JPH0457463B2 - - Google Patents
Info
- Publication number
- JPH0457463B2 JPH0457463B2 JP60262505A JP26250585A JPH0457463B2 JP H0457463 B2 JPH0457463 B2 JP H0457463B2 JP 60262505 A JP60262505 A JP 60262505A JP 26250585 A JP26250585 A JP 26250585A JP H0457463 B2 JPH0457463 B2 JP H0457463B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- foreign object
- object detection
- rotating mirror
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 52
- 230000003287 optical effect Effects 0.000 claims description 33
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Optical Radar Systems And Details Thereof (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60262505A JPS62124860A (ja) | 1985-11-25 | 1985-11-25 | 光学式異物検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60262505A JPS62124860A (ja) | 1985-11-25 | 1985-11-25 | 光学式異物検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62124860A JPS62124860A (ja) | 1987-06-06 |
JPH0457463B2 true JPH0457463B2 (el) | 1992-09-11 |
Family
ID=17376733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60262505A Granted JPS62124860A (ja) | 1985-11-25 | 1985-11-25 | 光学式異物検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62124860A (el) |
-
1985
- 1985-11-25 JP JP60262505A patent/JPS62124860A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62124860A (ja) | 1987-06-06 |
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