JPH0458567B2 - - Google Patents
Info
- Publication number
- JPH0458567B2 JPH0458567B2 JP59200015A JP20001584A JPH0458567B2 JP H0458567 B2 JPH0458567 B2 JP H0458567B2 JP 59200015 A JP59200015 A JP 59200015A JP 20001584 A JP20001584 A JP 20001584A JP H0458567 B2 JPH0458567 B2 JP H0458567B2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- thin film
- detection element
- thermopile
- absorbing layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- 239000010409 thin film Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- 238000010521 absorption reaction Methods 0.000 claims description 10
- 238000000605 extraction Methods 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/81—Structural details of the junction
- H10N10/817—Structural details of the junction the junction being non-separable, e.g. being cemented, sintered or soldered
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59200015A JPS6177728A (ja) | 1984-09-25 | 1984-09-25 | 熱電堆型赤外検出素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59200015A JPS6177728A (ja) | 1984-09-25 | 1984-09-25 | 熱電堆型赤外検出素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6177728A JPS6177728A (ja) | 1986-04-21 |
JPH0458567B2 true JPH0458567B2 (US06566495-20030520-M00011.png) | 1992-09-17 |
Family
ID=16417380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59200015A Granted JPS6177728A (ja) | 1984-09-25 | 1984-09-25 | 熱電堆型赤外検出素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6177728A (US06566495-20030520-M00011.png) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0765936B2 (ja) * | 1986-05-16 | 1995-07-19 | アンリツ株式会社 | 輻射波検出素子とその製法 |
JP5406083B2 (ja) * | 2010-03-15 | 2014-02-05 | セイコーインスツル株式会社 | サーモパイル型赤外線センサおよびその製造方法 |
JP5406082B2 (ja) * | 2010-03-15 | 2014-02-05 | セイコーインスツル株式会社 | サーモパイル型赤外線センサおよびその製造方法 |
JP5658059B2 (ja) * | 2011-03-03 | 2015-01-21 | 株式会社堀場製作所 | 熱型赤外線センサ |
KR101319639B1 (ko) * | 2011-12-19 | 2013-10-17 | 삼성전기주식회사 | 광조도와 광량 측정 모듈 및 이를 이용한 멀티 채널 측정기 |
JP2014077854A (ja) * | 2012-10-10 | 2014-05-01 | Ntt Electornics Corp | 光学回路 |
JP2015083995A (ja) * | 2015-02-04 | 2015-04-30 | 旭化成エレクトロニクス株式会社 | 赤外線センサ |
FR3048128B1 (fr) * | 2016-02-18 | 2018-05-18 | Centre National De La Recherche Scientifique | Dispositif thermoelectrique |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52134786A (en) * | 1976-05-06 | 1977-11-11 | Fuji Electric Co Ltd | Radiation detector |
JPS57113332A (en) * | 1980-12-30 | 1982-07-14 | Horiba Ltd | Compensating thermopile detector |
JPS5739338B2 (US06566495-20030520-M00011.png) * | 1978-06-23 | 1982-08-20 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5739338U (US06566495-20030520-M00011.png) * | 1980-08-14 | 1982-03-03 |
-
1984
- 1984-09-25 JP JP59200015A patent/JPS6177728A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52134786A (en) * | 1976-05-06 | 1977-11-11 | Fuji Electric Co Ltd | Radiation detector |
JPS5739338B2 (US06566495-20030520-M00011.png) * | 1978-06-23 | 1982-08-20 | ||
JPS57113332A (en) * | 1980-12-30 | 1982-07-14 | Horiba Ltd | Compensating thermopile detector |
Also Published As
Publication number | Publication date |
---|---|
JPS6177728A (ja) | 1986-04-21 |
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