JPH0334308A - 集積回路製造方法及び露光装置 - Google Patents

集積回路製造方法及び露光装置

Info

Publication number
JPH0334308A
JPH0334308A JP1330388A JP33038889A JPH0334308A JP H0334308 A JPH0334308 A JP H0334308A JP 1330388 A JP1330388 A JP 1330388A JP 33038889 A JP33038889 A JP 33038889A JP H0334308 A JPH0334308 A JP H0334308A
Authority
JP
Japan
Prior art keywords
lens
lens group
aberration
lens system
negative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1330388A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474855B2 (enExample
Inventor
Takamasa Hirose
広瀬　隆昌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP1330388A priority Critical patent/JPH0334308A/ja
Publication of JPH0334308A publication Critical patent/JPH0334308A/ja
Publication of JPH0474855B2 publication Critical patent/JPH0474855B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1330388A 1989-12-19 1989-12-19 集積回路製造方法及び露光装置 Granted JPH0334308A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1330388A JPH0334308A (ja) 1989-12-19 1989-12-19 集積回路製造方法及び露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1330388A JPH0334308A (ja) 1989-12-19 1989-12-19 集積回路製造方法及び露光装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP24590483A Division JPS60140310A (ja) 1983-12-28 1983-12-28 投影レンズ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6089986A Division JP2869849B2 (ja) 1994-04-27 1994-04-27 集積回路製造方法

Publications (2)

Publication Number Publication Date
JPH0334308A true JPH0334308A (ja) 1991-02-14
JPH0474855B2 JPH0474855B2 (enExample) 1992-11-27

Family

ID=18232045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1330388A Granted JPH0334308A (ja) 1989-12-19 1989-12-19 集積回路製造方法及び露光装置

Country Status (1)

Country Link
JP (1) JPH0334308A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5805113A (en) * 1995-01-31 1998-09-08 Ogino; Toshikazu Multiband antenna receiver system with, LNA, AMP, combiner, voltage regulator, splitter, noise filter and common single feeder
KR100237742B1 (ko) * 1996-06-29 2000-01-15 김영환 스텝퍼 리턱션 렌즈

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5805113A (en) * 1995-01-31 1998-09-08 Ogino; Toshikazu Multiband antenna receiver system with, LNA, AMP, combiner, voltage regulator, splitter, noise filter and common single feeder
KR100237742B1 (ko) * 1996-06-29 2000-01-15 김영환 스텝퍼 리턱션 렌즈

Also Published As

Publication number Publication date
JPH0474855B2 (enExample) 1992-11-27

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