JPH047095B2 - - Google Patents

Info

Publication number
JPH047095B2
JPH047095B2 JP16301481A JP16301481A JPH047095B2 JP H047095 B2 JPH047095 B2 JP H047095B2 JP 16301481 A JP16301481 A JP 16301481A JP 16301481 A JP16301481 A JP 16301481A JP H047095 B2 JPH047095 B2 JP H047095B2
Authority
JP
Japan
Prior art keywords
etching
etched
taper
photoresist
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16301481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5864032A (ja
Inventor
Masato Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP16301481A priority Critical patent/JPS5864032A/ja
Publication of JPS5864032A publication Critical patent/JPS5864032A/ja
Publication of JPH047095B2 publication Critical patent/JPH047095B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
JP16301481A 1981-10-13 1981-10-13 半導体装置の製造方法 Granted JPS5864032A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16301481A JPS5864032A (ja) 1981-10-13 1981-10-13 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16301481A JPS5864032A (ja) 1981-10-13 1981-10-13 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5864032A JPS5864032A (ja) 1983-04-16
JPH047095B2 true JPH047095B2 (enrdf_load_stackoverflow) 1992-02-07

Family

ID=15765550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16301481A Granted JPS5864032A (ja) 1981-10-13 1981-10-13 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5864032A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234548A (ja) * 1987-03-24 1988-09-29 Oki Electric Ind Co Ltd 半導体素子の製造方法
JPH0655364U (ja) * 1993-01-08 1994-08-02 第一精工株式会社 釣り用パイプ天秤

Also Published As

Publication number Publication date
JPS5864032A (ja) 1983-04-16

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