JPH0475880B2 - - Google Patents
Info
- Publication number
- JPH0475880B2 JPH0475880B2 JP61213468A JP21346886A JPH0475880B2 JP H0475880 B2 JPH0475880 B2 JP H0475880B2 JP 61213468 A JP61213468 A JP 61213468A JP 21346886 A JP21346886 A JP 21346886A JP H0475880 B2 JPH0475880 B2 JP H0475880B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- double
- melt
- divided
- double crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000155 melt Substances 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 32
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 16
- 239000010703 silicon Substances 0.000 description 16
- 239000002994 raw material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21346886A JPS6369791A (ja) | 1986-09-09 | 1986-09-09 | 二重るつぼ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21346886A JPS6369791A (ja) | 1986-09-09 | 1986-09-09 | 二重るつぼ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6369791A JPS6369791A (ja) | 1988-03-29 |
| JPH0475880B2 true JPH0475880B2 (ko) | 1992-12-02 |
Family
ID=16639703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21346886A Granted JPS6369791A (ja) | 1986-09-09 | 1986-09-09 | 二重るつぼ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6369791A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0383886A (ja) * | 1989-08-29 | 1991-04-09 | Mitsubishi Materials Corp | 単結晶引き上げ用サセプタ |
| JP3815805B2 (ja) * | 1994-11-15 | 2006-08-30 | 富士重工業株式会社 | 自動変速機のポンプ吐出量制御装置 |
| JPH102415A (ja) * | 1996-06-13 | 1998-01-06 | Nissan Motor Co Ltd | 自動変速機用の流量制御弁 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840666U (ko) * | 1971-09-16 | 1973-05-23 | ||
| JPS5443045U (ko) * | 1977-08-29 | 1979-03-23 |
-
1986
- 1986-09-09 JP JP21346886A patent/JPS6369791A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840666U (ko) * | 1971-09-16 | 1973-05-23 | ||
| JPS5443045U (ko) * | 1977-08-29 | 1979-03-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6369791A (ja) | 1988-03-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01119598A (ja) | 単結晶の製造方法 | |
| JPH02133389A (ja) | シリコン単結晶の製造装置 | |
| US4243471A (en) | Method for directional solidification of silicon | |
| JPH0475880B2 (ko) | ||
| JP3152971B2 (ja) | 高純度銅単結晶鋳塊の製造方法 | |
| JP2690419B2 (ja) | 単結晶の育成方法及びその装置 | |
| JPH0315550Y2 (ko) | ||
| JP2531875B2 (ja) | 化合物半導体単結晶の製造方法 | |
| JPS5964591A (ja) | 単結晶引上装置 | |
| JPH04219398A (ja) | 単結晶シリコンの製造方法 | |
| JPH09309791A (ja) | 半導体単結晶の製造方法 | |
| JP3788077B2 (ja) | 半導体結晶の製造方法および製造装置 | |
| JPS63295498A (ja) | ３−ｖ族化合物半導体単結晶の製造方法 | |
| JPH05319973A (ja) | 単結晶製造装置 | |
| JPH11130579A (ja) | 化合物半導体単結晶の製造方法及びその製造装置 | |
| JP3018429B2 (ja) | 単結晶の製造方法および製造装置 | |
| JPS62167213A (ja) | シリコン多結晶インゴツトの製造方法 | |
| JPH0449185Y2 (ko) | ||
| JPH09142982A (ja) | 単結晶育成装置及び単結晶の育成方法 | |
| JPS62252395A (ja) | 単結晶製造用ルツボ | |
| JPH02212395A (ja) | 化合物半導体結晶の製造方法および製造装置 | |
| JPH0867593A (ja) | 単結晶の成長方法 | |
| JPH05124887A (ja) | 単結晶の製造方法及びその装置 | |
| JPS63233091A (ja) | 化合物半導体の単結晶製造方法及びその装置 | |
| JPH07206584A (ja) | 化合物半導体単結晶の製造方法 |