JPH01126238A - 石英ガラス炉芯管 - Google Patents

石英ガラス炉芯管

Info

Publication number
JPH01126238A
JPH01126238A JP28252887A JP28252887A JPH01126238A JP H01126238 A JPH01126238 A JP H01126238A JP 28252887 A JP28252887 A JP 28252887A JP 28252887 A JP28252887 A JP 28252887A JP H01126238 A JPH01126238 A JP H01126238A
Authority
JP
Japan
Prior art keywords
quartz glass
strain
nuclei
glass member
cristobalite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28252887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0460934B2 (enrdf_load_stackoverflow
Inventor
Kyoichi Inagi
恭一 稲木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP28252887A priority Critical patent/JPH01126238A/ja
Publication of JPH01126238A publication Critical patent/JPH01126238A/ja
Publication of JPH0460934B2 publication Critical patent/JPH0460934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
JP28252887A 1987-11-09 1987-11-09 石英ガラス炉芯管 Granted JPH01126238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28252887A JPH01126238A (ja) 1987-11-09 1987-11-09 石英ガラス炉芯管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28252887A JPH01126238A (ja) 1987-11-09 1987-11-09 石英ガラス炉芯管

Publications (2)

Publication Number Publication Date
JPH01126238A true JPH01126238A (ja) 1989-05-18
JPH0460934B2 JPH0460934B2 (enrdf_load_stackoverflow) 1992-09-29

Family

ID=17653631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28252887A Granted JPH01126238A (ja) 1987-11-09 1987-11-09 石英ガラス炉芯管

Country Status (1)

Country Link
JP (1) JPH01126238A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04292440A (ja) * 1990-10-22 1992-10-16 E I Du Pont De Nemours & Co 化学的に安定化されたクリストバライト
WO1996026908A1 (en) * 1995-02-28 1996-09-06 Heraeus Quarzglas Gmbh Cristobalite-contained silica glass, method of producing same and silica glass jig made of same
US6641663B2 (en) 2001-12-12 2003-11-04 Heracus Shin-Estu America Silica crucible with inner layer crystallizer and method
JP2005525284A (ja) * 2002-05-10 2005-08-25 ゼネラル・エレクトリック・カンパニイ 失透の制御された溶融石英物品
US7118789B2 (en) 2001-07-16 2006-10-10 Heraeus Shin-Etsu America Silica glass crucible
JP2007073923A (ja) * 2005-08-12 2007-03-22 Sumco Corp 半導体シリコン基板用熱処理治具およびその製作方法
US7383696B2 (en) 2005-09-08 2008-06-10 Heraeus Shin-Etsu America, Inc. Silica glass crucible with bubble-free and reduced bubble growth wall
US7427327B2 (en) 2005-09-08 2008-09-23 Heraeus Shin-Etsu America, Inc. Silica glass crucible with barium-doped inner wall

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2038564A1 (de) * 1970-08-04 1972-02-10 Heraeus Schott Quarzsehmelze G Quarzglasgeraeteteil
JPS5210312A (en) * 1975-07-10 1977-01-26 Bayer Ag Heattstable silica glass

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2038564A1 (de) * 1970-08-04 1972-02-10 Heraeus Schott Quarzsehmelze G Quarzglasgeraeteteil
US3772134A (en) * 1970-08-04 1973-11-13 Heraeus Schott Quarzschmelze Quartz glass elements
JPS5210312A (en) * 1975-07-10 1977-01-26 Bayer Ag Heattstable silica glass

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04292440A (ja) * 1990-10-22 1992-10-16 E I Du Pont De Nemours & Co 化学的に安定化されたクリストバライト
WO1996026908A1 (en) * 1995-02-28 1996-09-06 Heraeus Quarzglas Gmbh Cristobalite-contained silica glass, method of producing same and silica glass jig made of same
EP0854116A3 (en) * 1995-02-28 1999-01-07 Heraeus Quarzglas GmbH Cristobalite-contained silica glass, and silica glass jig made of same
US5876473A (en) * 1995-02-28 1999-03-02 Inaki; Kyoichi Method of producing cristobalite containing silica glass
US7118789B2 (en) 2001-07-16 2006-10-10 Heraeus Shin-Etsu America Silica glass crucible
US6641663B2 (en) 2001-12-12 2003-11-04 Heracus Shin-Estu America Silica crucible with inner layer crystallizer and method
JP2005525284A (ja) * 2002-05-10 2005-08-25 ゼネラル・エレクトリック・カンパニイ 失透の制御された溶融石英物品
JP2007073923A (ja) * 2005-08-12 2007-03-22 Sumco Corp 半導体シリコン基板用熱処理治具およびその製作方法
US7383696B2 (en) 2005-09-08 2008-06-10 Heraeus Shin-Etsu America, Inc. Silica glass crucible with bubble-free and reduced bubble growth wall
US7427327B2 (en) 2005-09-08 2008-09-23 Heraeus Shin-Etsu America, Inc. Silica glass crucible with barium-doped inner wall

Also Published As

Publication number Publication date
JPH0460934B2 (enrdf_load_stackoverflow) 1992-09-29

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