JPH0474855B2 - - Google Patents
Info
- Publication number
- JPH0474855B2 JPH0474855B2 JP1330388A JP33038889A JPH0474855B2 JP H0474855 B2 JPH0474855 B2 JP H0474855B2 JP 1330388 A JP1330388 A JP 1330388A JP 33038889 A JP33038889 A JP 33038889A JP H0474855 B2 JPH0474855 B2 JP H0474855B2
- Authority
- JP
- Japan
- Prior art keywords
- lens system
- lens
- projection lens
- integrated circuit
- projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000004075 alteration Effects 0.000 claims description 48
- 239000000463 material Substances 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000012937 correction Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910004261 CaF 2 Inorganic materials 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 10
- 239000011521 glass Substances 0.000 description 7
- 230000005499 meniscus Effects 0.000 description 6
- 206010010071 Coma Diseases 0.000 description 5
- 125000001475 halogen functional group Chemical group 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1330388A JPH0334308A (ja) | 1989-12-19 | 1989-12-19 | 集積回路製造方法及び露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1330388A JPH0334308A (ja) | 1989-12-19 | 1989-12-19 | 集積回路製造方法及び露光装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24590483A Division JPS60140310A (ja) | 1983-12-28 | 1983-12-28 | 投影レンズ |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6089986A Division JP2869849B2 (ja) | 1994-04-27 | 1994-04-27 | 集積回路製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0334308A JPH0334308A (ja) | 1991-02-14 |
| JPH0474855B2 true JPH0474855B2 (enExample) | 1992-11-27 |
Family
ID=18232045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1330388A Granted JPH0334308A (ja) | 1989-12-19 | 1989-12-19 | 集積回路製造方法及び露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334308A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5805113A (en) * | 1995-01-31 | 1998-09-08 | Ogino; Toshikazu | Multiband antenna receiver system with, LNA, AMP, combiner, voltage regulator, splitter, noise filter and common single feeder |
| KR100237742B1 (ko) * | 1996-06-29 | 2000-01-15 | 김영환 | 스텝퍼 리턱션 렌즈 |
-
1989
- 1989-12-19 JP JP1330388A patent/JPH0334308A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0334308A (ja) | 1991-02-14 |
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