JPH0450738B2 - - Google Patents

Info

Publication number
JPH0450738B2
JPH0450738B2 JP63079461A JP7946188A JPH0450738B2 JP H0450738 B2 JPH0450738 B2 JP H0450738B2 JP 63079461 A JP63079461 A JP 63079461A JP 7946188 A JP7946188 A JP 7946188A JP H0450738 B2 JPH0450738 B2 JP H0450738B2
Authority
JP
Japan
Prior art keywords
etching
semiconductor
electrochemical etching
semiconductor substrate
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63079461A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01251620A (ja
Inventor
Tsutomu Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP7946188A priority Critical patent/JPH01251620A/ja
Publication of JPH01251620A publication Critical patent/JPH01251620A/ja
Publication of JPH0450738B2 publication Critical patent/JPH0450738B2/ja
Granted legal-status Critical Current

Links

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  • Weting (AREA)
JP7946188A 1988-03-30 1988-03-30 半導体装置の製造方法 Granted JPH01251620A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7946188A JPH01251620A (ja) 1988-03-30 1988-03-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7946188A JPH01251620A (ja) 1988-03-30 1988-03-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPH01251620A JPH01251620A (ja) 1989-10-06
JPH0450738B2 true JPH0450738B2 (enExample) 1992-08-17

Family

ID=13690520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7946188A Granted JPH01251620A (ja) 1988-03-30 1988-03-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPH01251620A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5370770A (en) * 1976-12-07 1978-06-23 Nec Corp Production of schottky barrier gate type field effect transistor

Also Published As

Publication number Publication date
JPH01251620A (ja) 1989-10-06

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