JPH0454981B2 - - Google Patents

Info

Publication number
JPH0454981B2
JPH0454981B2 JP58131615A JP13161583A JPH0454981B2 JP H0454981 B2 JPH0454981 B2 JP H0454981B2 JP 58131615 A JP58131615 A JP 58131615A JP 13161583 A JP13161583 A JP 13161583A JP H0454981 B2 JPH0454981 B2 JP H0454981B2
Authority
JP
Japan
Prior art keywords
thin film
insulating layer
opening
side wall
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58131615A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6024050A (ja
Inventor
Nobuo Toyokura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13161583A priority Critical patent/JPS6024050A/ja
Publication of JPS6024050A publication Critical patent/JPS6024050A/ja
Publication of JPH0454981B2 publication Critical patent/JPH0454981B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP13161583A 1983-07-19 1983-07-19 薄膜素子の製造方法 Granted JPS6024050A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13161583A JPS6024050A (ja) 1983-07-19 1983-07-19 薄膜素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13161583A JPS6024050A (ja) 1983-07-19 1983-07-19 薄膜素子の製造方法

Publications (2)

Publication Number Publication Date
JPS6024050A JPS6024050A (ja) 1985-02-06
JPH0454981B2 true JPH0454981B2 (https=) 1992-09-01

Family

ID=15062201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13161583A Granted JPS6024050A (ja) 1983-07-19 1983-07-19 薄膜素子の製造方法

Country Status (1)

Country Link
JP (1) JPS6024050A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146051A (ja) * 1984-08-10 1986-03-06 Sony Corp 配線方法
JPH0744181B2 (ja) * 1986-09-03 1995-05-15 日本電気株式会社 半導体装置及びその製造方法
US5387311A (en) * 1993-02-16 1995-02-07 Vlsi Technology, Inc. Method for manufacturing anti-fuse structures
JP2005268749A (ja) * 2004-02-19 2005-09-29 Ricoh Co Ltd 半導体装置
US7999352B2 (en) * 2004-02-19 2011-08-16 Ricoh Company, Ltd. Semiconductor device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582458A (en) * 1978-12-18 1980-06-21 Toshiba Corp Preparation of semiconductor device

Also Published As

Publication number Publication date
JPS6024050A (ja) 1985-02-06

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