JPH0461251B2 - - Google Patents
Info
- Publication number
- JPH0461251B2 JPH0461251B2 JP59242482A JP24248284A JPH0461251B2 JP H0461251 B2 JPH0461251 B2 JP H0461251B2 JP 59242482 A JP59242482 A JP 59242482A JP 24248284 A JP24248284 A JP 24248284A JP H0461251 B2 JPH0461251 B2 JP H0461251B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean
- circulation path
- air circulation
- dry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 239000012267 brine Substances 0.000 description 7
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 7
- 238000001816 cooling Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000007791 dehumidification Methods 0.000 description 2
- 239000003230 hygroscopic agent Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 238000010257 thawing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59242482A JPS61122433A (ja) | 1984-11-19 | 1984-11-19 | クリ−ンドライベンチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59242482A JPS61122433A (ja) | 1984-11-19 | 1984-11-19 | クリ−ンドライベンチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61122433A JPS61122433A (ja) | 1986-06-10 |
| JPH0461251B2 true JPH0461251B2 (ru) | 1992-09-30 |
Family
ID=17089741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59242482A Granted JPS61122433A (ja) | 1984-11-19 | 1984-11-19 | クリ−ンドライベンチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61122433A (ru) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63148040A (ja) * | 1986-12-10 | 1988-06-20 | Sanki Eng Co Ltd | クリ−ンベンチの清浄方法 |
| FR2622960B1 (fr) * | 1987-11-16 | 1990-03-23 | Bardet Guy | Unite de production de flux laminaire sterile a circulation verticale |
| JPH03106703A (ja) * | 1989-09-18 | 1991-05-07 | Daifuku Co Ltd | 荷保管装置 |
| JP3460532B2 (ja) * | 1997-09-24 | 2003-10-27 | ダイキン工業株式会社 | 低湿度作業装置 |
| US6966364B1 (en) | 1999-02-12 | 2005-11-22 | Asml Holding N.V. | Systems and methods for controlling local environment |
| JP2010007954A (ja) * | 2008-06-26 | 2010-01-14 | Toyo Eng Works Ltd | 除湿空調装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5795536A (en) * | 1980-12-05 | 1982-06-14 | Takasago Thermal Eng Co Lts | Apparatus for preparing work environment for manufacturing integrated circuits or the like |
| JPS5846U (ja) * | 1981-06-26 | 1983-01-05 | 株式会社日立製作所 | 自動車電話機の照明制御装置 |
| JPS5969919A (ja) * | 1982-10-15 | 1984-04-20 | Yamato Scient Co Ltd | クリ−ンベンチの風速制御装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5477061U (ru) * | 1977-11-11 | 1979-06-01 | ||
| JPS59135133U (ja) * | 1983-02-26 | 1984-09-10 | 株式会社大氣社 | 隔離作業用キヤビネツト |
-
1984
- 1984-11-19 JP JP59242482A patent/JPS61122433A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5795536A (en) * | 1980-12-05 | 1982-06-14 | Takasago Thermal Eng Co Lts | Apparatus for preparing work environment for manufacturing integrated circuits or the like |
| JPS5846U (ja) * | 1981-06-26 | 1983-01-05 | 株式会社日立製作所 | 自動車電話機の照明制御装置 |
| JPS5969919A (ja) * | 1982-10-15 | 1984-04-20 | Yamato Scient Co Ltd | クリ−ンベンチの風速制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61122433A (ja) | 1986-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |