JPH0457011B2 - - Google Patents

Info

Publication number
JPH0457011B2
JPH0457011B2 JP24773484A JP24773484A JPH0457011B2 JP H0457011 B2 JPH0457011 B2 JP H0457011B2 JP 24773484 A JP24773484 A JP 24773484A JP 24773484 A JP24773484 A JP 24773484A JP H0457011 B2 JPH0457011 B2 JP H0457011B2
Authority
JP
Japan
Prior art keywords
station
transport
shutter
function
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP24773484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61125674A (ja
Inventor
Yoshihiko Aizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59247734A priority Critical patent/JPS61125674A/ja
Publication of JPS61125674A publication Critical patent/JPS61125674A/ja
Publication of JPH0457011B2 publication Critical patent/JPH0457011B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing

Landscapes

  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Multi-Process Working Machines And Systems (AREA)
  • Control Of Conveyors (AREA)
JP59247734A 1984-11-22 1984-11-22 物品搬送制御システム Granted JPS61125674A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59247734A JPS61125674A (ja) 1984-11-22 1984-11-22 物品搬送制御システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59247734A JPS61125674A (ja) 1984-11-22 1984-11-22 物品搬送制御システム

Publications (2)

Publication Number Publication Date
JPS61125674A JPS61125674A (ja) 1986-06-13
JPH0457011B2 true JPH0457011B2 (enrdf_load_stackoverflow) 1992-09-10

Family

ID=17167873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59247734A Granted JPS61125674A (ja) 1984-11-22 1984-11-22 物品搬送制御システム

Country Status (1)

Country Link
JP (1) JPS61125674A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0664576B2 (ja) * 1986-09-10 1994-08-22 インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション 材料搬送制御装置及び方法
JPH0693477B2 (ja) * 1986-10-20 1994-11-16 東京エレクトロン株式会社 イオン注入装置

Also Published As

Publication number Publication date
JPS61125674A (ja) 1986-06-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees