JPH0453254B2 - - Google Patents

Info

Publication number
JPH0453254B2
JPH0453254B2 JP60035655A JP3565585A JPH0453254B2 JP H0453254 B2 JPH0453254 B2 JP H0453254B2 JP 60035655 A JP60035655 A JP 60035655A JP 3565585 A JP3565585 A JP 3565585A JP H0453254 B2 JPH0453254 B2 JP H0453254B2
Authority
JP
Japan
Prior art keywords
pattern
image
autocorrelation
core material
same shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60035655A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61194337A (ja
Inventor
Koichiro Myagi
Junkichi Kino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP60035655A priority Critical patent/JPS61194337A/ja
Publication of JPS61194337A publication Critical patent/JPS61194337A/ja
Publication of JPH0453254B2 publication Critical patent/JPH0453254B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP60035655A 1985-02-25 1985-02-25 同じ形状の繰り返しパターンの良否を判定する方法 Granted JPS61194337A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60035655A JPS61194337A (ja) 1985-02-25 1985-02-25 同じ形状の繰り返しパターンの良否を判定する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60035655A JPS61194337A (ja) 1985-02-25 1985-02-25 同じ形状の繰り返しパターンの良否を判定する方法

Publications (2)

Publication Number Publication Date
JPS61194337A JPS61194337A (ja) 1986-08-28
JPH0453254B2 true JPH0453254B2 (de) 1992-08-26

Family

ID=12447889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60035655A Granted JPS61194337A (ja) 1985-02-25 1985-02-25 同じ形状の繰り返しパターンの良否を判定する方法

Country Status (1)

Country Link
JP (1) JPS61194337A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016157289A1 (ja) * 2015-03-27 2016-10-06 三菱電機株式会社 検出装置
JP7146092B2 (ja) * 2019-07-25 2022-10-03 三菱電機株式会社 検査装置及び方法、並びにプログラム及び記録媒体

Also Published As

Publication number Publication date
JPS61194337A (ja) 1986-08-28

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Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19930223