JPH0452628B2 - - Google Patents
Info
- Publication number
- JPH0452628B2 JPH0452628B2 JP58176716A JP17671683A JPH0452628B2 JP H0452628 B2 JPH0452628 B2 JP H0452628B2 JP 58176716 A JP58176716 A JP 58176716A JP 17671683 A JP17671683 A JP 17671683A JP H0452628 B2 JPH0452628 B2 JP H0452628B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- transparent substrate
- organic polymer
- gate insulating
- film transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
Landscapes
- Liquid Crystal (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58176716A JPS6066865A (ja) | 1983-09-24 | 1983-09-24 | 薄膜トランジスタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58176716A JPS6066865A (ja) | 1983-09-24 | 1983-09-24 | 薄膜トランジスタの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6066865A JPS6066865A (ja) | 1985-04-17 |
| JPH0452628B2 true JPH0452628B2 (enExample) | 1992-08-24 |
Family
ID=16018511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58176716A Granted JPS6066865A (ja) | 1983-09-24 | 1983-09-24 | 薄膜トランジスタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6066865A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224277A (ja) * | 1984-04-20 | 1985-11-08 | Sanyo Electric Co Ltd | 薄膜トランジスタ |
| JP2900229B2 (ja) * | 1994-12-27 | 1999-06-02 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法および電気光学装置 |
| US5834327A (en) | 1995-03-18 | 1998-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing display device |
| US7399668B2 (en) | 2004-09-30 | 2008-07-15 | 3M Innovative Properties Company | Method for making electronic devices having a dielectric layer surface treatment |
-
1983
- 1983-09-24 JP JP58176716A patent/JPS6066865A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6066865A (ja) | 1985-04-17 |
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