JPH0456446B2 - - Google Patents
Info
- Publication number
- JPH0456446B2 JPH0456446B2 JP58178084A JP17808483A JPH0456446B2 JP H0456446 B2 JPH0456446 B2 JP H0456446B2 JP 58178084 A JP58178084 A JP 58178084A JP 17808483 A JP17808483 A JP 17808483A JP H0456446 B2 JPH0456446 B2 JP H0456446B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin film
- cluster
- gas
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17808483A JPS6072218A (ja) | 1983-09-28 | 1983-09-28 | 薄膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17808483A JPS6072218A (ja) | 1983-09-28 | 1983-09-28 | 薄膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6072218A JPS6072218A (ja) | 1985-04-24 |
| JPH0456446B2 true JPH0456446B2 (enrdf_load_stackoverflow) | 1992-09-08 |
Family
ID=16042344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17808483A Granted JPS6072218A (ja) | 1983-09-28 | 1983-09-28 | 薄膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6072218A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62118518A (ja) * | 1985-11-19 | 1987-05-29 | Ulvac Corp | 化合物半導体の形成方法 |
| DE69722277T2 (de) | 1996-01-31 | 2004-04-01 | Canon K.K. | Abrechnungsvorrichtung und ein die Abrechnungsvorrichtung verwendendes Informationsverteilungssystem |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4898775A (enrdf_load_stackoverflow) * | 1972-03-28 | 1973-12-14 | ||
| JPS5462776A (en) * | 1977-10-27 | 1979-05-21 | Nec Corp | Production of compound semiconductor thin films |
| JPS6048831B2 (ja) * | 1978-06-22 | 1985-10-29 | 日本電気株式会社 | バブル用パルス電流駆動装置 |
| JPS5625772A (en) * | 1979-08-09 | 1981-03-12 | Mieko Kiyozawa | Toy for training wearing of cloth for infant |
-
1983
- 1983-09-28 JP JP17808483A patent/JPS6072218A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6072218A (ja) | 1985-04-24 |
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