JPH0472382B2 - - Google Patents

Info

Publication number
JPH0472382B2
JPH0472382B2 JP62123740A JP12374087A JPH0472382B2 JP H0472382 B2 JPH0472382 B2 JP H0472382B2 JP 62123740 A JP62123740 A JP 62123740A JP 12374087 A JP12374087 A JP 12374087A JP H0472382 B2 JPH0472382 B2 JP H0472382B2
Authority
JP
Japan
Prior art keywords
gate electrode
forming
shot
active layer
drain region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62123740A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323370A (ja
Inventor
Naoki Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12374087A priority Critical patent/JPS6323370A/ja
Publication of JPS6323370A publication Critical patent/JPS6323370A/ja
Publication of JPH0472382B2 publication Critical patent/JPH0472382B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP12374087A 1987-05-22 1987-05-22 半導体装置の製造方法 Granted JPS6323370A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12374087A JPS6323370A (ja) 1987-05-22 1987-05-22 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12374087A JPS6323370A (ja) 1987-05-22 1987-05-22 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55189544A Division JPS57113289A (en) 1980-12-30 1980-12-30 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS6323370A JPS6323370A (ja) 1988-01-30
JPH0472382B2 true JPH0472382B2 (en, 2012) 1992-11-18

Family

ID=14868160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12374087A Granted JPS6323370A (ja) 1987-05-22 1987-05-22 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6323370A (en, 2012)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2769162B2 (ja) * 1988-07-08 1998-06-25 富士通株式会社 Ｃａｄシステムにおける操作復元処理方式

Also Published As

Publication number Publication date
JPS6323370A (ja) 1988-01-30

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