JPH0463975B2 - - Google Patents
Info
- Publication number
- JPH0463975B2 JPH0463975B2 JP20776588A JP20776588A JPH0463975B2 JP H0463975 B2 JPH0463975 B2 JP H0463975B2 JP 20776588 A JP20776588 A JP 20776588A JP 20776588 A JP20776588 A JP 20776588A JP H0463975 B2 JPH0463975 B2 JP H0463975B2
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- clean room
- clean
- air
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 3
- 229910021642 ultra pure water Inorganic materials 0.000 description 12
- 239000012498 ultrapure water Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000007921 spray Substances 0.000 description 7
- 230000001276 controlling effect Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20776588A JPH0257844A (ja) | 1988-08-22 | 1988-08-22 | クリーンルームの湿度制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20776588A JPH0257844A (ja) | 1988-08-22 | 1988-08-22 | クリーンルームの湿度制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257844A JPH0257844A (ja) | 1990-02-27 |
| JPH0463975B2 true JPH0463975B2 (enrdf_load_stackoverflow) | 1992-10-13 |
Family
ID=16545171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20776588A Granted JPH0257844A (ja) | 1988-08-22 | 1988-08-22 | クリーンルームの湿度制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257844A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0672445B1 (en) | 1992-12-02 | 1998-03-25 | Ebara Corporation | Method and apparatus for preventing contamination of substrate or substrate surface |
| JPH0745603A (ja) * | 1993-07-27 | 1995-02-14 | Shin Etsu Handotai Co Ltd | 半導体装置の製造方法及びその製造工程の管理方法 |
| JP3808237B2 (ja) * | 1999-05-14 | 2006-08-09 | 高砂熱学工業株式会社 | 空調用加湿方法及び加湿装置 |
| JP5597602B2 (ja) * | 2011-07-25 | 2014-10-01 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及びその基板処理方法を実行させるためのプログラムを記録した記憶媒体 |
-
1988
- 1988-08-22 JP JP20776588A patent/JPH0257844A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0257844A (ja) | 1990-02-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |