JPH0462349B2 - - Google Patents

Info

Publication number
JPH0462349B2
JPH0462349B2 JP60002135A JP213585A JPH0462349B2 JP H0462349 B2 JPH0462349 B2 JP H0462349B2 JP 60002135 A JP60002135 A JP 60002135A JP 213585 A JP213585 A JP 213585A JP H0462349 B2 JPH0462349 B2 JP H0462349B2
Authority
JP
Japan
Prior art keywords
rail
unit
socket
shuttle rail
cam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60002135A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61161464A (ja
Inventor
Hideaki Nagatsuka
Toshio Unoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60002135A priority Critical patent/JPS61161464A/ja
Publication of JPS61161464A publication Critical patent/JPS61161464A/ja
Publication of JPH0462349B2 publication Critical patent/JPH0462349B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP60002135A 1985-01-11 1985-01-11 Ｉｃ測定ユニツト Granted JPS61161464A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60002135A JPS61161464A (ja) 1985-01-11 1985-01-11 Ｉｃ測定ユニツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60002135A JPS61161464A (ja) 1985-01-11 1985-01-11 Ｉｃ測定ユニツト

Publications (2)

Publication Number Publication Date
JPS61161464A JPS61161464A (ja) 1986-07-22
JPH0462349B2 true JPH0462349B2 (enExample) 1992-10-06

Family

ID=11520891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60002135A Granted JPS61161464A (ja) 1985-01-11 1985-01-11 Ｉｃ測定ユニツト

Country Status (1)

Country Link
JP (1) JPS61161464A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04282471A (ja) * 1991-03-08 1992-10-07 Nec Kyushu Ltd 半導体集積回路測定装置

Also Published As

Publication number Publication date
JPS61161464A (ja) 1986-07-22

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