JPS6426102A - Shape measuring instrument - Google Patents

Shape measuring instrument

Info

Publication number
JPS6426102A
JPS6426102A JP16901088A JP16901088A JPS6426102A JP S6426102 A JPS6426102 A JP S6426102A JP 16901088 A JP16901088 A JP 16901088A JP 16901088 A JP16901088 A JP 16901088A JP S6426102 A JPS6426102 A JP S6426102A
Authority
JP
Japan
Prior art keywords
order
diffracted light
sample
diffraction
mean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16901088A
Other languages
Japanese (ja)
Other versions
JPH0471161B2 (en
Inventor
Hidekazu Sekizawa
Akito Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP16901088A priority Critical patent/JPS6426102A/en
Publication of JPS6426102A publication Critical patent/JPS6426102A/en
Publication of JPH0471161B2 publication Critical patent/JPH0471161B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To measure the mean value of the shape of a stamped pattern speedily with high accuracy by detecting diffracted light beams obtained by irradiating a sample with nearly coherent light and performing arithmetic operation by using their detection signals. CONSTITUTION:The coherent light emitted by a light source 13 is reflected by a half-mirror 14 to illuminate the sample 11. Then a photoelectric converter 15 detects the electric signal I0 of diffracted light of (0)th order and photoelectric converters 16 and 17 detect diffracted light I1 of 1st order and diffracted light I2 of 2nd order respectively. A signal processing computer 20 finds the angle of diffraction from the diffraction position signal of 1st order obtained by a position detector 18 and calculates the mean pitch of many grooves that the sample 11 has from the angle of diffraction. Then dividers 21 and 23 performs division among electric signals I0, I1, and I2 and the signal processing computer 20 find the mean width and depth of the grooves according to the division value.
JP16901088A 1988-07-08 1988-07-08 Shape measuring instrument Granted JPS6426102A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16901088A JPS6426102A (en) 1988-07-08 1988-07-08 Shape measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16901088A JPS6426102A (en) 1988-07-08 1988-07-08 Shape measuring instrument

Publications (2)

Publication Number Publication Date
JPS6426102A true JPS6426102A (en) 1989-01-27
JPH0471161B2 JPH0471161B2 (en) 1992-11-13

Family

ID=15878662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16901088A Granted JPS6426102A (en) 1988-07-08 1988-07-08 Shape measuring instrument

Country Status (1)

Country Link
JP (1) JPS6426102A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002148207A (en) * 2000-11-14 2002-05-22 Fuji Electric Co Ltd Apparatus for inspecting surface defect of magnetic storage medium of discrete track system
US20100136468A1 (en) * 2007-03-02 2010-06-03 Josephus Marinus Wijn Diffraction order measurement
JP4819284B2 (en) * 2000-05-18 2011-11-24 サンドビック インテレクチュアル プロパティー アクティエボラーグ Tool joint

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492286A (en) * 1977-12-19 1979-07-21 Rca Corp Method of optically checking horizontal dimension of pattern

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492286A (en) * 1977-12-19 1979-07-21 Rca Corp Method of optically checking horizontal dimension of pattern

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4819284B2 (en) * 2000-05-18 2011-11-24 サンドビック インテレクチュアル プロパティー アクティエボラーグ Tool joint
JP2002148207A (en) * 2000-11-14 2002-05-22 Fuji Electric Co Ltd Apparatus for inspecting surface defect of magnetic storage medium of discrete track system
US20100136468A1 (en) * 2007-03-02 2010-06-03 Josephus Marinus Wijn Diffraction order measurement

Also Published As

Publication number Publication date
JPH0471161B2 (en) 1992-11-13

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