JPH0464024B2 - - Google Patents

Info

Publication number
JPH0464024B2
JPH0464024B2 JP57093667A JP9366782A JPH0464024B2 JP H0464024 B2 JPH0464024 B2 JP H0464024B2 JP 57093667 A JP57093667 A JP 57093667A JP 9366782 A JP9366782 A JP 9366782A JP H0464024 B2 JPH0464024 B2 JP H0464024B2
Authority
JP
Japan
Prior art keywords
ray
peak
detected
characteristic
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57093667A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58210556A (ja
Inventor
Masao Kawai
Fukuo Zenitani
Juji Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP57093667A priority Critical patent/JPS58210556A/ja
Publication of JPS58210556A publication Critical patent/JPS58210556A/ja
Publication of JPH0464024B2 publication Critical patent/JPH0464024B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2209—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/079—Investigating materials by wave or particle radiation secondary emission incident electron beam and measuring excited X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/302—Accessories, mechanical or electrical features comparative arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57093667A 1982-05-31 1982-05-31 Ｘ線分光分析装置 Granted JPS58210556A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57093667A JPS58210556A (ja) 1982-05-31 1982-05-31 Ｘ線分光分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57093667A JPS58210556A (ja) 1982-05-31 1982-05-31 Ｘ線分光分析装置

Publications (2)

Publication Number Publication Date
JPS58210556A JPS58210556A (ja) 1983-12-07
JPH0464024B2 true JPH0464024B2 (OSRAM) 1992-10-13

Family

ID=14088743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57093667A Granted JPS58210556A (ja) 1982-05-31 1982-05-31 Ｘ線分光分析装置

Country Status (1)

Country Link
JP (1) JPS58210556A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0678997B2 (ja) * 1983-12-26 1994-10-05 株式会社島津製作所 エレクトロンプローブマイクロアナライザによる定性分析方法
JPH0678998B2 (ja) * 1983-12-26 1994-10-05 株式会社島津製作所 定性分析装置
JPS623652A (ja) * 1985-06-28 1987-01-09 Shimadzu Corp Ｘ線分光法による定性分析方式
JPH07113616B2 (ja) * 1986-01-16 1995-12-06 日本電子株式会社 Ｘ線マイクロアナライザの波長表検索方法
JPS62165144A (ja) * 1986-01-16 1987-07-21 Jeol Ltd Ｘ線マイクロアナライザの波長表検索方法
JPH07104298B2 (ja) * 1988-06-16 1995-11-13 株式会社島津製作所 Ｘ線分光分析におけるデータ処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081387A (OSRAM) * 1973-11-20 1975-07-02

Also Published As

Publication number Publication date
JPS58210556A (ja) 1983-12-07

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