JPH047446B2 - - Google Patents

Info

Publication number
JPH047446B2
JPH047446B2 JP58163494A JP16349483A JPH047446B2 JP H047446 B2 JPH047446 B2 JP H047446B2 JP 58163494 A JP58163494 A JP 58163494A JP 16349483 A JP16349483 A JP 16349483A JP H047446 B2 JPH047446 B2 JP H047446B2
Authority
JP
Japan
Prior art keywords
light
wavefront
measurement
shape
plane mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58163494A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6055213A (ja
Inventor
Toshio Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP58163494A priority Critical patent/JPS6055213A/ja
Publication of JPS6055213A publication Critical patent/JPS6055213A/ja
Publication of JPH047446B2 publication Critical patent/JPH047446B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP58163494A 1983-09-06 1983-09-06 波面形状測定装置 Granted JPS6055213A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58163494A JPS6055213A (ja) 1983-09-06 1983-09-06 波面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58163494A JPS6055213A (ja) 1983-09-06 1983-09-06 波面形状測定装置

Publications (2)

Publication Number Publication Date
JPS6055213A JPS6055213A (ja) 1985-03-30
JPH047446B2 true JPH047446B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-12

Family

ID=15774928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58163494A Granted JPS6055213A (ja) 1983-09-06 1983-09-06 波面形状測定装置

Country Status (1)

Country Link
JP (1) JPS6055213A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613443Y2 (ja) * 1985-04-22 1994-04-06 株式会社リコー 波面形状測定器
US4743118A (en) * 1985-04-04 1988-05-10 Ricoh Company, Ltd. Method of detecting origin of shear and measuring amount of shear in shearing interferometer systems
JPH02238306A (ja) * 1989-03-13 1990-09-20 Ricoh Co Ltd 微小変位測定装置
EP3055729A1 (en) * 2013-10-07 2016-08-17 Ramot at Tel-Aviv University Ltd. Polarization-independent differential interference contrast optical arrangement

Also Published As

Publication number Publication date
JPS6055213A (ja) 1985-03-30

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