JPH0453253B2 - - Google Patents
Info
- Publication number
- JPH0453253B2 JPH0453253B2 JP15728784A JP15728784A JPH0453253B2 JP H0453253 B2 JPH0453253 B2 JP H0453253B2 JP 15728784 A JP15728784 A JP 15728784A JP 15728784 A JP15728784 A JP 15728784A JP H0453253 B2 JPH0453253 B2 JP H0453253B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- inspected
- defect
- defect candidate
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 142
- 238000000034 method Methods 0.000 claims description 29
- 238000007689 inspection Methods 0.000 claims description 27
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 22
- 238000001514 detection method Methods 0.000 description 17
- 238000005070 sampling Methods 0.000 description 13
- 230000012447 hatching Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000003111 delayed effect Effects 0.000 description 6
- 238000013139 quantization Methods 0.000 description 6
- 239000000284 extract Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15728784A JPS6138450A (ja) | 1984-07-30 | 1984-07-30 | パタ−ン欠陥検査方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15728784A JPS6138450A (ja) | 1984-07-30 | 1984-07-30 | パタ−ン欠陥検査方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6138450A JPS6138450A (ja) | 1986-02-24 |
| JPH0453253B2 true JPH0453253B2 (ko) | 1992-08-26 |
Family
ID=15646357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15728784A Granted JPS6138450A (ja) | 1984-07-30 | 1984-07-30 | パタ−ン欠陥検査方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6138450A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4845558A (en) * | 1987-12-03 | 1989-07-04 | Kla Instruments Corporation | Method and apparatus for detecting defects in repeated microminiature patterns |
| JP2882409B1 (ja) | 1998-04-24 | 1999-04-12 | 株式会社東京精密 | 外観検査装置 |
| JP4910412B2 (ja) * | 2006-02-02 | 2012-04-04 | カシオ計算機株式会社 | 外観検査方法 |
-
1984
- 1984-07-30 JP JP15728784A patent/JPS6138450A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138450A (ja) | 1986-02-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0160767B2 (ko) | ||
| JPH0623999B2 (ja) | パタ−ン欠陥検出方法 | |
| JPH05281154A (ja) | パターン欠陥検査装置 | |
| JPH0210461B2 (ko) | ||
| JPH0453253B2 (ko) | ||
| JPS5924361B2 (ja) | ２次元画像比較検査装置 | |
| JP2003203218A (ja) | 外観検査装置および方法 | |
| JPH063541B2 (ja) | パターン検査装置 | |
| US6005966A (en) | Method and apparatus for multi-stream detection of high density metalization layers of multilayer structures having low contrast | |
| JP4474006B2 (ja) | 検査装置 | |
| JP2000321038A (ja) | パターン欠陥検出方法 | |
| JPH058762B2 (ko) | ||
| JPH0160766B2 (ko) | ||
| JPS61140804A (ja) | パタ−ン検査装置 | |
| JPS6135303A (ja) | パタ−ン欠陥検査装置 | |
| JPH0617875B2 (ja) | パターン検査方法およびその装置 | |
| JPH043820B2 (ko) | ||
| JPH0564857B2 (ko) | ||
| JP2676990B2 (ja) | 配線パターン検査装置 | |
| JP2677052B2 (ja) | スルーホール検査装置 | |
| JP4164636B2 (ja) | パターン検査方法 | |
| JP2850601B2 (ja) | プリント基板パターン検査装置 | |
| JP2001021502A (ja) | 欠陥検査方法及びその装置 | |
| JPH04148280A (ja) | パターン検査装置 | |
| JPH0572144A (ja) | 検査範囲検出装置 |