JPS5763408A - Flatness detector - Google Patents

Flatness detector

Info

Publication number
JPS5763408A
JPS5763408A JP13772780A JP13772780A JPS5763408A JP S5763408 A JPS5763408 A JP S5763408A JP 13772780 A JP13772780 A JP 13772780A JP 13772780 A JP13772780 A JP 13772780A JP S5763408 A JPS5763408 A JP S5763408A
Authority
JP
Japan
Prior art keywords
wafer
flat glass
interference
over
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13772780A
Other languages
Japanese (ja)
Other versions
JPS632324B2 (en
Inventor
Yukio Kenbo
Nobuyuki Akiyama
Yasuo Nakagawa
Kazushi Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13772780A priority Critical patent/JPS5763408A/en
Publication of JPS5763408A publication Critical patent/JPS5763408A/en
Publication of JPS632324B2 publication Critical patent/JPS632324B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Abstract

PURPOSE:To enable the precise measurement of flatness over the total area, by a method wherein a wafer is irradiated with monochromatic light over a total longitudinal length at a limited lateral width from the surface of a flat transmparent substance placed in the proximity of the surface to be measured to detect an interference fringe, and with this a table is moved in the direction of the lateral width. CONSTITUTION:A flat glass 21 is secured in a manner to have a slight gap between the flat glass and a wafer 6 on a wafer chuck 11, a table 24, which can elongate in a longitudinal direction and move in a lateral direction, is placed thereon, and a reflection mirror 20 and a linear sensor 22 are mounted at the opposite ends thereof. The wafer 6 is irradiated with a parallel light from a monochromatic light source, e.g., a laser oscillator, via the reflection mirror 20 and the flat glass 21. An incident light produces an interference between a reference surface 7 of the flat glass 21 and the surface of the wafer 6, and the linear sensor 22 detects the interference to indicate a full line in a frame 23 of an after-glowing cathode-ray tube. A motor 25 moves the table 24 from one end to the other end, and a signal 26, synchronizing with the rotation angle of the motor, moves the frame 23 to observe the whole area. This reduces a size of an optical system and permits the precise detection over the whole area and building of a detector into an aligner.
JP13772780A 1980-10-03 1980-10-03 Flatness detector Granted JPS5763408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13772780A JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13772780A JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Publications (2)

Publication Number Publication Date
JPS5763408A true JPS5763408A (en) 1982-04-16
JPS632324B2 JPS632324B2 (en) 1988-01-18

Family

ID=15205409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13772780A Granted JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Country Status (1)

Country Link
JP (1) JPS5763408A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225904A (en) * 1986-02-28 1987-10-03 ポラロイド　コ−ポレ−シヨン Method and device for forming picture of fine interval between transparent body surface and another surface
CN104567748A (en) * 2013-10-14 2015-04-29 上海金艺检测技术有限公司 Auxiliary device and measurement method for measuring linearity and planeness of narrow gap
CN107462185A (en) * 2017-08-23 2017-12-12 长春长光精密仪器集团有限公司 Realize the device of super large caliber level crossing surface testing
WO2018090347A1 (en) * 2016-11-19 2018-05-24 弗埃斯工业技术（苏州）有限公司 Flatness measuring device for use on upper cover of notebook host
CN109108096A (en) * 2018-08-20 2019-01-01 山西太钢不锈钢股份有限公司 A kind of hot-rolled leveling unit Laser Slabs shape monitoring method and its system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225904A (en) * 1986-02-28 1987-10-03 ポラロイド　コ−ポレ−シヨン Method and device for forming picture of fine interval between transparent body surface and another surface
CN104567748A (en) * 2013-10-14 2015-04-29 上海金艺检测技术有限公司 Auxiliary device and measurement method for measuring linearity and planeness of narrow gap
WO2018090347A1 (en) * 2016-11-19 2018-05-24 弗埃斯工业技术（苏州）有限公司 Flatness measuring device for use on upper cover of notebook host
CN107462185A (en) * 2017-08-23 2017-12-12 长春长光精密仪器集团有限公司 Realize the device of super large caliber level crossing surface testing
CN107462185B (en) * 2017-08-23 2019-10-01 长春长光精密仪器集团有限公司 Realize the device of super large caliber plane mirror surface testing
CN109108096A (en) * 2018-08-20 2019-01-01 山西太钢不锈钢股份有限公司 A kind of hot-rolled leveling unit Laser Slabs shape monitoring method and its system

Also Published As

Publication number Publication date
JPS632324B2 (en) 1988-01-18

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