JPS632324B2 - - Google Patents

Info

Publication number
JPS632324B2
JPS632324B2 JP13772780A JP13772780A JPS632324B2 JP S632324 B2 JPS632324 B2 JP S632324B2 JP 13772780 A JP13772780 A JP 13772780A JP 13772780 A JP13772780 A JP 13772780A JP S632324 B2 JPS632324 B2 JP S632324B2
Authority
JP
Japan
Prior art keywords
light
reflected
mirror
flatness
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13772780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5763408A (en
Inventor
Yukio Kenbo
Nobuyuki Akyama
Yasuo Nakagawa
Kazushi Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13772780A priority Critical patent/JPS5763408A/ja
Publication of JPS5763408A publication Critical patent/JPS5763408A/ja
Publication of JPS632324B2 publication Critical patent/JPS632324B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13772780A 1980-10-03 1980-10-03 Flatness detector Granted JPS5763408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13772780A JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13772780A JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Publications (2)

Publication Number Publication Date
JPS5763408A JPS5763408A (en) 1982-04-16
JPS632324B2 true JPS632324B2 (ko) 1988-01-18

Family

ID=15205409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13772780A Granted JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Country Status (1)

Country Link
JP (1) JPS5763408A (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4681451A (en) * 1986-02-28 1987-07-21 Polaroid Corporation Optical proximity imaging method and apparatus
CN104567748B (zh) * 2013-10-14 2018-06-01 上海金艺检测技术有限公司 狭小缝隙直线度与平面度的测量方法
CN106605121A (zh) * 2016-11-19 2017-04-26 弗埃斯工业技术（苏州）有限公司 一种用于笔记本主机上盖的平面度测量装置
CN107462185B (zh) * 2017-08-23 2019-10-01 长春长光精密仪器集团有限公司 实现超大口径平面镜面形检测的装置
CN109108096B (zh) * 2018-08-20 2020-03-10 山西太钢不锈钢股份有限公司 一种热轧平整机组激光板形监测方法及其系统

Also Published As

Publication number Publication date
JPS5763408A (en) 1982-04-16

Similar Documents

Publication Publication Date Title
US7095508B2 (en) Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces
US6252667B1 (en) Interferometer having a dynamic beam steering assembly
US6878916B2 (en) Method for focus detection for optically detecting deviation of the image plane of a projection lens from the upper surface of a substrate, and an imaging system with a focus-detection system
JP3249154B2 (ja) 近接リソグラフィックシステムにおける横位置測定装置及びその方法
US6882430B2 (en) Spatial filtering in interferometry
KR20090113895A (ko) 유리시트의 결함 측정장치
KR20100134609A (ko) 물체의 표면 형태를 측정하기 위한 장치 및 방법
JPS5999304A (ja) 顕微鏡系のレーザ光による比較測長装置
US7310152B2 (en) Interferometer assemblies having reduced cyclic errors and system using the interferometer assemblies
JP2008083059A (ja) ウェーハの測定システム及び測定装置
JP4469604B2 (ja) 光学干渉分光法
CN1700101B (zh) 用于投影光刻机的调焦调平传感器
US4932781A (en) Gap measuring apparatus using interference fringes of reflected light
US4626103A (en) Focus tracking system
JPH043806B2 (ko)
US20060066873A1 (en) Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces
JPS632324B2 (ko)
US11927891B2 (en) Apparatus and methods for determining the position of a target structure on a substrate
US4429992A (en) Method and device for testing optical imaging systems
JPS5979104A (ja) 光学装置
JPH09153452A (ja) 投影露光装置
JPH09171954A (ja) 位置測定装置
JPS6151241B2 (ko)
JP3305058B2 (ja) 露光方法及び装置
JP3127718B2 (ja) 位置合わせ方法及びｘ線露光用マスク