JPH0453Y2 - - Google Patents

Info

Publication number
JPH0453Y2
JPH0453Y2 JP1988116352U JP11635288U JPH0453Y2 JP H0453 Y2 JPH0453 Y2 JP H0453Y2 JP 1988116352 U JP1988116352 U JP 1988116352U JP 11635288 U JP11635288 U JP 11635288U JP H0453 Y2 JPH0453 Y2 JP H0453Y2
Authority
JP
Japan
Prior art keywords
substrate
annular
holding mechanism
substrate holding
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1988116352U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238465U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988116352U priority Critical patent/JPH0453Y2/ja
Publication of JPH0238465U publication Critical patent/JPH0238465U/ja
Application granted granted Critical
Publication of JPH0453Y2 publication Critical patent/JPH0453Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP1988116352U 1988-09-02 1988-09-02 Expired JPH0453Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988116352U JPH0453Y2 (en, 2012) 1988-09-02 1988-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988116352U JPH0453Y2 (en, 2012) 1988-09-02 1988-09-02

Publications (2)

Publication Number Publication Date
JPH0238465U JPH0238465U (en, 2012) 1990-03-14
JPH0453Y2 true JPH0453Y2 (en, 2012) 1992-01-06

Family

ID=31358811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988116352U Expired JPH0453Y2 (en, 2012) 1988-09-02 1988-09-02

Country Status (1)

Country Link
JP (1) JPH0453Y2 (en, 2012)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52110538U (en, 2012) * 1976-02-16 1977-08-23
DE2646784C3 (de) * 1976-10-16 1980-02-28 Heinrich Dr.-Ing. 4714 Selm Spodig Dauermagnetische Haftplatte
JPS58126978A (ja) * 1982-01-22 1983-07-28 Hitachi Ltd 基板の保持装置

Also Published As

Publication number Publication date
JPH0238465U (en, 2012) 1990-03-14

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