JPH0238465U - - Google Patents
Info
- Publication number
- JPH0238465U JPH0238465U JP11635288U JP11635288U JPH0238465U JP H0238465 U JPH0238465 U JP H0238465U JP 11635288 U JP11635288 U JP 11635288U JP 11635288 U JP11635288 U JP 11635288U JP H0238465 U JPH0238465 U JP H0238465U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- base body
- attracted
- annular base
- holding mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988116352U JPH0453Y2 (en, 2012) | 1988-09-02 | 1988-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988116352U JPH0453Y2 (en, 2012) | 1988-09-02 | 1988-09-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0238465U true JPH0238465U (en, 2012) | 1990-03-14 |
| JPH0453Y2 JPH0453Y2 (en, 2012) | 1992-01-06 |
Family
ID=31358811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988116352U Expired JPH0453Y2 (en, 2012) | 1988-09-02 | 1988-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453Y2 (en, 2012) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52110538U (en, 2012) * | 1976-02-16 | 1977-08-23 | ||
| JPS5349667A (en) * | 1976-10-16 | 1978-05-06 | Spodig Heinrich | Adhesive plate with permanent magnet |
| JPS58126978A (ja) * | 1982-01-22 | 1983-07-28 | Hitachi Ltd | 基板の保持装置 |
-
1988
- 1988-09-02 JP JP1988116352U patent/JPH0453Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52110538U (en, 2012) * | 1976-02-16 | 1977-08-23 | ||
| JPS5349667A (en) * | 1976-10-16 | 1978-05-06 | Spodig Heinrich | Adhesive plate with permanent magnet |
| JPS58126978A (ja) * | 1982-01-22 | 1983-07-28 | Hitachi Ltd | 基板の保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0453Y2 (en, 2012) | 1992-01-06 |
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