JPH0456241B2 - - Google Patents

Info

Publication number
JPH0456241B2
JPH0456241B2 JP58170762A JP17076283A JPH0456241B2 JP H0456241 B2 JPH0456241 B2 JP H0456241B2 JP 58170762 A JP58170762 A JP 58170762A JP 17076283 A JP17076283 A JP 17076283A JP H0456241 B2 JPH0456241 B2 JP H0456241B2
Authority
JP
Japan
Prior art keywords
light
acousto
optic effect
element group
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58170762A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6061603A (ja
Inventor
Hiroo Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP17076283A priority Critical patent/JPS6061603A/ja
Priority to US06/650,335 priority patent/US4679941A/en
Priority to GB08423411A priority patent/GB2147097B/en
Publication of JPS6061603A publication Critical patent/JPS6061603A/ja
Publication of JPH0456241B2 publication Critical patent/JPH0456241B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP17076283A 1983-09-16 1983-09-16 微小寸法測定装置 Granted JPS6061603A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP17076283A JPS6061603A (ja) 1983-09-16 1983-09-16 微小寸法測定装置
US06/650,335 US4679941A (en) 1983-09-16 1984-09-13 Micro-dimensional measurement apparatus
GB08423411A GB2147097B (en) 1983-09-16 1984-09-17 Micro-dimensional measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17076283A JPS6061603A (ja) 1983-09-16 1983-09-16 微小寸法測定装置

Publications (2)

Publication Number Publication Date
JPS6061603A JPS6061603A (ja) 1985-04-09
JPH0456241B2 true JPH0456241B2 (enrdf_load_stackoverflow) 1992-09-07

Family

ID=15910904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17076283A Granted JPS6061603A (ja) 1983-09-16 1983-09-16 微小寸法測定装置

Country Status (1)

Country Link
JP (1) JPS6061603A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5536924B2 (enrdf_load_stackoverflow) * 1975-02-18 1980-09-25
JPS58190704A (ja) * 1982-04-30 1983-11-07 Nec Kyushu Ltd 線巾の測定方法

Also Published As

Publication number Publication date
JPS6061603A (ja) 1985-04-09

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