JPH046818Y2 - - Google Patents
Info
- Publication number
- JPH046818Y2 JPH046818Y2 JP155187U JP155187U JPH046818Y2 JP H046818 Y2 JPH046818 Y2 JP H046818Y2 JP 155187 U JP155187 U JP 155187U JP 155187 U JP155187 U JP 155187U JP H046818 Y2 JPH046818 Y2 JP H046818Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- wind guide
- pure water
- clean room
- guide plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 13
- 230000003749 cleanliness Effects 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004887 air purification Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Separation Of Particles Using Liquids (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP155187U JPH046818Y2 (enrdf_load_stackoverflow) | 1987-01-08 | 1987-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP155187U JPH046818Y2 (enrdf_load_stackoverflow) | 1987-01-08 | 1987-01-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63111920U JPS63111920U (enrdf_load_stackoverflow) | 1988-07-19 |
| JPH046818Y2 true JPH046818Y2 (enrdf_load_stackoverflow) | 1992-02-25 |
Family
ID=30779564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP155187U Expired JPH046818Y2 (enrdf_load_stackoverflow) | 1987-01-08 | 1987-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH046818Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5054354B2 (ja) * | 2005-11-11 | 2012-10-24 | 一般財団法人電力中央研究所 | 空気処理装置及び方法 |
-
1987
- 1987-01-08 JP JP155187U patent/JPH046818Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63111920U (enrdf_load_stackoverflow) | 1988-07-19 |
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