JPH0472161B2 - - Google Patents
Info
- Publication number
- JPH0472161B2 JPH0472161B2 JP4759581A JP4759581A JPH0472161B2 JP H0472161 B2 JPH0472161 B2 JP H0472161B2 JP 4759581 A JP4759581 A JP 4759581A JP 4759581 A JP4759581 A JP 4759581A JP H0472161 B2 JPH0472161 B2 JP H0472161B2
- Authority
- JP
- Japan
- Prior art keywords
- hologram
- light
- optical
- interference fringes
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 81
- 238000006073 displacement reaction Methods 0.000 claims description 33
- 238000001514 detection method Methods 0.000 claims description 5
- 238000001093 holography Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 230000004907 flux Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 238000005210 holographic interferometry Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4759581A JPS57161606A (en) | 1981-03-31 | 1981-03-31 | Inline homogram displacement gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4759581A JPS57161606A (en) | 1981-03-31 | 1981-03-31 | Inline homogram displacement gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57161606A JPS57161606A (en) | 1982-10-05 |
| JPH0472161B2 true JPH0472161B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-11-17 |
Family
ID=12779594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4759581A Granted JPS57161606A (en) | 1981-03-31 | 1981-03-31 | Inline homogram displacement gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57161606A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6244607A (ja) * | 1985-08-22 | 1987-02-26 | Tokyo Optical Co Ltd | ホログラフイツク干渉計 |
| JPH04282414A (ja) * | 1991-03-12 | 1992-10-07 | Hitachi Zosen Corp | レーザビームの位置および角度制御装置 |
-
1981
- 1981-03-31 JP JP4759581A patent/JPS57161606A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57161606A (en) | 1982-10-05 |