JPH0460934B2 - - Google Patents

Info

Publication number
JPH0460934B2
JPH0460934B2 JP62282528A JP28252887A JPH0460934B2 JP H0460934 B2 JPH0460934 B2 JP H0460934B2 JP 62282528 A JP62282528 A JP 62282528A JP 28252887 A JP28252887 A JP 28252887A JP H0460934 B2 JPH0460934 B2 JP H0460934B2
Authority
JP
Japan
Prior art keywords
quartz glass
strain
furnace core
core tube
nuclei
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62282528A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01126238A (ja
Inventor
Kyoichi Inagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP28252887A priority Critical patent/JPH01126238A/ja
Publication of JPH01126238A publication Critical patent/JPH01126238A/ja
Publication of JPH0460934B2 publication Critical patent/JPH0460934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
JP28252887A 1987-11-09 1987-11-09 石英ガラス炉芯管 Granted JPH01126238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28252887A JPH01126238A (ja) 1987-11-09 1987-11-09 石英ガラス炉芯管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28252887A JPH01126238A (ja) 1987-11-09 1987-11-09 石英ガラス炉芯管

Publications (2)

Publication Number Publication Date
JPH01126238A JPH01126238A (ja) 1989-05-18
JPH0460934B2 true JPH0460934B2 (enrdf_load_stackoverflow) 1992-09-29

Family

ID=17653631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28252887A Granted JPH01126238A (ja) 1987-11-09 1987-11-09 石英ガラス炉芯管

Country Status (1)

Country Link
JP (1) JPH01126238A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096857A (en) * 1990-10-22 1992-03-17 E. I. Du Pont De Nemours And Company Chemically stabilized cristobalite
WO1996026908A1 (en) * 1995-02-28 1996-09-06 Heraeus Quarzglas Gmbh Cristobalite-contained silica glass, method of producing same and silica glass jig made of same
US7118789B2 (en) 2001-07-16 2006-10-10 Heraeus Shin-Etsu America Silica glass crucible
US6641663B2 (en) 2001-12-12 2003-11-04 Heracus Shin-Estu America Silica crucible with inner layer crystallizer and method
US6875515B2 (en) * 2002-05-10 2005-04-05 General Electric Company Fused quartz article having controlled devitrification
JP5050363B2 (ja) * 2005-08-12 2012-10-17 株式会社Ｓｕｍｃｏ 半導体シリコン基板用熱処理治具およびその製作方法
US7427327B2 (en) 2005-09-08 2008-09-23 Heraeus Shin-Etsu America, Inc. Silica glass crucible with barium-doped inner wall
US7383696B2 (en) 2005-09-08 2008-06-10 Heraeus Shin-Etsu America, Inc. Silica glass crucible with bubble-free and reduced bubble growth wall

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2038564C3 (de) * 1970-08-04 1973-09-13 Heraeus Schott Quarzschmelze Gmbh, 6450 Hanau Quarzglasgeräteteil, insbesondere Quarzglasrohr, mit in seiner Außenoberflächenschicht enthaltenen, Kristallbildung fördernden Keimen zur Verwendung bei hohen Temperaturen, insbesondere für die Durchführung halbleitertechnologischer Verfahren
DE2530808A1 (de) * 1975-07-10 1977-01-27 Bayer Ag Chrom- und/oder mangan-modifiziertes quarzglas bzw. cristobalit, insbesondere fuer die herstellung von fasern

Also Published As

Publication number Publication date
JPH01126238A (ja) 1989-05-18

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