JPH0452617B2 - - Google Patents
Info
- Publication number
- JPH0452617B2 JPH0452617B2 JP16630183A JP16630183A JPH0452617B2 JP H0452617 B2 JPH0452617 B2 JP H0452617B2 JP 16630183 A JP16630183 A JP 16630183A JP 16630183 A JP16630183 A JP 16630183A JP H0452617 B2 JPH0452617 B2 JP H0452617B2
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- stage
- rotation
- pellets
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 101
- 235000012431 wafers Nutrition 0.000 claims description 18
- 238000012937 correction Methods 0.000 claims description 14
- 210000000078 claw Anatomy 0.000 description 5
- 238000000605 extraction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01039—Yttrium [Y]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Die Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16630183A JPS6057942A (ja) | 1983-09-09 | 1983-09-09 | ペレツトマウント装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16630183A JPS6057942A (ja) | 1983-09-09 | 1983-09-09 | ペレツトマウント装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6057942A JPS6057942A (ja) | 1985-04-03 |
JPH0452617B2 true JPH0452617B2 (enrdf_load_stackoverflow) | 1992-08-24 |
Family
ID=15828806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16630183A Granted JPS6057942A (ja) | 1983-09-09 | 1983-09-09 | ペレツトマウント装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6057942A (enrdf_load_stackoverflow) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62295431A (ja) * | 1986-06-13 | 1987-12-22 | Nichiden Mach Ltd | ワ−クピツクアツプ装置 |
JPS6373930U (enrdf_load_stackoverflow) * | 1986-10-30 | 1988-05-17 | ||
JPS647627A (en) * | 1987-06-30 | 1989-01-11 | Toshiba Corp | Method for mounting electronic component |
JPH01152634A (ja) * | 1987-12-09 | 1989-06-15 | Rohm Co Ltd | 半導体ペレットの組立装置 |
JP2006135013A (ja) * | 2004-11-04 | 2006-05-25 | Renesas Technology Corp | 実装装置及び実装方法 |
JP7683972B1 (ja) * | 2024-02-29 | 2025-05-27 | 株式会社 東京ウエルズ | ワーク移送装置、ワーク移送方法 |
-
1983
- 1983-09-09 JP JP16630183A patent/JPS6057942A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6057942A (ja) | 1985-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2019210626A1 (zh) | 一种长距离、精准快速取装芯片装置 | |
CN116153820A (zh) | 一种多类型芯片全自动混合贴装设备及贴装方法 | |
JP2002520860A (ja) | ウェハーを極小接触でハンドリングするためのウェハーキャリア及び方法 | |
JP2000012568A (ja) | ダイボンダ | |
CN102909941A (zh) | 面板的印刷装置 | |
JPH05190414A (ja) | 基板吸着装置 | |
JPH0851138A (ja) | 多重基板伝達装置 | |
JPH0452617B2 (enrdf_load_stackoverflow) | ||
US7101141B2 (en) | System for handling microelectronic dies having a compact die ejector | |
CN110970322A (zh) | 一种芯片贴片设备及芯片贴片方法 | |
KR102500554B1 (ko) | 멀티 웨이퍼 트랜스퍼 및 이를 이용한 웨이퍼 이송방법 | |
CN111715558B (zh) | 一种多输送盘的自动检测筛选系统 | |
JP3687389B2 (ja) | 基板処理装置 | |
EP3503172B1 (en) | Apparatus and system | |
JP4298188B2 (ja) | 基板搬送装置及び基板搬送方法 | |
CN216980525U (zh) | 一种晶圆对准装置 | |
JPH09275115A (ja) | 基板の位置決め装置 | |
JPH06267808A (ja) | チャンバ接続用ガイド機構付きマルチチャンバ装置 | |
JPH01152634A (ja) | 半導体ペレットの組立装置 | |
JPH0341468Y2 (enrdf_load_stackoverflow) | ||
JPS62295431A (ja) | ワ−クピツクアツプ装置 | |
JP2000156391A (ja) | 半導体ウェーハ検査装置 | |
JPH07176595A (ja) | 基板搬送装置 | |
JP2676848B2 (ja) | 電子部品装着装置 | |
JPS623979B2 (enrdf_load_stackoverflow) |