JPS6426102A - Shape measuring instrument - Google Patents
Shape measuring instrumentInfo
- Publication number
- JPS6426102A JPS6426102A JP16901088A JP16901088A JPS6426102A JP S6426102 A JPS6426102 A JP S6426102A JP 16901088 A JP16901088 A JP 16901088A JP 16901088 A JP16901088 A JP 16901088A JP S6426102 A JPS6426102 A JP S6426102A
- Authority
- JP
- Japan
- Prior art keywords
- order
- diffracted light
- sample
- diffraction
- mean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To measure the mean value of the shape of a stamped pattern speedily with high accuracy by detecting diffracted light beams obtained by irradiating a sample with nearly coherent light and performing arithmetic operation by using their detection signals. CONSTITUTION:The coherent light emitted by a light source 13 is reflected by a half-mirror 14 to illuminate the sample 11. Then a photoelectric converter 15 detects the electric signal I0 of diffracted light of (0)th order and photoelectric converters 16 and 17 detect diffracted light I1 of 1st order and diffracted light I2 of 2nd order respectively. A signal processing computer 20 finds the angle of diffraction from the diffraction position signal of 1st order obtained by a position detector 18 and calculates the mean pitch of many grooves that the sample 11 has from the angle of diffraction. Then dividers 21 and 23 performs division among electric signals I0, I1, and I2 and the signal processing computer 20 find the mean width and depth of the grooves according to the division value.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16901088A JPS6426102A (en) | 1988-07-08 | 1988-07-08 | Shape measuring instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16901088A JPS6426102A (en) | 1988-07-08 | 1988-07-08 | Shape measuring instrument |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6426102A true JPS6426102A (en) | 1989-01-27 |
JPH0471161B2 JPH0471161B2 (en) | 1992-11-13 |
Family
ID=15878662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16901088A Granted JPS6426102A (en) | 1988-07-08 | 1988-07-08 | Shape measuring instrument |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6426102A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002148207A (en) * | 2000-11-14 | 2002-05-22 | Fuji Electric Co Ltd | Apparatus for inspecting surface defect of magnetic storage medium of discrete track system |
US20100136468A1 (en) * | 2007-03-02 | 2010-06-03 | Josephus Marinus Wijn | Diffraction order measurement |
JP4819284B2 (en) * | 2000-05-18 | 2011-11-24 | サンドビック インテレクチュアル プロパティー アクティエボラーグ | Tool joint |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5492286A (en) * | 1977-12-19 | 1979-07-21 | Rca Corp | Method of optically checking horizontal dimension of pattern |
-
1988
- 1988-07-08 JP JP16901088A patent/JPS6426102A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5492286A (en) * | 1977-12-19 | 1979-07-21 | Rca Corp | Method of optically checking horizontal dimension of pattern |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4819284B2 (en) * | 2000-05-18 | 2011-11-24 | サンドビック インテレクチュアル プロパティー アクティエボラーグ | Tool joint |
JP2002148207A (en) * | 2000-11-14 | 2002-05-22 | Fuji Electric Co Ltd | Apparatus for inspecting surface defect of magnetic storage medium of discrete track system |
US20100136468A1 (en) * | 2007-03-02 | 2010-06-03 | Josephus Marinus Wijn | Diffraction order measurement |
Also Published As
Publication number | Publication date |
---|---|
JPH0471161B2 (en) | 1992-11-13 |
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