JPH0471161B2 - - Google Patents
Info
- Publication number
- JPH0471161B2 JPH0471161B2 JP63169010A JP16901088A JPH0471161B2 JP H0471161 B2 JPH0471161 B2 JP H0471161B2 JP 63169010 A JP63169010 A JP 63169010A JP 16901088 A JP16901088 A JP 16901088A JP H0471161 B2 JPH0471161 B2 JP H0471161B2
- Authority
- JP
- Japan
- Prior art keywords
- pitch
- diffracted light
- width
- light
- average
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001427 coherent effect Effects 0.000 claims description 13
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000000691 measurement method Methods 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 description 15
- 238000005259 measurement Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16901088A JPS6426102A (en) | 1988-07-08 | 1988-07-08 | Shape measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16901088A JPS6426102A (en) | 1988-07-08 | 1988-07-08 | Shape measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426102A JPS6426102A (en) | 1989-01-27 |
| JPH0471161B2 true JPH0471161B2 (ko) | 1992-11-13 |
Family
ID=15878662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16901088A Granted JPS6426102A (en) | 1988-07-08 | 1988-07-08 | Shape measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426102A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE516501C2 (sv) * | 2000-05-18 | 2002-01-22 | Sandvik Ab | Verktygskoppling |
| JP4586260B2 (ja) * | 2000-11-14 | 2010-11-24 | 富士電機デバイステクノロジー株式会社 | ディスクリート・トラック方式の磁気記憶媒体の表面欠陥検査方法 |
| EP1965383A1 (en) * | 2007-03-02 | 2008-09-03 | Singulus Mastering B.V. | Diffraction order measurement |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5492286A (en) * | 1977-12-19 | 1979-07-21 | Rca Corp | Method of optically checking horizontal dimension of pattern |
-
1988
- 1988-07-08 JP JP16901088A patent/JPS6426102A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5492286A (en) * | 1977-12-19 | 1979-07-21 | Rca Corp | Method of optically checking horizontal dimension of pattern |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6426102A (en) | 1989-01-27 |
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