JPH0463270B2 - - Google Patents

Info

Publication number
JPH0463270B2
JPH0463270B2 JP59247936A JP24793684A JPH0463270B2 JP H0463270 B2 JPH0463270 B2 JP H0463270B2 JP 59247936 A JP59247936 A JP 59247936A JP 24793684 A JP24793684 A JP 24793684A JP H0463270 B2 JPH0463270 B2 JP H0463270B2
Authority
JP
Japan
Prior art keywords
annular
bellows
thin plate
gate valve
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59247936A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61127987A (ja
Inventor
Kenzaburo Sugizaki
Mutsuro Onoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Bellows Co Ltd
Original Assignee
Fuji Bellows Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Bellows Co Ltd filed Critical Fuji Bellows Co Ltd
Priority to JP24793684A priority Critical patent/JPS61127987A/ja
Publication of JPS61127987A publication Critical patent/JPS61127987A/ja
Publication of JPH0463270B2 publication Critical patent/JPH0463270B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP24793684A 1984-11-26 1984-11-26 真空用バルブのシ−ル装置 Granted JPS61127987A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24793684A JPS61127987A (ja) 1984-11-26 1984-11-26 真空用バルブのシ−ル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24793684A JPS61127987A (ja) 1984-11-26 1984-11-26 真空用バルブのシ−ル装置

Publications (2)

Publication Number Publication Date
JPS61127987A JPS61127987A (ja) 1986-06-16
JPH0463270B2 true JPH0463270B2 (OSRAM) 1992-10-09

Family

ID=17170753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24793684A Granted JPS61127987A (ja) 1984-11-26 1984-11-26 真空用バルブのシ−ル装置

Country Status (1)

Country Link
JP (1) JPS61127987A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754156B2 (ja) * 1989-02-04 1995-06-07 日電アネルバ株式会社 真空装置用ゲートバルブ
JPH03239884A (ja) * 1990-02-16 1991-10-25 Kishikawa Tokushu Valve Seisakusho:Kk 超高真空ゲート弁
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119534U (OSRAM) * 1976-03-10 1977-09-10
JPS57114065A (en) * 1980-12-29 1982-07-15 Osaka Shinku Kiki Seisakusho:Kk Gate valve

Also Published As

Publication number Publication date
JPS61127987A (ja) 1986-06-16

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