter-Bauelement sowie Verfahren zu seiner Herstellung
US4985740A (en) * 1989-06-01 1991-01-15 General Electric Company Power field effect devices having low gate sheet resistance and low ohmic contact resistance
DE19600780B4 (de) * 1996-01-11 2006-04-13 Micronas Gmbh Verfahren zum Kontaktieren von Bereichen mit verschiedener Dotierung in einem Halbleiterbauelement und Halbleiterbauelement

Also Published As

Publication number Publication date
JPS60249370A (ja) 1985-12-10

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