JPH0461251B2 - - Google Patents

Info

Publication number
JPH0461251B2
JPH0461251B2 JP59242482A JP24248284A JPH0461251B2 JP H0461251 B2 JPH0461251 B2 JP H0461251B2 JP 59242482 A JP59242482 A JP 59242482A JP 24248284 A JP24248284 A JP 24248284A JP H0461251 B2 JPH0461251 B2 JP H0461251B2
Authority
JP
Japan
Prior art keywords
air
clean
circulation path
air circulation
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59242482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61122433A (ja
Inventor
Takaki Yoshida
Toshio Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP59242482A priority Critical patent/JPS61122433A/ja
Publication of JPS61122433A publication Critical patent/JPS61122433A/ja
Publication of JPH0461251B2 publication Critical patent/JPH0461251B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP59242482A 1984-11-19 1984-11-19 クリ−ンドライベンチ Granted JPS61122433A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59242482A JPS61122433A (ja) 1984-11-19 1984-11-19 クリ−ンドライベンチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59242482A JPS61122433A (ja) 1984-11-19 1984-11-19 クリ−ンドライベンチ

Publications (2)

Publication Number Publication Date
JPS61122433A JPS61122433A (ja) 1986-06-10
JPH0461251B2 true JPH0461251B2 (cs) 1992-09-30

Family

ID=17089741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59242482A Granted JPS61122433A (ja) 1984-11-19 1984-11-19 クリ−ンドライベンチ

Country Status (1)

Country Link
JP (1) JPS61122433A (cs)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148040A (ja) * 1986-12-10 1988-06-20 Sanki Eng Co Ltd クリ−ンベンチの清浄方法
FR2622960B1 (fr) * 1987-11-16 1990-03-23 Bardet Guy Unite de production de flux laminaire sterile a circulation verticale
JPH03106703A (ja) * 1989-09-18 1991-05-07 Daifuku Co Ltd 荷保管装置
JP3460532B2 (ja) * 1997-09-24 2003-10-27 ダイキン工業株式会社 低湿度作業装置
US6966364B1 (en) 1999-02-12 2005-11-22 Asml Holding N.V. Systems and methods for controlling local environment
JP2010007954A (ja) * 2008-06-26 2010-01-14 Toyo Eng Works Ltd 除湿空調装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5477061U (cs) * 1977-11-11 1979-06-01
JPS5795536A (en) * 1980-12-05 1982-06-14 Takasago Thermal Eng Co Lts Apparatus for preparing work environment for manufacturing integrated circuits or the like
JPS5846U (ja) * 1981-06-26 1983-01-05 株式会社日立製作所 自動車電話機の照明制御装置
JPS5969919A (ja) * 1982-10-15 1984-04-20 Yamato Scient Co Ltd クリ−ンベンチの風速制御装置
JPS59135133U (ja) * 1983-02-26 1984-09-10 株式会社大氣社 隔離作業用キヤビネツト

Also Published As

Publication number Publication date
JPS61122433A (ja) 1986-06-10

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Legal Events

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